Patents by Inventor Ming-Hua Shiao

Ming-Hua Shiao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10026620
    Abstract: The present invention relates to the growth of a native oxide layer on a surface of a silicon substrate. Deep ultraviolet (UV) light is irradiated to thereby effectively improve the quality of the native oxide layer. By improving the quality, the difficulty of the surface treatment of a cross-section sample for scanning capacitance microscopy (SCM) is improved. The life cycle and reliability of the sample are also improved with enhanced reproducibility for the measurement of SCM. Thus, the present invention provides an improved method and an apparatus using the same to prepare a cross-sectional sample for SCM. The feasibility and the concrete method for enhancing oxide layer quality on a silicon substrate surface by UV light irradiation under a humidity-controlled environment are established. The optimum parameters of irradiation time for n-type and p-type samples are made.
    Type: Grant
    Filed: June 22, 2017
    Date of Patent: July 17, 2018
    Assignee: NATIONAL APPLIED RESEARCH LABORATORIES
    Inventors: Mao-Nan Chang, Tsung-Yu Chan, Chia-Yi Wu, Chun-Ting Lin, Ming-Hua Shiao
  • Patent number: 9861975
    Abstract: A visible light response photocatalyst structure and a process for manufacturing the same are disclosed, where the structure is manufactured by the GRR for two times, so that the structure has a large surface area, high surface activity, being apt to get integrated with a silicon substrate and endurable to the environment, and further has the rapid and simple manufacturing characteristics without any additional energy required and has a high reproductively.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: January 9, 2018
    Assignee: NATIONAL APPLIED RESEARCH LABORATORIES
    Inventors: Chun-Ting Lin, Ming-Hua Shiao, Mao-Nan Chang, Nien-Nan Chu, Chien-Nan Hsiao, Fan-Gang Tseng
  • Publication number: 20160158740
    Abstract: A visible light response photocatalyst structure and a process for manufacturing the same are disclosed, where the structure is manufactured by the GRR for two times, so that the structure has a large surface area, high surface activity, being apt to get integrated with a silicon substrate and endurable to the environment, and further has the rapid and simple manufacturing characteristics without any additional energy required and has a high reproductively.
    Type: Application
    Filed: December 3, 2014
    Publication date: June 9, 2016
    Inventors: Chun-Ting LIN, Ming-Hua SHIAO, Mao-Nan CHANG, Nien-Nan CHU, Chien-Nan HSIAO, Fan-Gang TSENG
  • Patent number: 9255944
    Abstract: A platinum-platinum silicide modified silicon composite tip apex, and a method for forming the aforesaid tip apex are disclosed, where a metallic precursor solution and a silicon probe are reacted to form a local platinum nano-structure, which could be precisely controlled with local selectivity, and a local platinum silicide layer is formed between the platinum nano-structure and the silicon probe with an atmospheric microwave annealing (a-MWA) process conducted as well, largely enhancing the conductivity of the tip and spatial resolution of the field detection in field sensitive scanning probe microscopy. In addition to exemption from a stray-field effect and thus having better image quality, the platinum silicide-containing probe could more efficiently enhance the interfacial electron transfer efficiency as compared to the probe tip having only a platinum nano-structure, so that the probe could be applicable to a controlled conductive probe having high spatial resolution.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: February 9, 2016
    Assignee: NATIONAL APPLIED RESEARCH LABORATORIES
    Inventors: Chun-Ting Lin, Ming-Hua Shiao, Shu-Hung Tung, Mao-Nan Chang
  • Publication number: 20140218265
    Abstract: A metamaterial structure and method of manufacturing the same are disclosed. The metamaterial includes a substrate, a first resonance unit and a second resonance unit. The surface of the substrate has a bump. The first resonance unit and the second resonance unit are disposed on an adhesive direction from the bump, whereby forming the sterical resonance unit, which is able to increase the coupling efficiency of incident light in some specific frequency and form an in-situ reconfigurable metamaterial.
    Type: Application
    Filed: March 15, 2013
    Publication date: August 7, 2014
    Inventors: Che-Chin Chen, Yu-Hsiang Tang, Chun-Ting Lin, Ming-Hua Shiao, Din Ping Tsai
  • Publication number: 20120141691
    Abstract: The method of the present invention comprises the following three steps: (1) Coating titanium oxide in the form of a membrane, nanometer-sized particles or powder onto a substrate to form a preliminary coating; (2) Adding a reducing agent and a dispersing agent to a metallic precursor to form a solution and then using an application device to apply a small amount of the solution to the preliminary coating; and (3) Using ultraviolet radiation on the substrate to reduce the metallic precursor to a metal via photochemical reaction and hence to form a composite coating. The method is simple and may be used for substrates in different sizes. In addition, in the method, the solution may be evenly spread out on the preliminary coating. The final composite coating may be used as the electrodes of a proton exchange membrane fuel cell.
    Type: Application
    Filed: December 1, 2010
    Publication date: June 7, 2012
    Inventors: Chun-Ting LIN, Hung Ji Huang, Jr-Jung Yang, Ming-Hua Shiao
  • Patent number: 7413912
    Abstract: A microsensor fabricated with a ferroelectric material and a fabrication method therefor are provided. The microsensor includes a support, an insulating layer on the support, a first electrode on the insulating layer, a ferroelectric layer having at least a metal on the insulating layer and the first electrode, and at least a second electrode on the ferroelectric layer.
    Type: Grant
    Filed: May 11, 2005
    Date of Patent: August 19, 2008
    Assignee: Instrument Technology Research Center, National Applied Research Laboratories
    Inventors: Jyh-Shin Chen, Der-Chi Shye, Meng-Wei Kuo, Ming-Hua Shiao, Jiann-Shium Kao, Huang-Chung Cheng, Bi-Shiou Chiou
  • Publication number: 20060258040
    Abstract: A microsensor fabricated with a ferroelectric material and a fabrication method therefor are provided. The microsensor includes a support, an insulating layer on the support, a first electrode on the insulating layer, a ferroelectric layer having at least a metal on the insulating layer and the first electrode, and at least a second electrode on the ferroelectric layer.
    Type: Application
    Filed: May 11, 2005
    Publication date: November 16, 2006
    Inventors: Jyh-Shin Chen, Der-Chi Shye, Meng-Wei Kuo, Ming-Hua Shiao, Jiann-Shium Kao, Huang-Chung Cheng, Bi-Shiou Chiou