Abstract: A substrate processing apparatus includes a process station for processing a substrate; a cassette station integrated with the process station; a substrate carriage equipped for transferring the substrate between said process station and the cassette station through a passage located at an interface between the process station and said cassette station; and a substrate scanner equipped at said interface between the process station and the cassette station for capturing surface image data during transportation of the substrate that passes through the passage.

Abstract: A substrate processing apparatus includes a process station for processing a substrate; a cassette station integrated with the process station; a substrate carriage equipped for transferring the substrate between said process station and the cassette station through a passage located at an interface between the process station and said cassette station; and a substrate scanner equipped at said interface between the process station and the cassette station for capturing surface image data during transportation of the substrate that passes through the passage.

Abstract: An apparatus and a method for displaying amount of money are disclosed. The apparatus for displaying amount of money comprises a signal detection module, a position module, a storage device, a micro controller and a monitor. The signal detection module detects a radio frequency identification (RFID) signal outputted from a toll gantry. The position module provides a position information. The storage device stores a gantry information. After the RFID signal was detected, the micro controller calculates an original debit amount according to the position information and the gantry information, and generates a money information according to the original debit amount. The monitor shows the money information.

Abstract: A robot arm plate is provided. The robot arm plate includes a supporting structure and at least a block. The supporting structure includes a first surface to support an object, a second surface and a third surface, wherein the second surface is lower than the first surface, and the third surface is disposed between the first surface and the second surface. The block is disposed on the second surface. The block includes a lateral wall which contacts against the third surface.

Abstract: An optical thin sheet is provided, which comprises a substrate with a light diffusion layer on at least one side of the substrate. The optical thin sheet has an optical property with respect to a haze of no less than 98% and is particularly suitable for use in flat displays.

Abstract: An optical thin sheet is provided, which comprises a substrate with a light difflusion layer on at least one side of the substrate. The optical thin sheet has an optical property with respect to a haze of no less than 98% and is particularly suitable for use in flat displays.