Abstract: An object of the present invention is to provide a flue gas purifying device that can efficiently decrease nitrogen oxides in flue gas.

Abstract: An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe (101) having a gas flow path (101a) to supply a medium gas (G) and an insulating member (103) screwed into an end portion of the gas supply pipe (101) to be flush therewith and having a gas outlet (102) communicated with the gas flow path (101a).

Abstract: An object of the present invention is to provide a flue gas purifying device that can suppress leakage of ammonia and can efficiently decrease nitrogen oxides in flue gas. The object is achieved by a flue gas purifying device including: an exhaust pipe; a urea-water injecting unit that injects urea water into the exhaust pipe; a catalytic unit that includes a urea SCR catalyst that promotes a reaction between ammonia and nitrogen oxides and a support mechanism that supports the urea SCR catalyst in the exhaust pipe, and is arranged on a downstream side to a position where urea water is injected; a concentration measuring unit arranged on a downstream side to the catalytic unit in a flow direction of flue gas to measure an ammonia concentration in flue gas having passed through the urea SCR catalyst; and a control unit that controls injection of urea water by the urea-water injecting unit based on an ammonia concentration measured by the concentration measuring unit.

Abstract: An exhaust gas analyzer of the present invention includes a sensor unit 11 installed in an exhaust path from an engine, applies laser light to exhaust gas emitted from the engine and receives laser light that has passed through the exhaust gas so as to measure the concentration of a component contained in the gas based on the received laser light. To an aperture 16 formed in a sensor base 15 of the sensor unit 11, an adjustment ring 40 in a circumferential face of which small holes 41 serving as a laser light passage portion is formed and whose inner circumferential face serves as an exhaust gas passage opening 21 is detachably fitted, whereby the sensor unit can be attached so as to conform to different inner diameters of exhaust tubes.

Abstract: Disclosed are method and apparatus for measuring density, that can simultaneously measure gaseous substance density and solid particulate material density and further can simultaneously measure the densities of a plurality of materials such as black smoke, white smoke, and water vapor in the solid particulate material in a simple and reliable manner. The method for measuring density comprises applying a laser beam having an absorption wavelength inherent in a gaseous material contained in an object to be measured, to the object to detect a light transmittance and a light absorption amount and detecting the density of gaseous materials in the object and the density of solid particulate materials in the object. The relationship between the density of a plurality of kinds of solid particulate materials including black smoke and white smoke and a laser beam attenuation level in each absorption wavelength is preset.

Abstract: An optical system includes a fluoride compound and has surfaces facing and exposed to plasma installed in an optical equipment which has an inner zone where the plasma exists. A 2 nm-20 nm protective film of a highly plasma-resistant material is formed on the surface of the fluoride compound that is exposed to the plasma.

Abstract: An optical system has fluoride compounds provided in an environment exposed by vacuum ultraviolet light or plasma light, which has higher photon energy than an absorption wavelength of a base stock of the optical system. 1-layer of a protective film of SiO2 or metal oxides having a film thickness of 2-20 nm is formed at least on the light irradiation side (inner side) of the optical system to prevent the stripping of the fluorine atoms from the surface of the optical system. In addition, the protective film is a 1-layer film selected from one of SiO2, MgO, TiO2, or ZrO2.

Abstract: A barrier-film forming apparatus that forms a barrier film on an inner face of a container (12) having a concave or convex portion (12a) as a processing target, including: a dielectric member (50) having a cavity sized to enclose the container (12), an external electrode (13) covering an outer circumference of the dielectric member (50), an exhaust unit installed on an end face of the external electrode (13) on a side where a mouth (11) of the container (12) is located, with an insulating member (26) interposed therebetween, and depressurizing inside of the container (12) through an exhaust pipe (14), an internal electrode (17) inserted from a side of the exhaust pipe (14) and also serving as a gas blowout unit that blows out medium gas (19) for generating a barrier film into the container (12), and an electric-field applying unit that applies an electric field for generating exhaust between the external electrode (13) and a ground electrode.

Abstract: An exhaust gas analyzer of the present invention includes a sensor unit 11 installed in an exhaust path from an engine, applies laser light to exhaust gas emitted from the engine and receives laser light that has passed through the exhaust gas so as to measure the concentration of a component contained in the gas based on the received laser light. To an aperture 16 formed in a sensor base 15 of the sensor unit 11, an adjustment ring 40 in a circumferential face of which small holes 41 serving as a laser light passage portion is formed and whose inner circumferential face serves as an exhaust gas passage opening 21 is detachably fitted, whereby the sensor unit can be attached so as to conform to different inner diameters of exhaust tubes.

Abstract: The objectives of the present invention are to prevent or inhibit the deterioration effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH ions, ozone, O2 ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.

Abstract: An optical properties restoration apparatus improves reliability and longevity of optical properties of an optical system, lying upon a vacuum boundary, by preventing, suppressing, or improving degradation of optical properties. The apparatus includes creating the near vacuum zone to excite an oxidation reaction of carbon, generating a flow of an oxygen atom-containing gas such as water gas or oxide gas in the near vacuum zone, and supplying active energy in the near vacuum zone to cause a carbon oxidation reaction between the oxygen atom-containing gas and the carbon. The near vacuum zone faces the lighting surfaces of the optical system and a lower limit value for a partial pressure of the gases containing oxygen atoms that is supplied to the near vacuum zone is set to a level over a speed of the carbon buildup that deposits on the lighting surfaces of the optical system.

Abstract: An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe (101) having a gas flow path (101a) to supply a medium gas (G) and an insulating member (103) screwed into an end portion of the gas supply pipe (101) to be flush therewith and having a gas outlet (102) communicated with the gas flow path (101a).

Abstract: The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH ions, ozone, O2-ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.

Abstract: The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH? ions, ozone, O2? ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.

Abstract: The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH.ions, ozone, O2.ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.

Abstract: The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH— ions, ozone, O2— ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.

Abstract: The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH? ions, ozone, O2? ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.

Abstract: A vacuum ultraviolet lamp ionizes a chemical substance contained in exhaust gas Gs. The chemical substance ionized is trapped in an ion trapping apparatus in which a radio frequency electric field is formed. Energy is applied to an ion group in the ion trapping apparatus with a SWIFT waveform comprising a frequency component excluding a frequency corresponding to an orbital resonance frequency of ions of the chemical substance to remove an impurity. Energy is then applied to the ion group with a TICKLE waveform having a frequency component corresponding to the orbital resonance frequency of the ions of the chemical substance to fragmentate the ions of the chemical substance. A mass of the fragment is then measured with a mass spectrometer to identify the chemical substance.

Abstract: The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH? ions, ozone, O2? ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.

Abstract: A vacuum ultraviolet lamp (3) ionizes a chemical substance contained in exhaust gas Gs. The chemical substance ionized is trapped in an ion trapping apparatus (10) in which a radio frequency electric field is formed. Energy is applied to an ion group in the ion trapping apparatus (10) with a SWIFT waveform comprising a frequency component excluding a frequency corresponding to an orbital resonance frequency of ions of the chemical substance to remove an impurity. Energy is then applied to the ion group with a TICKLE waveform having a frequency component corresponding to the orbital resonance frequency of the ions of the chemical substance to fragmentate the ions of the chemical substance. A mass of the fragment is then measured with a mass spectrometer (4) to identify the chemical substance.