Patents by Inventor Ming-Hsi Chiang

Ming-Hsi Chiang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220359235
    Abstract: A method for processing a substrate is provided. The method includes the following operations: placing a substrate over a first injector in a substrate processing apparatus, the substrate having a front surface and a back surface opposite to the front surface, and the front surface having a plurality of concentric regions; adjusting a temperature of each of the plurality of concentric regions by controlling at least one of a flow rate and a temperature associated with a fluid dispensing from the first injector; and rotating the substrate by a spin base disposed below the substrate, the substrate is rotated with respect to a center axis perpendicular to the front surface thereof when adjusting the temperature. The spin base includes a ring opening for rotating relative to the first injector, and the first injector is displaced from a projection of a center of the substrate from a top view perspective.
    Type: Application
    Filed: July 21, 2022
    Publication date: November 10, 2022
    Inventors: PO-YUAN WANG, TZU ANG CHIANG, JIAN-JOU LIAN, YU SHIH WANG, CHUN-NENG LIN, MING-HSI YEH
  • Publication number: 20220359741
    Abstract: A method of forming a semiconductor device includes surrounding a dummy gate disposed over a fin with a dielectric material; forming a gate trench in the dielectric material by removing the dummy gate and by removing upper portions of a first gate spacer disposed along sidewalls of the dummy gate, the gate trench comprising a lower trench between remaining lower portions of the first gate spacer and comprising an upper trench above the lower trench; forming a gate dielectric layer, a work function layer and a glue layer successively in the gate trench; removing the glue layer and the work function layer from the upper trench; filling the gate trench with a gate electrode material after the removing; and removing the gate electrode material from the upper trench, remaining portions of the gate electrode material forming a gate electrode.
    Type: Application
    Filed: July 26, 2022
    Publication date: November 10, 2022
    Inventors: Jian-Jou Lian, Chun-Neng Lin, Chieh-Wei Chen, Tzu-Ang Chiang, Ming-Hsi Yeh
  • Publication number: 20220359713
    Abstract: A semiconductor device includes a semiconductor fin. The semiconductor device includes first spacers over the semiconductor fin. The semiconductor device includes second spacers over the semiconductor fin. The second spacers vertically extend farther from the semiconductor fin than the first spacers. The semiconductor device includes a metal gate over the semiconductor fin, the metal gate is sandwiched by the first spacers. The metal gate includes a glue layer that contains tantalum nitride.
    Type: Application
    Filed: July 26, 2022
    Publication date: November 10, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Jian-Jou Lian, Tzu Ang Chiang, Ming-Hsi Yeh, Chun-Neng Lin, Po-Yuan Wang, Chieh-Wei Chen
  • Publication number: 20220246442
    Abstract: In a wet etching process to pattern a metal layer such as a p-metal work function layer over a dielectric layer such as a high-k gate dielectric layer, a selectivity of the wet etching solution between the metal layer and the dielectric layer is increased utilizing an inhibitor. The inhibitor includes such inhibitors as a phosphoric acid, a carboxylic acid, an amino acid, or a hydroxyl group.
    Type: Application
    Filed: April 18, 2022
    Publication date: August 4, 2022
    Inventors: Jian-Jou Lian, Chun-Neng Lin, Chieh-Wei Chen, Tzu-Ang Chiang, Ming-Hsi Yeh
  • Patent number: 11398391
    Abstract: A substrate processing apparatus is provided. The substrate processing apparatus includes a plurality of holding members and at least a first injector. The plurality of holding members are configured to hold a substrate. The substrate includes a front surface and a back surface opposite to the front surface. The first injector is below the holding members and is configured to face the back surface of the substrate. The first injector is displaced from a projection of a center of the substrate from a top view perspective. A method for processing a substrate is also provided.
    Type: Grant
    Filed: May 19, 2020
    Date of Patent: July 26, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Po-Yuan Wang, Tzu Ang Chiang, Jian-Jou Lian, Yu Shih Wang, Chun-Neng Lin, Ming-Hsi Yeh
  • Patent number: 10016748
    Abstract: This invention relates to an iron-sulfur complex that is capable of efficiently catalyzing formation of hydrogen, and a method for producing hydrogen using the complex as a catalyst. The iron-sulfur complex provided herein comprises: a structure of formula (I) wherein the ligands L1 to L3, L5 and L6 and the groups X1 to X3 are each selected from the group consisting of alkyl, alkenyl, alkynyl and aryl that are substituted or unsubstituted, hydroxyl, carbonyl, aldehyde, and so on; L4 is a bridging ligand selected from the group consisting of hydroxyl, carbonyl, and so on; and the symbol ā€œzā€ means the charge, which is an integer with the range of ?3 to +2. X1 and X2 may join together to form a bridging group between the two sulfur atoms. X3 may alternatively be a vacant site.
