Patents by Inventor Ming-Shong Fu

Ming-Shong Fu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6822575
    Abstract: A backfill prevention system for a gas flow conduit, comprising a gas flow monitor circuit which measures the rate and direction of gas flow through a gas flow conduit and converts the measured data into a voltage signal. A valve control circuit operably connected to a valve or valves in the gas flow conduit receives the voltage signal from the gas flow monitor circuit and closes the valve or valves in the event that the voltage signal indicates backflow of a gas through the gas flow conduit. The valve control conduit may further be provided with a first light emitting diode (LED) which is illuminated during normal flow of the gas through the conduit, and a second LED which is illuminated in the event of gas backflow through the conduit. The system is typically used in conjunction with a mass flow controller in the conduit.
    Type: Grant
    Filed: July 25, 2002
    Date of Patent: November 23, 2004
    Assignee: Taiwan SEmiconductor Manufacturing, Co., Ltd
    Inventors: Wen-Ming Chen, Wen-Chi Wang, Ming-Shong Fu, Jing-Hou Chen