Patents by Inventor Ming Hsun Lin

Ming Hsun Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240295831
    Abstract: A method is described. The method includes obtaining a relationship between a thickness of a contamination layer formed on a mask and an amount of compensation energy to remove the contamination layer, obtaining a first thickness of a first contamination layer formed on the mask from a thickness measuring device, and applying first compensation energy calculated from the relationship to a light directed to the mask.
    Type: Application
    Filed: April 26, 2024
    Publication date: September 5, 2024
    Inventors: Ming-Hsun LIN, Yu-Hsiang HO, Chi-Hung LIAO, Teng Kuei CHUANG, Jhun Hua CHEN
  • Publication number: 20240266179
    Abstract: Some implementations described herein include an etch tool including a combination bottom shadow ring component including a moveable inner ring component and a fixed inner ring component. The moveable inner ring component provides for an adjustability of an effective thickness of the combination bottom shadow ring component during an etching operation. The adjustability (e.g., “tunability”) of the effective thickness of the combination bottom shadow ring component enables flexibility and is conducive to changes in one or more parameters related to different etch recipes for a semiconductor substrate. Additionally, the fixed inner ring component shadows beveled regions of the semiconductor substrate during the etching operation to reduce a likelihood of damage to the beveled regions.
    Type: Application
    Filed: February 3, 2023
    Publication date: August 8, 2024
    Inventors: Ming-Hsun LIN, Ting-Jung CHEN, Yu JIANG
  • Patent number: 11988972
    Abstract: A method is described. The method includes obtaining a relationship between a thickness of a contamination layer formed on a mask and an amount of compensation energy to remove the contamination layer, obtaining a first thickness of a first contamination layer formed on the mask from a thickness measuring device, and applying first compensation energy calculated from the relationship to a light directed to the mask.
    Type: Grant
    Filed: February 13, 2023
    Date of Patent: May 21, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Hsun Lin, Yu-Hsiang Ho, Jhun Hua Chen, Chi-Hung Liao, Teng Kuei Chuang
  • Publication number: 20240147689
    Abstract: Integrated circuits (ICs) and methods are provided. An IC includes a charge-storing device. The charge-storing device includes a first charge-storing stack extending into a substrate, and a second charge-storing stack extending into the substrate and adjacent to the first charge-storing stack along a first direction. The first charge-storing stack and the second charge-storing stack extend lengthwise along a second direction perpendicular to the first direction, and the first charge-storing stack and the second charge-storing stack have an offset along the second direction, the offset being greater than zero.
    Type: Application
    Filed: February 23, 2023
    Publication date: May 2, 2024
    Inventors: Ming-Hsun Lin, Jyun-Ying Lin
  • Publication number: 20240112954
    Abstract: Some implementations described herein include an integrated circuit device including landing circuitry and methods of formation. The landing circuitry, which may be part of a trench capacitor region, includes a stair-shaped profile that extends into a silicon substrate of the integrated circuit device. The landing circuitry includes electrode layers of the trench capacitor region interspersed with layers of a dielectric material. The landing circuitry further includes spacer structures on ends of the electrode layers along the stair-shaped profile.
    Type: Application
    Filed: April 24, 2023
    Publication date: April 4, 2024
    Inventor: Ming-Hsun LIN
  • Publication number: 20240096930
    Abstract: Some implementations described herein include a deep trench capacitor structure and methods of formation. The deep trench capacitor structure may penetrate vertically into a silicon substrate. In some implementations, formation of the deep trench capacitor structure includes forming segments of a deep trench capacitor recess using a combination of in-situ oxidation/nitridation, ex-situ deposition, and reactive ion etching techniques. By forming the deep trench capacitor recess using the in-situ oxidation/nitridation operation, the ex-situ deposition, and the reactive ion etching techniques, a deep trench capacitor structure may be formed that meets target critical dimensions and has an aspect ratio of approximately 50:1.
    Type: Application
    Filed: April 7, 2023
    Publication date: March 21, 2024
    Inventors: Yu JIANG, Ming-Hsun LIN, Lee-Chuan TSENG
  • Publication number: 20230195000
    Abstract: A method is described. The method includes obtaining a relationship between a thickness of a contamination layer formed on a mask and an amount of compensation energy to remove the contamination layer, obtaining a first thickness of a first contamination layer formed on the mask from a thickness measuring device, and applying first compensation energy calculated from the relationship to a light directed to the mask.
    Type: Application
    Filed: February 13, 2023
    Publication date: June 22, 2023
    Inventors: Ming-Hsun LIN, Yu-Hsiang HO, Jhun Hua CHEN, Chi-Hung LIAO, Teng Kuei CHUANG
  • Patent number: 11579539
    Abstract: A method is described. The method includes obtaining a relationship between a thickness of a contamination layer formed on a mask and an amount of compensation energy to remove the contamination layer, obtaining a first thickness of a first contamination layer formed on the mask from a thickness measuring device, and applying first compensation energy calculated from the relationship to a light directed to the mask.
    Type: Grant
    Filed: July 20, 2021
    Date of Patent: February 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Hsun Lin, Yu-Hsiang Ho, Jhun Hua Chen, Chi-Hung Liao, Teng Kuei Chuang
  • Publication number: 20220283508
    Abstract: A method is described. The method includes obtaining a relationship between a thickness of a contamination layer formed on a mask and an amount of compensation energy to remove the contamination layer, obtaining a first thickness of a first contamination layer formed on the mask from a thickness measuring device, and applying first compensation energy calculated from the relationship to a light directed to the mask.
    Type: Application
    Filed: July 20, 2021
    Publication date: September 8, 2022
    Inventors: Ming-Hsun LIN, Yu-Hsiang HO, Jhun Hua CHEN, Chi-Hung LIAO, Teng Kuei CHUANG
  • Publication number: 20030119565
    Abstract: A folding collapsible wireless transmitter-receiver earphone is constructed to include a base unit holding a circuit board and a speaker, the base unit having an axle holder at one end, and an extension unit holding a microphone, the extension unit having a short pivot shaft pivoted to the axle holder of the base unit and a wire passageway through which the signal line connecting the microphone to the circuit board passes.
    Type: Application
    Filed: December 26, 2001
    Publication date: June 26, 2003
    Inventor: Ming Hsun Lin
  • Publication number: 20030119567
    Abstract: A battery cap and wireless transmitter-receiver circuit assembly for mobile telephone is constructed to include a battery cap covered on the battery chamber of a mobile telephone, a battery installed in the battery cap, a wireless transmitter-receiver circuit installed in the battery cap, the wireless transmitter-receiver circuit having a signal line adapted for connection to the voice signal input/output jack of the mobile telephone for enabling the mobile telephone to communicate with a remote wireless transmitter-receiver device; and an on/off switch installed in the battery cap and adapted for controlling the operation of the wireless transmitter-receiver circuit.
    Type: Application
    Filed: December 26, 2001
    Publication date: June 26, 2003
    Inventor: Ming Hsun Lin