Patents by Inventor Minhyuk CHO

Minhyuk CHO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wiring structures, methods of forming the same, and semiconductor devices including the same
    Patent number: 11538810
    Abstract: A wiring structure includes a first conductive pattern including doped polysilicon on a substrate, an ohmic contact pattern including a metal silicide on the first conductive pattern, an oxidation prevention pattern including a metal silicon nitride on the ohmic contact pattern, a diffusion barrier including graphene on the oxidation prevention pattern, and a second conductive pattern including a metal on the diffusion barrier.
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: December 27, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyunseok Lim, Minhyuk Cho, Kyung-Eun Byun, Hyeonjin Shin, Kaoru Yamamoto, Jungsoo Yoon, Soyoung Lee, Geuno Jeong
  • WIRING STRUCTURES, METHODS OF FORMING THE SAME, AND SEMICONDUCTOR DEVICES INCLUDING THE SAME
    Publication number: 20220085025
    Abstract: A wiring structure includes a first conductive pattern including doped polysilicon on a substrate, an ohmic contact pattern including a metal silicide on the first conductive pattern, an oxidation prevention pattern including a metal silicon nitride on the ohmic contact pattern, a diffusion barrier including graphene on the oxidation prevention pattern, and a second conductive pattern including a metal on the diffusion barrier.
    Type: Application
    Filed: April 8, 2021
    Publication date: March 17, 2022
    Inventors: Hyunseok LIM, Minhyuk CHO, Kyung-Eun BYUN, Hyeonjin SHIN, Kaoru YAMAMOTO, Jungsoo YOON, Soyoung LEE, Geuno JEONG