    Type: Grant
    Filed: October 8, 2014
    Date of Patent: July 10, 2018
    Assignee: ACADEMIA SINICA
    Inventors: Ming-Hsi Chiang, Yu-Chiao Liu, Kai-Ti Chu
  • Publication number: 20150101936
    Abstract: This invention relates to an iron-sulfur complex that is capable of efficiently catalyzing formation of hydrogen, and a method for producing hydrogen using the complex as a catalyst. The iron-sulfur complex provided herein comprises: a structure of formula (I) wherein the ligands L1 to L3, L5 and L6 and the groups X1 to X3 are each selected from the group consisting of alkyl, alkenyl, alkynyl and aryl that are substituted or unsubstituted, hydroxyl, carbonyl, aldehyde, and so on; L4 is a bridging ligand selected from the group consisting of hydroxyl, carbonyl, and so on; and the symbol ā€œzā€ means the charge, which is an integer with the range of ?3 to +2. X1 and X2 may join together to form a bridging group between the two sulfur atoms. X3 may alternatively be a vacant site.
    Type: Application
    Filed: October 8, 2014
    Publication date: April 16, 2015
    Inventors: MING-HSI CHIANG, YU-CHIAO LIU, KAI-TI CHU
  • Publication number: 20140132539
    Abstract: A touch display device including a light providing unit and a touch panel is provided. The touch panel includes a cover plate, a touch sensing element, and a decoration layer. The cover plate has a light transmission region and a periphery region surrounding the light transmission region. The touch sensing element is disposed in the light transmission region. The decoration layer is disposed in the periphery region. The decoration layer has at least one button opening to define a button touch region located in the periphery region. The light providing unit is at least disposed at a side of the touch panel that faces toward the button opening to provide at least one of a first light and a second light to the button opening, and colors of the first light and the second light are different.
    Type: Application
    Filed: November 11, 2013
    Publication date: May 15, 2014
    Applicant: WINTEK CORPORATION
    Inventors: Wen-Hsiao Huang, Chien-Ming Lee, Ming-Hsi Chiang, Tso-Wei Liao
  • Patent number: 8714798
    Abstract: An illumination module includes a light bar, an LED assembly, a positioning member, a sleeve and a lamp receptacle. The light bar has a first end and a second end opposite the first end. A microstructure layer or a reflective layer is formed on the light bar, and a positioning pillar is formed on an outer side of the light bar. The emitting light of the LED assembly is diffused by the microstructure layer or reflected by the reflective layer to spread over the entire light bar. The positioning member, the sleeve, the LED assembly or the lamp receptacle has at least one guide slot that engages with the positioning pillar of the light bar.
    Type: Grant
    Filed: December 9, 2010
    Date of Patent: May 6, 2014
    Assignees: Dongguan Masstop Liquid Crystal Display Co., Ltd., Wintek Corporation
    Inventors: Chia-Ta Chang, Ming-Hsi Chiang, Zhan-Wei Qiu, Hsiu-Ping Lee, Kuo-Jui Huang, Zhi-Ting Ye
  • Publication number: 20110141766
    Abstract: An illumination module includes a light bar, an LED assembly, a positioning member, a sleeve and a lamp receptacle. The light bar has a first end and a second end opposite the first end. A microstructure layer or a reflective layer is formed on the light bar, and a positioning pillar is formed on an outer side of the light bar. The emitting light of the LED assembly is diffused by the microstructure layer or reflected by the reflective layer to spread over the entire light bar. The positioning member, the sleeve, the LED assembly or the lamp receptacle has at least one guide slot that engages with the positioning pillar of the light bar.
    Type: Application
    Filed: December 9, 2010
    Publication date: June 16, 2011
    Inventors: Chia-Ta Chang, Ming-Hsi Chiang, Zhan-Wei Qiu, Hsiu-Ping Lee, Kuo-Jui Huang, Zhi-Ting Ye