Abstract: An inspection device for a sub-element of a reticle pod comprises a carrier platform, a light source module, a camera module and a control module. The light source module includes a coaxial light source and a height adjustment mechanism. The height adjustment mechanism is connected to at least one of the coaxial light source and the carrier platform. The camera module is connected to the coaxial light source and has a lens facing the carrier platform. The control module is signally connected to the camera module and the height adjustment mechanism. The control module controls the height adjustment mechanism to adjust a relative distance between the coaxial light source and the carrier platform. The inspection device for a sub-element of a reticle pod performs optical inspection on the sub-element of a reticle pod.

Abstract: An optical inspection device for a surface of a reticle pod includes a carrier platform having a carrier surface, a light source module, a photographic module, and a control module. The light source module includes first and second light sources for irradiating the carrier surface in first and second directions, respectively. An angle of an included angle between the first direction and the carrier surface is greater than an angle of an included angle between the second direction and the carrier surface. The control module is signally connected to the camera module, first light source, and second light source. The control module controls one of the first light source and second light source to turn on and the other one to turn off. An optical inspection method for a surface of a reticle pod is further provided to operate to inspect a reticle pod efficiently and precisely.

Abstract: A gripper structure includes a rotation center, rotation power component and at least three clamp component sets. The rotation power component is dynamically connected to the rotation center. Each of the clamp component sets includes a swing shaft and an arc arm. One end of each of the swing shafts is connected to the rotation center and the other end is away from the rotation center. The arc arms are all arc-shaped. One end of each of the arc arms is connected to a fixed endpoint, and the other end is slidably connected to a corresponding one of the swing shafts. An area enclosed by the arc arms changes according to a rotation angle of the swing shafts. The gripper structure of the present application is for solving multiple issues of balance, synchronicity and center alignment of a force received.

Abstract: A photomask cleaning apparatus with a preferred static elimination function includes a cleaning device, a bearing base, an input tube and an output tube. The bearing base is disposed adjacent to the cleaning device and adapted to hold a photomask. The input tube is connected to the cleaning device, and adapted to guide ultrapure water with dissolved carbon dioxide towards the cleaning device for cleaning the photomask. The output tube is connected to the cleaning device, and adapted to drain the ultrapure water with the dissolved carbon dioxide for removing residual static electricity from the photomask.

Abstract: A photomask box carrying device is applied to a target box with first standard or second standard. The photomask box carrying device includes a substrate, a base, a plurality of carrying components, a rotary component and a clamping component. The base is movably disposed on the substrate. The plurality of carrying components is disposed around the base and adapted to carry the target box. Position of the plurality of carrying components on the base correspond to an overlapped area of a first carrying area of the target box with the first standard and a second carrying area of the target box with the second standard. The rotary component is disposed under the base to adjust levelness of the base relative to the substrate. The clamping component is disposed on the substrate and adapted to abut a lateral side of the target box.

Abstract: A drawer-replaced cleaning apparatus comprises: a box, at least one cleaning module and a lifting power module, the box has an accommodating space and a drawer, the drawer is located in the accommodating space, and may be pulled out from one side of the box, a bottom surface of the drawer has at least one mounting slot, the at least one cleaning module is detachably disposed in the mounting slot, the lifting power module is located in the accommodating space, and disposed below the cleaning module, the lifting power module passes through the mounting slot to push the cleaning module up away from the drawer, and the lifting power module is lowered so that the cleaning module is relocated in the mounting slot. The present disclosure solves the problem that the cleaning module of the prior art is difficult to replace.

Abstract: An inner pod holding device conducive to reducing dust contamination comprises a separator, a plurality of supporters, a first positioning module, and a second positioning module. The separator defines a concealing space and a holding space. The plurality of supporters is disposed in the holding space. The first positioning module includes a first driving member and at least one first positioning member. The first driving member is disposed in the concealing space and configured to move in a first direction. The second positioning module includes a second driving member and at least one second positioning member. The second driving member is disposed in the concealing space and configured to move in a second direction. The first and second positioning members each have a top portion protruding to the holding space. An optical inspection apparatus with the inner pod holding device is further provided.

Abstract: An inspection device for a sub-element of a reticle pod comprises a carrier platform, a light source module, a camera module and a control module. The light source module includes a coaxial light source and a height adjustment mechanism. The height adjustment mechanism is connected to at least one of the coaxial light source and the carrier platform. The camera module is connected to the coaxial light source and has a lens facing the carrier platform. The control module is signally connected to the camera module and the height adjustment mechanism. The control module controls the height adjustment mechanism to adjust a relative distance between the coaxial light source and the carrier platform. The inspection device for a sub-element of a reticle pod performs optical inspection on the sub-element of a reticle pod.

