Patents by Inventor Minolu Soraoka

Minolu Soraoka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma treating method and apparatus therefor
    Patent number: 5085750
    Abstract: The present invention relates to a plasma treating method and apparatus therefor, the plasma treating method comprising the steps of supplying a liquid refrigerant whose temperature is not higher than 0.degree. C. into a specimen table having a specimen place surface, cooling a specimen placed on the specimen place surface, treating the cooled specimen utilizing a gas plasma, and recovering the liquid refrigerant, in its liquid state, retained in the specimen table from the specimen table. The plasma treating apparatus comprised means for producing a gas plasma, a specimen table on which is placed a specimen to be treated utilizing the gas plasma and interiorly formed with a space for retaining a liquid refrigerant whose temperature is not higher than 0.degree. C.
    Type: Grant
    Filed: April 14, 1989
    Date of Patent: February 4, 1992
    Assignee: Hitachi, Ltd.
    Inventors: Minolu Soraoka, Yoshinao Kawasaki, Katsuyoshi Kudo, Tsunehiko Tsubone
  • Plasma treating method and apparatus therefor
    Patent number: 4911812
    Abstract: The present invention relates to a plasma treating method and apparatus therefor. The plasma treating method comprises the steps of forming a treating gas into a plasma under reduced pressure, utilizing the plasma to treat a specimen cooled to a low temperature less than 0.degree. C.
    Type: Grant
    Filed: October 17, 1988
    Date of Patent: March 27, 1990
    Assignee: Hitachi, Ltd.
    Inventors: Katsuyoshi Kudo, Yoshinao Kawasaki, Minolu Soraoka, Tsunehiko Tsubone, Kazunori Tsujimoto, Shinichi Tachi, Saadyuki Okudaira