Patents by Inventor Ming-Hau Tung

Ming-Hau Tung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7405863
    Abstract: A method of fabricating a MEMS device includes the formation of support posts having horizontal wing portions at the edges of the post. A mechanical layer is deposited over the support posts and portions of the mechanical layer overlying portions of the support post other than the horizontal wing portions are etched away. A resultant MEMS device includes a mechanical layer overlying at least a portion of the horizontal wing portions of the underlying support structures.
    Type: Grant
    Filed: June 1, 2006
    Date of Patent: July 29, 2008
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventors: Ming-Hau Tung, Wonsuk Chung
  • Publication number: 20080151347
    Abstract: A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure.
    Type: Application
    Filed: February 20, 2008
    Publication date: June 26, 2008
    Applicant: IDC, LLC
    Inventors: Clarence Chui, Jeffrey B. Sampsell, William J. Cummings, Ming-Hau Tung
  • Publication number: 20080142347
    Abstract: MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. The MEMS switches may comprise compliant terminals and/or contact conductors to produce contact swiping.
    Type: Application
    Filed: December 19, 2006
    Publication date: June 19, 2008
    Inventors: Alan Lewis, Lior Kogut, Ming-Hau Tung
  • Patent number: 7385744
    Abstract: A microelectromechanical (MEMS) device includes a functional layer including a first material and a deformable layer including a second material. The second material is different from the first material. The deformable layer is mechanically coupled to the functional layer at a junction. The functional layer and the deformable layer have substantially equal internal stresses at the junction.
    Type: Grant
    Filed: June 28, 2006
    Date of Patent: June 10, 2008
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventors: Lior Kogut, Ming-Hau Tung, Brian Arbuckle
  • Publication number: 20080112039
    Abstract: A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure.
    Type: Application
    Filed: January 15, 2008
    Publication date: May 15, 2008
    Applicant: IDC, LLC
    Inventors: Clarence Chui, Jeffrey Sampsell, William Cummings, Ming-Hau Tung
  • Patent number: 7355780
    Abstract: An interferometric modulator array device with backlighting is disclosed. The interferometric modulator array device comprises a plurality of interferometric modulator elements, wherein each of the interferometric modulator elements comprises an optical cavity. The interferometric modulator array includes an optical aperture region, and at least one reflecting element is positioned so as to receive light passing through the optical aperture region and reflect at least a portion of the received light to the cavities of the interferometric modulator elements. In some embodiments, the interferometric modulator elements may be separated from each other such that an optical aperture region is formed between adjacent interferometric modulator elements.
    Type: Grant
    Filed: February 11, 2005
    Date of Patent: April 8, 2008
    Assignee: IDC, LLC
    Inventors: Clarence Chui, Ming-Hau Tung
  • Patent number: 7349139
    Abstract: An interferometric modulator array device with backlighting is disclosed. The interferometric modulator array device comprises a plurality of interferometric modulator elements, wherein each of the interferometric modulator elements comprises an optical cavity. The interferometric modulator array includes an optical aperture region, and at least one reflecting element is positioned so as to receive light passing through the optical aperture region and reflect at least a portion of the received light to the cavities of the interferometric modulator elements. In some embodiments, the interferometric modulator elements may be separated from each other such that an optical aperture region is formed between adjacent interferometric modulator elements.
    Type: Grant
    Filed: May 3, 2006
    Date of Patent: March 25, 2008
    Assignee: IDC, LLC
    Inventors: Clarence Chui, Ming-Hau Tung
  • Patent number: 7349141
    Abstract: An interferometric modulator includes a post structure comprising an optical element. In a preferred embodiment, the optical element in the post structure is a reflective element, e.g., a mirror. In another embodiment, the optical element in the post structure is an etalon, e.g., a dark etalon. The optical element in the post structure may decrease the amount of light that would otherwise be retroreflected from the post structure. In various embodiments, the optical element in the post structure increases the brightness of the interferometric modulator by redirecting light into the interferometric cavity. For example, in certain embodiments, the optical element in the post structure increases the backlighting of the interferometric modulator.
    Type: Grant
    Filed: February 4, 2005
    Date of Patent: March 25, 2008
    Assignee: IDC, LLC
    Inventors: Ming-Hau Tung, Srinivasan Sethuraman
  • Patent number: 7342705
    Abstract: A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure.
    Type: Grant
    Filed: January 14, 2005
    Date of Patent: March 11, 2008
    Assignee: IDC, LLC
    Inventors: Clarence Chui, Jeffrey B. Sampsell, William J. Cummings, Ming-Hau Tung
  • Publication number: 20080055707
    Abstract: A microelectromechanical (MEMS) device includes a functional layer including a first material, a deformable layer including a second material different from the first material, and a connecting element including the first material. The connecting element is mechanically coupled to the deformable layer and the functional layer. The connecting element and the deformable layer form an interface between the first material and the second material. The interface is spaced from the functional layer.
    Type: Application
    Filed: June 28, 2006
    Publication date: March 6, 2008
    Inventors: Lior Kogut, Ming-Hau Tung, Brian Arbuckle
  • Publication number: 20080032439
    Abstract: A method for etching a target material in the presence of a structural material with improved selectivity uses a vapor phase etchant and a co-etchant. Embodiments of the method exhibit improved selectivities of from at least about 2-times to at least about 100-times compared with a similar etching process not using a co-etchant. In some embodiments, the target material comprises a metal etchable by the vapor phase etchant. Embodiments of the method are particularly useful in the manufacture of MEMS devices, for example, interferometric modulators. In some embodiments, the target material comprises a metal etchable by the vapor phase etchant, for example, molybdenum and the structural material comprises a dielectric, for example silicon dioxide.
