Patents by Inventor Mingwei Zhu

Mingwei Zhu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11788883
    Abstract: A superconducting nanowire single photon detector (SNSPD) device includes a substrate, a distributed Bragg reflector on the substrate, a seed layer of a metal nitride on the distributed Bragg reflector, and a superconductive wire on the seed layer. The distributed Bragg reflector includes a plurality of bi-layers, each bi-layer including lower layer of a first material and an upper layer of a second material having a higher index of refraction than the first material. The wire is a metal nitride different from the metal nitride of the seed material.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: October 17, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Zihao Yang, Mingwei Zhu, Nag B. Patibandla, Nir Yahav, Robert Jan Visser, Adi de la Zerda
  • Publication number: 20230329125
    Abstract: A method of fabricating a device including a superconductive layer includes depositing a seed layer on a substrate, exposing the seed layer to an oxygen-containing gas or plasma to form a modified seed layer, and after exposing the seed layer to the oxygen-containing gas or plasma depositing a metal nitride superconductive layer directly on the modified seed layer. The seed layer is a nitride of a first metal, and the superconductive layer is a nitride of a different second metal.
    Type: Application
    Filed: May 22, 2023
    Publication date: October 12, 2023
    Inventors: Zihao Yang, Mingwei Zhu, Shriram Mangipudi, Mohammad Kamruzzaman Chowdhury, Shane Lavan, Zhebo Chen, Yong Cao, Nag B. Patibandla
  • Patent number: 11778926
    Abstract: A physical vapor deposition system includes a chamber, three target supports to targets, a movable shield positioned having an opening therethrough, a workpiece support to hold a workpiece in the chamber, a gas supply to deliver nitrogen gas and an inert gas to the chamber, a power source, and a controller. The controller is configured to move the shield to position the opening adjacent each target in turn, and at each target cause the power source to apply power sufficient to ignite a plasma in the chamber to cause deposition of a buffer layer, a device layer of a first material that is a metal nitride suitable for use as a superconductor at temperatures above 8° K on the buffer layer, and a capping layer, respectively.
    Type: Grant
    Filed: August 8, 2022
    Date of Patent: October 3, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Mingwei Zhu, Zihao Yang, Nag B. Patibandla, Ludovic Godet, Yong Cao, Daniel Lee Diehl, Zhebo Chen
  • Publication number: 20230309420
    Abstract: A superconducting nanowire single photon detector (SNSPD) device includes a substrate having a top surface, an optical waveguide on the top surface of the substrate to receive light propagating substantially parallel to the top surface of the substrate, a seed layer of metal nitride on the optical waveguide, and a superconductive wire on the seed layer. The superconductive wire is a metal nitride different from the metal nitride of the seed layer and is optically coupled to the optical waveguide.
    Type: Application
    Filed: May 10, 2023
    Publication date: September 28, 2023
    Inventors: Zihao Yang, Mingwei Zhu, Nag B. Patibandla, Nir Yahav, Robert Jan Visser, Adi de la Zerda
  • Publication number: 20230290909
    Abstract: Exemplary pixel structures are described that include a first light emitting diode structure, operable to generate blue light characterized by a peak emission wavelength of greater than or about 450 nm, and a second light emitting diode structure positioned on the first light emitting diode structure. The second light emitting diode structure is operable to generate ultraviolet light characterized by a peak emission wavelength of less than or about 380 nm. The pixel structures may also include a photoluminescent region, containing a photoluminescent material, that is positioned on the second light emitting diode structure.
