Abstract: The present invention relates, in a projection aligner wherein a mask and a wafer are held proximate to one another and wherein a circuit pattern depicted on the mask is transferred onto the wafer, to a method of detecting the respective positions of the mask and the wafer for the relative positioning between the mask and the wafer.

Abstract: A method is provided for automatically controlling both the running operations of traveling machines including a pusher machine, a charging car, a coke guide and/or solely a quenching car. Transposed-pair-type inductive radio lines capable of data transmissions are arranged over the whole length of the running path of the respective traveling machines. The absolute addresses of the traveling machines are continuously located at a main control system by means of a continuously position detecting mechanism resorting to an absolute address detecting method. Instructions to consecutively effect the running, stopping and working operations of the traveling machines are generated by grasping the positions and working states of the traveling machines on the basis of the control programs of the respective working steps, all of which are stored in the main controller, and on the basis of the speed and work data fed from the traveling machines, and the positions and working states of the same machines.

Abstract: A precision parallel translation system including a pair of tables or upper and lower tables movable parallel to and in directions perpendicular to each other, and a pair of drive means for rough movement each detachably connected to one of the tables to drive the respective table for movement a relatively long distance. Each table supports drive means for fine movement detachably connected to a base (which is the lower table in the case of the upper table) supporting the respective table. The table is moved a relatively long distance by the drive means for rough movement when rough movement is effected, to effect rough positioning of the table. Then the drive means for fine movement is secured to the base while detaching the drive means for rough movement from the table, to drive the table for fine movement to effect precision positioning of the table.

Abstract: A mattress for use on a bed and settee comprises a spring unit, at least one cushion, a protection layer arranged between the spring unit and the cushion, and an outer covering for covering these component members. The protection layer includes a frame located at the circumference and outside of the spring unit, and a net tensioned inside the frame, the protection layer being made of synthetic resin and having the frame and net formed integral thereto. The frame has a flange with which end turns of coil springs arranged in the spring unit and adjacent to the frame can be contacted. The frame of each protection layer provided with the flange has sufficient rigidity and serves as a reinforcing member.

Abstract: An X ray exposure process and system for transferring a mask pattern onto a wafer with use of X rays, wherein heights on the mask at many points are measured on a light interference band basis by a mask-height measuring device of non-contact measurement type at an X ray exposure position, the mask being mounted on a chamber which is filled with a He gas and or the like to prevent attenuation of an X ray source, heights on the wafer at many points are measured at a wafer-height measuring position different from said exposure position, and according to the measured results, the wafer is finely moved upwardly or downwardly (that is, deformed) individually independently by means of a chuck which sucks and holds the wafer at many points thereon so that, a gap between the mask and wafer is adjusted to a desired level.

Abstract: An X-ray exposure apparatus making use of a soft X-ray. An atmospheric chamber charged with a gas having a high permeability to X-ray is disposed between the X-ray source and the mask having the pattern to be replicated, such that the mask is supported by the atmospheric chamber. A part or the whole of an alignment optical system is disposed in the atmospheric chamber. According to this arrangement, it is possible to decrease the rate of attenuation of the X-ray between the source and the mask to attain higher ratio of utilization of the generated X-ray, thereby to shorten the replicating time and to improve the through put (amount of replication per unit time).

Abstract: Provided is a process for preparing tertiary butyl alcohol from isobutylene comprising reacting isobutylene or a hydrocarbon mixture containing isobutylene with an aqueous solution of an aliphatic carboxylic acid having from 1 to 6 carbon atoms in the presence of a solid, acidic ion-exchange resin as catalyst, to produce an aqueous reaction mixture of a major amount of tertiary butyl alcohol and a minor amount of the tertiary butyl ester of the carboxylic acid comprising the improved steps of:(1) subjecting said reaction mixture to distillation to remove unreacted isobutylene or hydrocarbon mixture therefrom;(2) supplying the treated reaction mixture of step (1) to a distillation column and passing water from the top to the bottom of said distillation column to remove said tertiary butyl ester of the carboxylic acid, wherein the amount of water used for removing the ester in step (2) is less than the sum of the amount of water used for converting said isobutylene into tertiary butyl alcohol and the amount of

Abstract: A method for continuously removing fine dust from gases which contain them, consisting of: introducing the gas at a gas linear velocity of 10 to 80 m/sec and a liquid at a rate such that the liquid-to-gas ratio; L/G, is 1 to 50 l/m.sup.3, in parallel, into slit(s) or hole(s) which are set in tray(s) causing impingement onto a baffle plate which is set beneath the tray; and then carrying away the fine dust particles from the gas by the liquid, which is separated from the gas, is disclosed, along with apparatus to effectuate the process.

Abstract: Highly purified isobutylene, up to 99.9% pure, is obtained by treating a reaction mixture such as that recovered from an isobutylene-containing hydrocarbon mixture also containing an aqueous solution of an aliphatic carboxylic acid having 1 to 6 carbon atoms that has been reacted in an acidic ion exchanger and from which the unreacted hydrocarbons have been removed. The operative ingredients of the treated mixture are tertiary butyl alcohol, secondary butyl alcohol and their esters of the carboxylic acid employed. When treated with an acidic ion exchanger the carboxylic acid is first formed which inhibits the secondary butyl alcohol and secondary butyl ester of the acid from decomposing and high purity isobutylene is recovered therefrom by conventional distillation.

Abstract: This is a process for recovering bromine from a waste liquid formed in the production of an aniline derivative by ammonolysis of a nuclear substituted bromobenzene derivative with a halogen atom or a functional group. The waste liquid is first subjected to chlorine treatment in alkaline region to remove most part of ammonia and aniline derivatives, and then it is subjected to chlorine treatment in acidic region to recover bromine. The process does not involve danger of explosion accidents and can be smoothly operated.

Abstract: A mattress includes a pair of ridges made of elastomeric material and disposed respectively on both sides of an elastomeric layer which is laid on the top of a spring unit and covered with an outer covering, the ridges protruding from the elastomeric layer. Each ridge partially or fully extends in the longitudinal direction of the elastomeric layer. A user lying on the mattress is prevented from falling from the mattress by the ridges.

Abstract: A method of removing chromium ion from an aqueous solution of an organic acid of an acid concentration of up to 95% which comprises treating the solution with a cation exchange resin at a temperature higher than 55.degree. C.

Abstract: An alignment apparatus, in which a mask is overlaid on a wafer and a relative displacement between the wafer and a target pattern formed on the mask is detected to effect alignment thereof, comprises a slit frame adapted to reciprocate in a direction substantially parallel to the top surface of the mask and having a slit formed therein, an illumination optical system for illuminating the target pattern, an image formation optical system for forming the image of the target pattern onto the slit of the slit frame, a light sensing element mounted on the slit frame for detecting the target pattern image formed by the image formation optical system through the slit to convert the image into an electric signal, and a displacement detector for detecting the amount of movement of the reciprocation of the slit frame to convert the amount of movement into a position signal which the light sensing element scans, whereby the output signals from the displacement detector and the light sensing element are used to detect th

Abstract: T-Butyl alcohol is produced by reacting isobutylene with an aqueous organic acid solution in the presence of an acidic ion-exchanger. t-Butyl alcohol can be produced by this process from a mixed gas containing isobutylene and n-butene. The process is also applicable for separation of isobutylene from a mixed gas containing isobutylene and n-butene.