Abstract: According to one embodiment, a sensor includes a first structure body, a second structure body, and a detector. The first structure body includes a supporter, a deformable part supported by a first portion of the supporter, and a membrane part. At least a portion of the membrane part is connected to the deformable part and a second portion of the supporter. The second structure body is connected to the first structure body. A liquid is provided between the first structure body and the second structure body. The detector outputs a signal corresponding to a deformation of the deformable part.

Abstract: According to one embodiment, a sensor includes first and second structure bodies, and a detector. The first structure body includes a supporter, and first and second deformable parts supported by the supporter. The second deformable part has at least one of a second length less than a first length of the first deformable part, a second width greater than a first width of the first deformable part, a second thickness greater than a first thickness of the first deformable part, a second Young's modulus greater than a first Young's modulus of the first deformable part, or a second spring constant greater than a first spring constant of the first deformable part. The second structure body is connected to the first structure body. A liquid is provided between the first and second structure bodies. The detector outputs a signal corresponding to a deformation of the first or second deformable part.

Abstract: According to one embodiment, a sensor includes first and second structure bodies, and a detector. The first structure body includes a supporter, and first and second deformable parts supported by the supporter. The second deformable part has at least one of a second length less than a first length of the first deformable part, a second width greater than a first width of the first deformable part, a second thickness greater than a first thickness of the first deformable part, a second Young's modulus greater than a first Young's modulus of the first deformable part, or a second spring constant greater than a first spring constant of the first deformable part. The second structure body is connected to the first structure body. A liquid is provided between the first and second structure bodies. The detector outputs a signal corresponding to a deformation of the first or second deformable part.

Abstract: According to one embodiment, a sensor includes a first structure body, a second structure body, and a detector. The first structure body includes a supporter, a deformable part supported by a first portion of the supporter, and a membrane part. At least a portion of the membrane part is connected to the deformable part and a second portion of the supporter. The second structure body is connected to the first structure body. A liquid is provided between the first structure body and the second structure body. The detector outputs a signal corresponding to a deformation of the deformable part.

Abstract: According to embodiments, a sensor includes a structure body, a container, a liquid and a sensing unit. The structure body includes a supporter, and a film unit. The film unit includes a first region. The first region includes a first end portion supported by the supporter, and a first portion being displaceable. The film unit includes an opening. The container is connected to the structure body. A first space is defined between the film unit and the container. The liquid is provided inside the first space. The sensing unit senses a displacement of the first portion accompanying a displacement of the liquid.

Abstract: A pressure sensor which detects variation in pressures, the pressure sensor including a cantilever which is bent according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and an intra-lever gap which is formed on a proximal end portion of the cantilever. The proximal end portion is partitioned into a first support portion and a second support portion by an intra-lever gap in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion are connected to each other in plan view. A doped layer which is provided on a portion of the first and second support portions forms a first displacement detection portion and a second displacement detection portion. Lengths of the first and second displacement detection portions are shorter than those of the first and second supports along the second direction.

Abstract: A pressure sensor which detects variation in pressure, the pressure sensor including a cantilever which bends according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and a first gap, a second gap, and a third gap which are formed on a proximal end portion of the cantilever. The first to third gaps electrically partition the proximal end portion of the cantilever into a first support portion, a second support portion, a first displacement detection portion, and a second displacement portion in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion of the cantilever are connected to each other in plan view. The first and second displacement detection portions detect displacement according to the bending of the cantilever between the first and second support portion.

Abstract: A pressure sensor includes a sensor main body having a cavity, a cantilever having a lever main body and lever support-portion, which is bent according to a pressure difference between the cavity and sensor outside main body, and a displacement detection unit detects cantilever displacement based on resistance variation in resistance values of the main body-resistance portion formed in the lever main body and lever-resistance portion formed in the lever support-portion. A division groove is formed in the lever support; the division divides the lever-resistance portion into a first resistance portion electrically connected to a detection-electrode in series and second resistance portion closer to other adjacent lever support-portion than the first resistance portion.