    Type: Application
    Filed: March 13, 2023
    Publication date: September 14, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Zhiyong Li, Mingwei Zhu, Hou T. Ng, Nag Patibandla, Lisong Xu, Kai Ding, Sivapackia Ganapathiappan
  • Patent number: 11739418
    Abstract: A structure including a metal nitride layer is formed on a workpiece by pre-conditioning a chamber that includes a metal target by flowing nitrogen gas and an inert gas at a first flow rate ratio into the chamber and igniting a plasma in the chamber before placing the workpiece in the chamber, evacuating the chamber after the preconditioning, placing the workpiece on a workpiece support in the chamber after the preconditioning, and performing physical vapor deposition of a metal nitride layer on the workpiece in the chamber by flowing nitrogen gas and the inert gas at a second flow rate ratio into the chamber and igniting a plasma in the chamber. The second flow rate ratio is less than the first flow rate ratio.
    Type: Grant
    Filed: March 18, 2020
    Date of Patent: August 29, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Mingwei Zhu, Zihao Yang, Nag B. Patibandla, Ludovic Godet, Yong Cao, Daniel Lee Diehl, Zhebo Chen
  • Publication number: 20230263075
    Abstract: Exemplary methods of fabricating high quality quantum computing components are described. The methods include removing native oxide from a deposition surface of a silicon substrate in a cleaning chamber of a processing system, and transferring the silicon substrate under vacuum to a deposition chamber of the processing system. The methods further include depositing an aluminum layer on the deposition surface of the silicon substrate in the deposition chamber, where an interface between the aluminum layer and the deposition surface of the silicon substrate is oxygen free.
    Type: Application
    Filed: August 30, 2022
    Publication date: August 17, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Zihao Yang, Mingwei Zhu, Lan Yu, Zhebo Chen, Robert Jan Visser, Nag Patibandla
  • Publication number: 20230257868
    Abstract: Embodiments described herein relate to a method of fabricating a perovskite film device. The method includes heating and degassing a substrate within a processing system; depositing a first perovskite film layer over a surface of the substrate using multi-cathode sputtering deposition within a processing chamber; depositing a second perovskite film layer over the first perovskite film layer using multi-cathode sputtering deposition within a processing chamber; and annealing the substrate with the first perovskite film layer and second perovskite film layer disposed thereon. The first perovskite film layer includes a first perovskite material. The second perovskite film layer includes a second perovskite material.
    Type: Application
    Filed: February 14, 2023
    Publication date: August 17, 2023
    Inventors: Zihao YANG, Mingwei ZHU, Bharatwaj RAMAKRISHNAN, Rongjun WANG, Robert Jan VISSER, Patibandla NAG
  • Patent number: 11678589
    Abstract: A method of fabricating a device including a superconductive layer includes depositing a seed layer on a substrate, exposing the seed layer to an oxygen-containing gas or plasma to form a modified seed layer, and after exposing the seed layer to the oxygen-containing gas or plasma depositing a metal nitride superconductive layer directly on the modified seed layer. The seed layer is a nitride of a first metal, and the superconductive layer is a nitride of a different second metal.
    Type: Grant
    Filed: February 17, 2021
    Date of Patent: June 13, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Zihao Yang, Mingwei Zhu, Shriram Mangipudi, Mohammad Kamruzzaman Chowdhury, Shane Lavan, Zhebo Chen, Yong Cao, Nag B. Patibandla
  • Publication number: 20230166427
    Abstract: A super strong and tough densified wood structure is formed by subjecting a cellulose-based natural wood material to a chemical treatment that partially removes lignin therefrom. The treated wood retains lumina of the natural wood, with cellulose nanofibers of cell walls being aligned. The treated wood is then pressed in a direction crossing the direction in which the lumina extend, such that the lumina collapse and any residual fluid within the wood is removed. As a result, the cell walls become entangled and hydrogen bonds are formed between adjacent cellulose nanofibers, thereby improving the strength and toughness of the wood among other mechanical properties. By further modifying, manipulating, or machining the densified wood, it can be adapted to various applications.
