Abstract: A monodisperse spherical, ellipsoidal or plate-like vaterite calcium carbonate almost free from secondary aggregation is disclosed. The vaterite type calcium carbonate is prepared by the steps of adding 5-20 times mol equivalent of water with respect to unslaked lime to a methanol suspension of 0.5-12 weight % of unslaked lime and/or slaked lime (in case of slaked, conversion is to be made into unslaked lime of the same mol) to prepare of a mixture of methanol, unslaked lime and/or slaked lime and water, letting carbon dioxide gas through said mixture, adjusting the temperature in the carbonation reaction systemto not less than 30.degree. C. before arrival of conductivity within carbonation reaction system at the maximal point on conductivity variation curve in the carbonation reaction system and adjusting the time from start of carbonation reaction to the point where the conductivity is 100.mu. S/cm to be less than 1,000 minutes.

Abstract: A plasma processor wherein a substrate is processed using a plasma in a reaction gas generated through electron cyclotron resonance includes a magnetostatic field generator for generating a magnetostatic field, an electric field generator for generating an r.f. electric field perpendicular to the magnetostatic field, and a moving magnetic field generator for generating a moving magnetic field which intersects the magnetostatic field between the magnetostatic field generator and the substrate.

Abstract: In a plasma processor having a plasma generation portion which generates a plasma through electron cyclotron resonance, and a plasma reaction portion which receives therein a substrate to be processed with the plasma; the improvement comprising the fact that the plasma generation portion includes a plasma generating glass tube which can supply a plasma generating gas, an r.f. waveguide which accommodates the plasma generating glass tube and which establishes a nonuniform r.f. electric field perpendicular to an axial direction of the plasma generating portion, and a coil assembly which is arranged around the r.f. waveguide and which establishes a nonuniform magnetostatic field in the axial direction, at least a part of the magnetic field of the coil assembly being subjected to a rotational motion or a rectilinear motion.

Abstract: The present invention provides a filler for paper-making containing 0.1 weight part or more of a particle composition meeting the requirements (A), (B) and (C) below per 100 weight parts of heavy calcium carbonate and a neutral paper-making process by the use thereof:(A): Zeta potential (Suspension concentration 1,000 ppm in pure water, measuring temperature 20.degree. C.) is negative;(B): Particle size "d" of the composition resulting from dispersion for 10 minutes of a 10 weight % aqueous suspension of the above-mentioned particle composition by ultrasonic dispersing means measured by the use of the standard sieve of JIS Z8801 is:22 .mu.m<d.ltoreq.150 .mu.m(C): Specific surface area S (cm.sup.2 /g) of the above-mentioned particle composition measured by the BBT method is within the range shown by the formula (1) below:S>100,000/D.multidot..rho. (1)where:D=Average particle size (.mu.m) of the composition.rho.=Specific gravity of the composition.