Abstract: The present invention is a pressure sensor (1) which includes a sensor main body (2) having a cavity, a cantilever (3) having a lever main body (20) and a lever support portion (21A, 21B) and which is bent according to a pressure difference between the cavity and the outside of the sensor main body (2), and a displacement detection unit (4) which detects displacement of the cantilever (3) based on resistance variation in resistance values of the main body-resistance portion (31) formed in the lever main body (20) and a lever-resistance portion (32) formed in the lever support portion (21A, 21B). A division groove (40) is formed in the lever support (21A), and the division groove (40) divides the lever-resistance portion (32) into a first resistance portion (32a) which is electrically connected to a detection electrode (35) in series and a second resistance portion (32b) which is positioned so as to be closer to the other adjacent lever support portion (21B) than the first resistance portion (32a).

Abstract: A pressure sensor which detects variation in pressure, the pressure sensor including a cantilever which bends according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and a first gap, a second gap, and a third gap which are formed on a proximal end portion of the cantilever. The first to third gaps electrically partition the proximal end portion of the cantilever into a first support portion, a second support portion, a first displacement detection portion, and a second displacement portion in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion of the cantilever are connected to each other in plan view. The first and second displacement detection portions detect displacement according to the bending of the cantilever between the first and second support portion.

Abstract: The present invention achieves a pressure-sensitive sensor which can detect information on a pressure, a sound pressure, acceleration, gas and the like, with high sensitivity. The pressure-sensitive sensor includes: a cantilever (22); a frame (23) which is provided around the cantilever (22) and holds a base end of the cantilever (22); a gap (24) formed between the cantilever (22) and the frame (23); and a liquid (28) which seals the gap (24).

Abstract: A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency fLOW (Hz) defined by Expression (1), where a width (?m) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k.

Abstract: A pressure sensor which detects variation in pressures, the pressure sensor including a cantilever which is bent according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and an intra-lever gap which is formed on a proximal end portion of the cantilever. The proximal end portion is partitioned into a first support portion and a second support portion by an intra-lever gap in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion are connected to each other in plan view. A doped layer which is provided on a portion of the first and second support portions forms a first displacement detection portion and a second displacement detection portion. Lengths of the first and second displacement detection portions are shorter than those of the first and second supports along the second direction.

Abstract: According to embodiments, a sensor includes a structure body, a container, a liquid and a sensing unit. The structure body includes a supporter, and a film unit. The film unit includes a first region. The first region includes a first end portion supported by the supporter, and a first portion being displaceable. The film unit includes an opening. The container is connected to the structure body. A first space is defined between the film unit and the container. The liquid is provided inside the first space. The sensing unit senses a displacement of the first portion accompanying a displacement of the liquid.

Abstract: The present invention achieves a pressure-sensitive sensor which can detect information on a pressure, a sound pressure, acceleration, gas and the like, with high sensitivity. The pressure-sensitive sensor includes: a cantilever (22); a frame (23) which is provided around the cantilever (22) and holds a base end of the cantilever (22); a gap (24) formed between the cantilever (22) and the frame (23); and a liquid (28) which seals the gap (24).

Abstract: There is provided a differential pressure sensor capable of measuring a pressure fluctuation with a simple structure. The differential pressure sensor includes a main body formed with an air chamber, and an opening that causes an interior of the air chamber to be in communication with an exterior, and a detector provided at the opening. The detector includes a cantilever provided in a manner tiltable so as to block off the opening, and the cantilever is formed with a Piezo resistor layer.

Abstract: A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency fLOW (Hz) defined by Expression (1), where a width (?m) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k.

Abstract: There is provided a differential pressure sensor capable of measuring a pressure fluctuation with a simple structure. The differential pressure sensor includes a main body formed with an air chamber, and an opening that causes an interior of the air chamber to be in communication with an exterior, and a detector provided at the opening. The detector includes a cantilever provided in a manner tiltable so as to block off the opening, and the cantilever is formed with a Piezo resistor layer.