Abstract: An optical inspection device for a surface of a reticle pod includes a carrier platform having a carrier surface, a light source module, a photographic module, and a control module. The light source module includes first and second light sources for irradiating the carrier surface in first and second directions, respectively. An angle of an included angle between the first direction and the carrier surface is greater than an angle of an included angle between the second direction and the carrier surface. The control module is signally connected to the camera module, first light source, and second light source. The control module controls one of the first light source and second light source to turn on and the other one to turn off. An optical inspection method for a surface of a reticle pod is further provided to operate to inspect a reticle pod efficiently and precisely.

Abstract: A high-speed surface inspection system for a reticle pod and method comprises a cabinet, a clamping module, a first inspection device, a second inspection device, and a travel stroke controller. An interior of the cabinet is divided into an automated device area, a first inspection area, and a second inspection area. The travel stroke controller controls the clamping module to reciprocate between the automated device area and the first inspection area so as to transport a first portion of the reticle pod, and controls the clamping module to reciprocate between the automated device area and the second inspection area so as to transport a second portion of the reticle pod. A high-speed surface inspection method for a reticle pod is further provided. The present application solves the issue of an inability for efficient surface inspection of a reticle pod.

Abstract: A gripping mechanism for inspection of a reticle inner pod includes a quadrilateral frame and fourth gripper units. The four gripper units are respectively disposed at four border strips of the quadrilateral frame and are opposite in pairs. Each gripper unit has a body, a first gripping portion and a second gripper portion. The first and second gripping portions are respectively located on different positions of the body. The first gripping portions form a first gripping plane, and the second gripping portions form a second gripping plane. At least two adjacent gripper units have a power member, which is in power connection with the body so as to adjust a distance between two bodies opposite to each other. The gripping mechanism for the inspection of the reticle inner pod is capable of securely gripping the reticle inner pod during transportation or turning of reticles.

Abstract: A drawer-replaced cleaning apparatus comprises: a box, at least one cleaning module and a lifting power module, the box has an accommodating space and a drawer, the drawer is located in the accommodating space, and may be pulled out from one side of the box, a bottom surface of the drawer has at least one mounting slot, the at least one cleaning module is detachably disposed in the mounting slot, the lifting power module is located in the accommodating space, and disposed below the cleaning module, the lifting power module passes through the mounting slot to push the cleaning module up away from the drawer, and the lifting power module is lowered so that the cleaning module is relocated in the mounting slot. The present disclosure solves the problem that the cleaning module of the prior art is difficult to replace.

Abstract: A gas purifier to be applied on a wafer substrate accommodating unit with an inlet hole includes an outer tube and an inner tube. The outer tube is disposed on the wafer substrate accommodating unit and has a plurality of first gas filling apertures. One end of the inner tube is a closed end and the other end is an open end. The inner tube has a plurality of second gas filling apertures, and its open end is interconnected with the inlet hole. The inner tube is movably disposed within the outer tube between a first operating position and second operating position. The second gas filling apertures are correspondingly configured to an inner wall of the outer tube when the inner tube is at a first operating position, and interconnected with the first gas filling apertures when the inner tube is at a second operating position.

Abstract: A gas purifier to be applied on a wafer substrate accommodating unit with an inlet hole includes an outer tube and an inner tube. The outer tube is disposed on the wafer substrate accommodating unit and has a plurality of first gas filling apertures. One end of the inner tube is a closed end and the other end is an open end. The inner tube has a plurality of second gas filling apertures, and its open end is interconnected with the inlet hole. The inner tube is movably disposed within the outer tube between a first operating position and second operating position. The second gas filling apertures are correspondingly configured to an inner wall of the outer tube when the inner tube is at a first operating position, and interconnected with the first gas filling apertures when the inner tube is at a second operating position.

Abstract: A touch panel is provided. The touch panel includes a first flexible substrate with a first surface, a second substrate with a second surface facing the first surface, and a masking structure with a first contacting surface and a second contacting surface respectively adjacent to an edge portion of the first flexible substrate and an edge portion of the second substrate. The second contacting surface is wider than the first contacting surface.

Abstract: A touch panel is provided. The touch panel includes a first flexible substrate with a first surface, a second substrate with a second surface facing the first surface, and a masking structure with a first contacting surface and a second contacting surface respectively adjacent to an edge portion of the first flexible substrate and an edge portion of the second substrate. The second contacting surface is wider than the first contacting surface.