Abstract: Integrated fan-out packages and methods of forming the same are disclosed. An integrated fan-out package includes two dies, an encapsulant, a first metal line and a plurality of dummy vias. The encapsulant is disposed between the two dies. The first metal line is disposed over the two dies and the encapsulant, and electrically connected to the two dies. The plurality of dummy vias is disposed over the encapsulant and aside the first metal line.

Abstract: A method includes forming isolation regions extending into a semiconductor substrate. A semiconductor strip is between the isolation regions. The method further includes recessing the isolation regions so that a top portion of the semiconductor strip protrudes higher than top surfaces of the isolation regions to form a semiconductor fin, measuring a fin width of the semiconductor fin, generating an etch recipe based on the fin width, and performing a thinning process on the semiconductor fin using the etching recipe.

Abstract: Disclosed is glue-free airtight filtering equipment comprising a filter housing, a plurality of filter elements and a plurality of receiving supporting elements, each filter element having a filtering surface, the plurality of filter elements being detachably disposed in the filtering space in a manner that the filtering surface is parallel to the upper surface and the bottom surface of the filter housing, and the plurality of receiving supporting elements allocating on an inner wall of the filter housing and being spaced apart from each other with a designated distance so as to correspondingly receive and support the plurality of filter elements, wherein a gap is provided between the filter element and the inner wall of the filter housing, and the filtering surface of the filter element and the maximum value of the gap satisfy a relational expression.

Abstract: Disclosed is glue-free airtight filtering equipment comprising a filter housing, a plurality of filter elements and a plurality of receiving supporting elements, each filter element having a filtering surface, the plurality of filter elements being detachably disposed in the filtering space in a manner that the filtering surface is parallel to the upper surface and the bottom surface of the filter housing, and the plurality of receiving supporting elements allocating on an inner wall of the filter housing and being spaced apart from each other with a designated distance so as to correspondingly receive and support the plurality of filter elements, wherein a gap is provided between the filter element and the inner wall of the filter housing, and the filtering surface of the filter element and the maximum value of the gap satisfy a relational expression.

Abstract: A filter frame provided in the present invention comprises a frame body including a plurality of frame strips which are combined together to form filter net disposing area, a filter net fixing member, an upper circumferential surface connecting member, a lower circumferential surface connecting member, and an adjacent member. The upper circumferential surface connecting member and the lower circumferential surface connecting member are respectively disposed along the upper circumferential surfaces and the lower circumferential surfaces of the frame strips in such a manner that the filter frame is connected to a second filter frame and/or a third filter frame along the normal direction of the filter net disposing area. The adjacent member is disposed along the outer circumferential surface of the frame strip to form an adjacent channel extending along the frame strip in such a manner that the filter frame is adjacently connected to a fourth filter frame.

Abstract: A filter frame provided in the present invention comprises a frame body including a plurality of frame strips which are combined together to form filter net disposing area, a filter net fixing member, an upper circumferential surface connecting member, a lower circumferential surface connecting member, and an adjacent member. The upper circumferential surface connecting member and the lower circumferential surface connecting member are respectively disposed along the upper circumferential surfaces and the lower circumferential surfaces of the frame strips in such a manner that the filter frame is connected to a second filter frame and/or a third filter frame along the normal direction of the filter net disposing area. The adjacent member is disposed along the outer circumferential surface of the frame strip to form an adjacent channel extending along the frame strip in such a manner that the filter frame is adjacently connected to a fourth filter frame.

Abstract: An air supply system for a clean room with a critical machine. An intake duct connects the exterior of the clean room to a make-up air unit, and is configured to transport external air into the make-up air unit. A first air duct connects the make-up air unit to an air conditioning cabinet including a first chemical filter, and is configured to transport the air flowing through the make-up air unit into the air conditioning cabinet. The first chemical filter removes airborne molecular contamination from the air transported into the air conditioning cabinet. A second air duct connects the air conditioning cabinet to the critical machine, and is configured to transport the air flowing through the first chemical filter of the air conditioning cabinet into the critical machine. An exhaust duct connects the critical machine to the exterior of the clean room, discharging waste gas produced in the critical machine.

Abstract: An air supply system for a clean room with a critical machine. An intake duct connects the exterior of the clean room to a make-up air unit, and is configured to transport external air into the make-up air unit. A first air duct connects the make-up air unit to an air conditioning cabinet including a first chemical filter, and is configured to transport the air flowing through the make-up air unit into the air conditioning cabinet. The first chemical filter removes airborne molecular contamination from the air transported into the air conditioning cabinet. A second air duct connects the air conditioning cabinet to the critical machine, and is configured to transport the air flowing through the first chemical filter of the air conditioning cabinet into the critical machine. An exhaust duct connects the critical machine to the exterior of the clean room, discharging waste gas produced in the critical machine.