Abstract: A hydraulic actuator with no friction and zero leakage and its drive system are provided. The hydraulic actuator includes a thickened disc structure A and a thickened disc structure B. The second end face of the thickened disc structure A is connected with the first end face of the thickened disc structure B, and a control cavity is formed between the second end face of the thickened disc structure A and the first end face of the thickened disc structure B. The drive oil access hole is arranged on the thickened disc structure B, and the control cavity is connected with the drive oil access hole. The displacement output method based on elastic deformation is adopted, which completely avoids the nonlinear phenomena such as leakage and friction, and reduces the difficulty of high-precision control of the actuator.

Abstract: A hydraulic actuator with no friction and zero leakage and its drive system are provided. The hydraulic actuator includes a thickened disc structure A and a thickened disc structure B. The second end face of the thickened disc structure A is connected with the first end face of the thickened disc structure B, and a control cavity is formed between the second end face of the thickened disc structure A and the first end face of the thickened disc structure B. The drive oil access hole is arranged on the thickened disc structure B, and the control cavity is connected with the drive oil access hole. The displacement output method based on elastic deformation is adopted, which completely avoids the nonlinear phenomena such as leakage and friction, and reduces the difficulty of high-precision control of the actuator.

Abstract: An electro-hydraulic micro-displacement platform, a micro-displacement system, a precision compensation system, and its method, comprises an x-direction guide rail and a y-direction guide rail slidingly connected with a cross slider respectively. The x-direction guide rail is fixed on the floor of the frame, and a z-direction fixed platform is fixed on the y-direction guide rail. The periphery of the z-direction fixed platform is connected with the side plate of the frame through the x-direction micro-displacement actuator and the y-direction micro-displacement actuator, the z-direction fixed platform is connected with the z-direction floating platform through the first z-direction micro-displacement actuator, the z-direction floating platform is connected with the z-direction auxiliary fixed platform through the second z-direction micro-displacement actuator, and the z-direction fixed platform is fixedly connected with the z-direction auxiliary fixed platform.