Abstract: Methods, systems, and apparatus for measuring a gap between a support surface for a substrate and an opposing upper surface of a processing chamber. The methods comprise: disposing a sensor substrate at a location spaced between the support surface and the upper surface, the sensor substrate comprising a body having a first side and a second side opposite the first side, the first side facing the support surface and the second side facing the upper surface, the first side having a first sensor and the second side having a second sensor; measuring, using the first sensor, a first distance between the first side and the support surface; measuring, using the second sensor, a second distance between the second side and the upper surface; and determining a gap between the support surface and the upper surface using the first distance and the second distance.

Abstract: Systems and methods for document analysis. An image containing at least one document is received at a pre-processing stage and the image is analyzed for image quality. If the image quality is insufficient for further processing, this is adjusted until the image is suitable for further processing. After the image quality adjustment, the image is then passed to an initial processing stage. At the initial processing stage, the boundaries of one or more documents within the image are determined. In addition, the orientation of the image may be adjusted and the type of document(s) within the image is determined. From the initial processing stage, the adjusted image is then passed to a data extraction stage. At this stage, clusters of data within the document are determined and bounding boxes are placed around the clusters. Data regarding each of the clusters of data is then gathered.

Abstract: Systems and methods for document analysis. An image containing at least one document is received at a pre-processing stage and the image is analyzed for image quality. If the image quality is insufficient for further processing, this is adjusted until the image is suitable for further processing. After the image quality adjustment, the image is then passed to an initial processing stage. At the initial processing stage, the boundaries of one or more documents within the image are determined. In addition, the orientation of the image may be adjusted and the type of document(s) within the image is determined. From the initial processing stage, the adjusted image is then passed to a data extraction stage. At this stage, clusters of data within the document are determined and bounding boxes are placed around the clusters. Data regarding each of the clusters of data is then gathered.