Patents by Inventor Minoru KOHASHI

Minoru KOHASHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing a semiconductor device, method of processing a substrate, substrate processing apparatus, and recording medium
    Patent number: 9337015
    Abstract: Disclosed is a method of manufacturing a semiconductor device. The method includes forming a film containing carbon on a substrate by repeating a cycle plural times. The cycle includes: in a state in which a substrate housed in a processing chamber is heated, supplying an organic-based gas into the processing chamber and confining the organic-based gas inside the processing chamber; maintaining a state in which the organic-based gas is confined inside the processing chamber; and exhausting an inside of the processing chamber.
    Type: Grant
    Filed: March 29, 2013
    Date of Patent: May 10, 2016
    Assignee: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Tsuyoshi Takeda, Taketoshi Sato, Minoru Kohashi
  • METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, METHOD OF PROCESSING A SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
    Publication number: 20130280921
    Abstract: Disclosed is a method of manufacturing a semiconductor device. The method includes forming a film containing carbon on a substrate by repeating a cycle plural times. The cycle includes: in a state in which a substrate housed in a processing chamber is heated, supplying an organic-based gas into the processing chamber and confining the organic-based gas inside the processing chamber; maintaining a state in which the organic-based gas is confined inside the processing chamber; and exhausting an inside of the processing chamber.
    Type: Application
    Filed: March 29, 2013
    Publication date: October 24, 2013
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Tsuyoshi TAKEDA, Taketoshi SATO, Minoru KOHASHI