Abstract: A system of process control is provided. The system comprises a first processing tool, a first sensor, a second processing tool, and a processor. The first processing tool processes a first workpiece. The first sensor provides real-time monitoring (RTM) data of the first processing tool while processing the first workpiece. The second processing tool processes the first workpiece subsequent to the first processing tool. The processor adjusts, according to the real-time monitoring data and a preset program, the first processing tool for processing a second workpiece, and the second processing tool for processing the first workpiece.

Abstract: A system of process control is provided. The system comprises a first processing tool, a first sensor, a second processing tool, and a processor. The first processing tool processes a first workpiece. The first sensor provides real-time monitoring (RTM) data of the first processing tool while processing the first workpiece. The second processing tool processes the first workpiece subsequent to the first processing tool. The processor adjusts, according to the real-time monitoring data and a preset program, the first processing tool for processing a second workpiece, and the second processing tool for processing the first workpiece.

Abstract: A load-lock chamber having a gas-sealing bellows to prevent the flow of gases into the chamber through a shaft opening is disclosed. The load-lock chamber includes a chamber wall that defines a chamber interior. A bellows housing is defined by the chamber wall, and a shaft opening provided in the bellows housing. A flexible bellows is provided in the bellows housing and seals the shaft opening from the chamber interior. A lift shaft having a cassette stage extends through the shaft opening and the bellows and into the chamber interior. A shaft rotation device may engage the lift shaft to rotate the lift shaft and cassette stage in the chamber interior.