Abstract: A semiconductor-device inspection apparatus includes a stage configured to allow a measurement target to be placed thereon, an actuator configured to move the stage in a vertical direction, a detector configured to detect a plurality of Raman spectra from scattered light that has been scattered away from the measurement target, and a processor configured to generate a plurality of spectral images for a measurement variable by using the plurality of Raman spectra detected by the detector, wherein the detector is further configured to detect the plurality of Raman spectra at different vertical levels of the measurement target.

Abstract: The present invention relates to pH-sensitive carbon nanoparticles, a method of preparing the same, and a drug delivery using the same, and pH-sensitive carbon nanoparticles including imidazole is prepared so that a hydrophobic drug and a photosensitizer material can be encapsulated, drug release is possible under weakly acidic conditions, and thus it can be used as a drug carrier for anticancer treatment, photodynamic therapy, or photomediated anticancer immunotherapy.