Abstract: A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting wafers and an open front is formed on one sidewall of which for importing and exporting said plurality of wafers, and a door with an outer surface and an inner surface, which is joined with opening of the container body with its inner surface for protecting the plurality of wafers within the container, the characteristic in that: at least one latch component including a cam and a pair of moving bars is disposed between outer surface and inner surface of the door, wherein a pair of cam grooves are disposed on the cam for being connected with guide bar on one end of the pair of moving bars, and each moving bar includes a slide groove for being fixed in by roller disposed between outer surface and inner surface of the door, which in turn allows the rotation of the cam to cause to-and-fro movement of another end of the moving bars.

Abstract: A reticle pod and a method for keeping a reticle clean and dry are provided, wherein the reticle pod holds a reticle and has a pellicle side provided with a pellicle. The reticle pod includes: a first cover; a second cover for joining with the first cover to form an inner space for receiving the reticle, in which the second cover has a central region; at least one fixing element on the second cover for supporting and positioning the reticle; at least one gas inlet port on the second cover outside a projection region of the reticle; and at least one gas outlet port on the second cover opposite the gas inlet port with respect to the central region. A gas entering the reticle pod via the gas inlet port flows along the reticle and removes moisture thereon and attached to the pellicle, rapidly lowering a humidity inside the reticle pod.

Abstract: This invention is about a gas filling apparatus for filling a gas into a storage apparatus for storing a semiconductor element or a reticle. The gas filling apparatus comprises a base and a port. The storage apparatus is loaded on the base. The port comprises a receiving part, which is connected with an air entrance of the storage apparatus. The contact portions of both the top of the receiving part and the air entrance of the storage apparatus are cambered surfaces and these two portions contacts in a ring fashion. The port also comprises a hole for the gas to pass through, and a joint port to connect with the air source.

Abstract: This present invention provides a gas filling apparatus for filling a gas into a storage apparatus for storing a semiconductor element or a reticle. The gas filling apparatus is connected with an air feed source, and includes a base, a first inlet port and a set of air feed source route. The storage apparatus is loaded on the base, and the first inlet port which is disposed on the base corresponds with the second inlet port of the storage apparatus. The set of air feed source route includes an entrance part, a supply part and a branch part. The entrance part is connected with the air feed source, and the supply part is connected with the first inlet port. The branch part is a closed loop, which transmits the gas from the entrance part into the supply part.