    Type: Application
    Filed: November 4, 2022
    Publication date: June 1, 2023
    Inventors: Liangbing HU, Mingwei ZHU, Jianwei SONG
  • Patent number: 11653576
    Abstract: A superconducting nanowire single photon detector (SNSPD) device includes a substrate having a top surface, an optical waveguide on the top surface of the substrate to receive light propagating substantially parallel to the top surface of the substrate, a seed layer of metal nitride on the optical waveguide, and a superconductive wire on the seed layer. The superconductive wire is a metal nitride different from the metal nitride of the seed layer and is optically coupled to the optical waveguide.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: May 16, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Zihao Yang, Mingwei Zhu, Nag B. Patibandla, Nir Yahav, Robert Jan Visser, Adi de la Zerda
  • Patent number: 11600761
    Abstract: A superconducting device includes a substrate, a metal oxide or metal oxynitride seed layer on the substrate, and a metal nitride superconductive layer disposed directly on the seed layer. The seed layer is an oxide or oxynitride of a first metal, and the superconductive layer is a nitride of a different second metal.
    Type: Grant
    Filed: February 17, 2021
    Date of Patent: March 7, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Zihao Yang, Mingwei Zhu, Shriram Mangipudi, Mohammad Kamruzzaman Chowdhury, Shane Lavan, Zhebo Chen, Yong Cao, Nag B. Patibandla
  • Patent number: 11578894
    Abstract: Solar thermal devices are formed from a block of wood, where the natural cell lumens of the wood form an interconnected network that transports fluid or material therein. The block of wood can be modified to increase absorption of solar radiation. Combining the solar absorption effects with the natural transport network can be used for various applications. In some embodiments, heating of the modified block of wood by insolation can be used to evaporate a fluid, for example, evaporating water for extraction, distillation, or desalination. In other embodiments, heating of the modified block of wood by insolation can be used to change transport properties of a material to allow it to be transported in the interconnected network, for example, heating crude oil to adsorb the oil within the block of wood.
    Type: Grant
    Filed: September 23, 2020
    Date of Patent: February 14, 2023
    Assignee: UNIVERSITY OF MARYLAND, COLLEGE PARK
    Inventors: Liangbing Hu, Mingwei Zhu, Yiju Li, Chaoji Chen, Tian Li, He Liu, Amy Gong, Yudi Kuang
  • Patent number: 11575071
    Abstract: Oxygen controlled PVD AlN buffers for GaN-based optoelectronic and electronic devices is described. Methods of forming a PVD AlN buffer for GaN-based optoelectronic and electronic devices in an oxygen controlled manner are also described. In an example, a method of forming an aluminum nitride (AlN) buffer layer for GaN-based optoelectronic or electronic devices involves reactive sputtering an AlN layer above a substrate, the reactive sputtering involving reacting an aluminum-containing target housed in a physical vapor deposition (PVD) chamber with a nitrogen-containing gas or a plasma based on a nitrogen-containing gas. The method further involves incorporating oxygen into the AlN layer.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: February 7, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Mingwei Zhu, Nag B. Patibandla, Rongjun Wang, Daniel Lee Diehl, Vivek Agrawal, Anantha Subramani
  • Patent number: 11554514
    Abstract: A super strong and tough densified wood structure is formed by subjecting a cellulose-based natural wood material to a chemical treatment that partially removes lignin therefrom. The treated wood retains lumina of the natural wood, with cellulose nanofibers of cell walls being aligned. The treated wood is then pressed in a direction crossing the direction in which the lumina extend, such that the lumina collapse and any residual fluid within the wood is removed. As a result, the cell walls become entangled and hydrogen bonds are formed between adjacent cellulose nanofibers, thereby improving the strength and toughness of the wood among other mechanical properties. By further modifying, manipulating, or machining the densified wood, it can be adapted to various applications.
