Patents by Inventor Minghong Yang

Minghong Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof
    Patent number: 7573634
    Abstract: The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminum layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.
    Type: Grant
    Filed: June 27, 2005
    Date of Patent: August 11, 2009
    Assignee: Fraunhofer-Gesellschaft Zür Förderung Der Angewandten Forschung E.V.
    Inventors: Uwe Jan Schmidt, Thilo Sandner, Harald Schenk, Alexandre Gatto, Minghong Yang, Jörg Heber, Norbert Kaiser
  • Micromechanical Mirrors with a High-Reflection Coating, Method for Production Thereof and Use Thereof
    Publication number: 20080068704
    Abstract: The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminium layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.
    Type: Application
    Filed: June 27, 2005
    Publication date: March 20, 2008
    Applicant: Fraunhofer-Gesellschaft zur Forderung Der Angewandten Forschung E.V.
    Inventors: Jan-Uwe Schmidt, Thilo Sandner, Harald Schenk, Alexandre Gatto, Minghong Yang, Jorg Heber, Norbert Kaiser