    Type: Application
    Filed: August 2, 2006
    Publication date: February 7, 2008
    Inventors: Xiaoming Yan, Brian Arbuckle, Evgeni Gousev, Ming-Hau Tung
  • Publication number: 20080013144
    Abstract: A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element includes a deformable layer and a reflective element. The actuation electrode is between the deformable layer and the reflective element.
    Type: Application
    Filed: July 2, 2007
    Publication date: January 17, 2008
    Applicant: IDC, LLC
    Inventors: Clarence Chui, Denis Endisch, Lior Kogut, Ming-Hau Tung, Yeh-Jiun Tung, Chih-Wei Chiang
  • Publication number: 20080013145
    Abstract: A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
    Type: Application
    Filed: July 2, 2007
    Publication date: January 17, 2008
    Applicant: IDC, LLC
    Inventors: Clarence Chui, William Cummings, Brian Gally, Lior Kogut, Ming-Hau Tung, Yeh-Jiun Tung, Chih-Wei Chiang, Denis Endisch
  • Publication number: 20080003737
    Abstract: Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.
    Type: Application
    Filed: June 30, 2006
    Publication date: January 3, 2008
    Inventors: Ming-Hau Tung, Lior Kogut
  • Publication number: 20080003710
    Abstract: A microelectromechanical (MEMS) device includes a functional layer including a first material and a deformable layer including a second material. The second material is different from the first material. The deformable layer is mechanically coupled to the functional layer at a junction. The functional layer and the deformable layer have substantially equal internal stresses at the junction.
    Type: Application
    Filed: June 28, 2006
    Publication date: January 3, 2008
    Inventors: Lior Kogut, Ming-Hau Tung, Brian Arbuckle
  • Publication number: 20070279753
    Abstract: A method of fabricating a MEMS device includes the formation of support posts having horizontal wing portions at the edges of the post. A mechanical layer is deposited over the support posts and portions of the mechanical layer overlying portions of the support post other than the horizontal wing portions are etched away. A resultant MEMS device includes a mechanical layer overlying at least a portion of the horizontal wing portions of the underlying support structures.
    Type: Application
    Filed: June 1, 2006
    Publication date: December 6, 2007
    Inventors: Ming-Hau Tung, Wonsuk Chung
  • Publication number: 20070249079
    Abstract: Methods of making MEMS devices including interferometric modulators involve depositing various layers, including stationary layers, movable layers and sacrificial layers, on a substrate. A non-planar surface is formed on one or more layers by flowing an etchant through a permeable layer. In one embodiment the non-planar surface is formed on a sacrificial layer. A movable layer formed over the non-planar surface of the sacrificial layer results in a non-planar interface between the sacrificial and movable layers. Removal of the sacrificial layer results in a released MEMS device having reduced contact area between the movable and stationary layers when the MEMS device is actuated. The reduced contact area results in lower adhesion forces and reduced stiction during actuation of the MEMS device. These methods may be used to manufacture released and unreleased interferometric modulators.
    Type: Application
    Filed: April 19, 2006
    Publication date: October 25, 2007
    Inventors: Teruo Sasagawa, Lior Kogut, Ming-Hau Tung
  • Publication number: 20070249078
    Abstract: Methods of making MEMS devices including interferometric modulators involve depositing various layers, including stationary layers, movable layers and sacrificial layers, on a substrate. Apertures are formed in one or more of the various layers so as to form a non-planar surface on the movable and/or the stationary layers. Other layers may be formed over the formed apertures. Removal of the sacrificial layer from between the resulting non-planar movable and/or stationary layers results in a released MEMS device having reduced contact area and/or a larger surface separation between the movable and stationary layers when the MEMS device is actuated. The reduced contact area results in lower adhesion forces and reduced stiction during actuation of the MEMS device. These methods may be used to manufacture released and unreleased interferometric modulators.
    Type: Application
    Filed: April 19, 2006
    Publication date: October 25, 2007
    Inventors: Ming-Hau Tung, Sriram Akella, William Cummings, Lior Kogut
  • Publication number: 20070206267
    Abstract: Methods of forming a protective coating on one or more surfaces of a microelectromechanical device are disclosed comprising the steps of forming a composite layer of a sacrificial material and a protective material, and selectively etching the sacrificial material to form a protective coating. The protective coatings of the invention preferably improve one or more aspects of the performance of the microelectromechanical devices in which they are incorporated. Also disclosed are microelectromechanical devices formed by methods of the invention, and visual display devices incorporating such devices.
    Type: Application
    Filed: March 2, 2006
    Publication date: September 6, 2007
    Inventors: Ming-Hau Tung, Lior Kogut
  • Publication number: 20070196040
    Abstract: Methods and apparatus for providing light in an interferometric modulator device are provided. In one embodiment, a microelectromechanical system (MEMS) is provided that includes a transparent substrate and a plurality of interferometric modulators. The interferometric modulators include an optical stack coupled to the transparent substrate, a reflective layer over the optical stack, and one or more posts to support the reflective and to provide a path for light from a backlight for lighting the interferometric modulators.
    Type: Application
    Filed: February 17, 2006
    Publication date: August 23, 2007
    Inventors: Chun-Ming Wang, Ming-Hau Tung, Surya Ganti