Abstract: A manufacturing method of an integrated mass flow controller (MFC) module is disclosed. The integrated MFC module is comprising top, middle and bottom parts. The middle part of the integrated MFC module which is consist of both the microvalve and sensing regions that is the key feature of the present invention. The microvalve is formed by depositing a heating element in a microbridge suspended on a mesa to control the movement of the valve. On the other hand, a series of sensing elements of the sensing region are in the mass flow path to detect the mass flow. The top and bottom parts are used for mass flow channel, mass entrance, mass exit and signal output terminals. There are bumps in the interface between middle and bottom parts to support the microvalve mesa. All three parts are first fabricated on a semiconductor wafer separately and then engaged together to complete the integrated MFC module formation.

Abstract: An integrated micro pressure-resistant flow control module in which, when a fluid enters the integrated module past a pressure-resistant fluid channel and a suspended microstructure into a thermally-driven microvalve zone, the latter utilizes heat actuation to drive a silicon microbridge with mesa to open a linear proportional flow microvalve. A pressure-resistant flow sensing unit is disposed before the fluid channel to sense the flow amount. The flow sensing unit has a micro-suspending arm of pressure-resistant material located vertically at the fluid entrance of the module. The momentum of the fluid is thereof vertical to the micro-uspending arm, and the flow value is obtained by the deflection of the micro-suspending arm which changes the resistance value. The sensing unit is synchronously made with the microvalve and the silicon microbridge structure in an integration process so as to reduce manufacturing steps and minimize the size of the module.