    Type: Grant
    Filed: August 23, 2021
    Date of Patent: January 17, 2023
    Assignee: UNIVERSITY OF MARYLAND, COLLEGE PARK
    Inventors: Liangbing Hu, Mingwei Zhu, Jianwei Song
  • Publication number: 20220406960
    Abstract: Exemplary processing methods include forming a group of LED structures on a substrate layer to form a patterned LED substrate. A light absorption barrier may be deposited on the patterned LED substrate. The methods may further include exposing the patterned LED substrate to light. The light may be absorbed by surfaces of the LED structures that are in contact with the substrate layer, and the light absorption barrier. The methods may still further include separating the LED structures for the substrate layer. The bonding between the LED structures and the substrate layer may be weakened by the absorption of the light by the surfaces of the LED structures in contact with the substrate layer.
    Type: Application
    Filed: June 17, 2021
    Publication date: December 22, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Fabio Pieralisi, Mingwei Zhu, Zihao Yang, Liang Zhao, Jeffrey L. Franklin, Hou T. Ng, Nag Patibandla
  • Publication number: 20220399479
    Abstract: Methods of making high-pixel-density LED structures are described. The methods may include forming a backplane substrate and a LED substrate. The backplane substrate and the LED substrate may be bonded together, and the bonded substrates may include an array of LED pixels. Each of the LED pixels may include a group of isolated subpixels. A quantum dot layer may be formed on at least one of the isolated subpixels in each of the LED pixels. The methods may further include repairing at least one defective LED pixel by forming a replacement quantum dot layer on a quantum-dot-layer-free subpixel in the defective LED pixel. The methods may also include forming a UV barrier layer on the array of LED pixels after the repairing of the at least one defective LED pixel.
    Type: Application
    Filed: June 11, 2021
    Publication date: December 15, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Lisong Xu, Mingwei Zhu, Byung Sung Kwak, Hyunsung Bang, Liang Zhao, Hou T. Ng, Sivapackia Ganapathiappan, Nag Patibandla
  • Publication number: 20220399474
    Abstract: Exemplary processing methods of forming an LED structure may include depositing an aluminum nitride layer on a substrate via a physical vapor deposition process. The methods may include heating the aluminum nitride layer to a temperature greater than or about 1500° C. The methods may include forming an ultraviolet light emitting diode structure overlying the aluminum nitride layer utilizing a metal-organic chemical vapor deposition or molecular beam epitaxy.
    Type: Application
    Filed: June 11, 2021
    Publication date: December 15, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Zihao Yang, Mengnan Zou, Mingwei Zhu, David Masayuki Ishikawa, Nag Patibandla
  • Publication number: 20220384705
    Abstract: A physical vapor deposition system includes a chamber, three target supports to targets, a movable shield positioned having an opening therethrough, a workpiece support to hold a workpiece in the chamber, a gas supply to deliver nitrogen gas and an inert gas to the chamber, a power source, and a controller. The controller is configured to move the shield to position the opening adjacent each target in turn, and at each target cause the power source to apply power sufficient to ignite a plasma in the chamber to cause deposition of a buffer layer, a device layer of a first material that is a metal nitride suitable for use as a superconductor at temperatures above 8° K on the buffer layer, and a capping layer, respectively.
    Type: Application
    Filed: August 8, 2022
    Publication date: December 1, 2022
    Inventors: Mingwei Zhu, Zihao Yang, Nag B. Patibandla, Ludovic Godet, Yong Cao, Daniel Lee Diehl, Zhebo Chen
  • Publication number: 20220367763
    Abstract: A light-emitting device includes a plurality of light-emitting diodes, a first cured composition over a first subset of the light-emitting diodes, and a second cured composition over a second subset of light-emitting diodes. The first cured composition includes a first photopolymer and a blue photoluminescent material that is an organic, organometallic, or polymeric material, embedded in the first photopolymer. The second cured composition includes a second photopolymer and a nanomaterial embedded in the second photopolymer. The nanomaterial is selected to emit red or green light in response.
    Type: Application
    Filed: July 21, 2022
    Publication date: November 17, 2022
    Inventors: Yingdong Luo, Lisong Xu, Sivapackia Ganapathiappan, Hou T. Ng, Byung Sung Kwak, Mingwei Zhu, Nag B. Patibandla