Abstract: When a lamp is turned on and a wafer is placed on a light exposure surface, a controlling unit opens a shutter plate so that light is emitted on the light exposure surface and an illuminometer receives the light. An accumulated light amount measuring unit converts illumination intensity measured by the illuminometer to an accumulated light amount. The controlling unit turns off the lamp by sending a lamp OFF signal to a power supplying unit. At the same time, the controlling unit sends a shutter closing command to the power supplying unit. After the shutter is closed, the controlling unit relight the lamp by sending a lamp ON signal to the power supplying unit.

Abstract: When a lamp is turned on and a wafer is placed on a light exposure surface, a controlling unit opens a shutter plate so that light is emitted on the light exposure surface and an illuminometer receives the light. An accumulated light amount measuring unit converts illumination intensity measured by the illuminometer to an accumulated light amount. The controlling unit turns off the lamp by sending a lamp OFF signal to a power supplying unit. At the same time, the controlling unit sends a shutter closing command to the power supplying unit. When the shutter is closed, the controlling unit relight the lamp by sending a lamp ON signal to the power supplying unit.

Abstract: An electron beam irradiation processing device including an electron beam tube and a current detection unit disposed outside of the window of the electron beam tube. The electron beam tube is adapted to radiate electron beams and has a window and an associated power-source unit that provides a power source. The current detection unit includes at least one of a conductor and a semiconductor covered by an insulating film, and an electron beam level measurement unit having a current measurement unit that measures the current flowing through the current detection unit. The amount of electron beams output from the electron beam tube is controlled by controlling the power-source unit as a function of the current flowing through the current detection unit.

Abstract: A starter circuit having a pulse transformer reduced in size so as to reduce the heating power, to make the starter circuit smaller and to make a lamp operating device smaller. The pulse transformer has a plurality of windings connected in parallel to one another on the primary side of the pulse transformer. In a first embodiment, the respective plurality of windings connected parallel to one another are located next to one another on a core of the pulse transformer, and are wound around the core such that the coupling of the primary windings to the secondary winding is increased. Hence, the number of turns per unit length of the secondary winding is reduced. Accordingly, the length of the pulse transformer in the axial direction is also reduced, and the pulse transformer is made smaller.

Abstract: An electron beam irradiation processing device including an electron beam tube and a current detection unit disposed outside of the window of the electron beam tube. The electron beam tube is adapted to radiate electron beams and has a window and an associated power-source unit that provides a power source. The current detection unit includes at least one of a conductor and a semiconductor covered by an insulating film, and an electron beam level measurement unit having a current measurement unit that measures the current flowing through the current detection unit. The amount of electron beams output from the electron beam tube is controlled by controlling the power-source unit as a function of the current flowing through the current detection unit.

Abstract: A process for curing a resist in which a resist is cured quickly and with high efficiency without gas, which is formed by irradiation with electron beams with which the resist is irradiated for curing, remaining in it and thereby increase its thermostability, is achieved by the following process steps:a first, the resist is irradiated with electron beams and kept at a temperature such that gas is produced and released in the resist, but no gas bubbles are formed in the resist;second, the resist is heated so that the gas produced in the first process step is dissipated to the outside from the resist; andthird, the resist is irradiated with electron beams so that macromolecules are formed in the resist and the resist is cured.

Abstract: A Stirling engine which has an expansion cylinder and a compression cylinder with an expansion piston and a compression piston, respectively, that have a fixed phase difference between them, where the expansion cylinder and the compression cylinder are connected through a heater, a regenerator, and a cooler, a fixed amount of working fluid is sealed in the expansion cylinder and a compression cylinder, and the engine is driven by heating or cooling the working fluid with the heater or the cooler, and in the above Stirling engine, the heater for heating the working fluid includes a combustion chamber attached to the expansion cylinder, a burner for jetting a combustible substance into the combustion chamber, a plurality of heat exchanger pipes for forming a plurality of passages for the working fluid to connect through between the expansion cylinder and the regenerator by turning back on themselves, in order to heat the working fluid with the high temperature gas from the burner, and a cylinder head for instal

Abstract: Large numbers of vent holes are respectively formed in inner and outer flame cylinders defining an annular combustion chamber to supply air thereto. A total opening area of the vent holes formed in the outer flame cylinder is greater than that of the vent holes formed in the inner flame cylinder. As a result, the heat capacity of the outer flame cylinder is smaller than that of the inner flame cylinder. During combustion, the outer flame cylinder is heated to red-hot. A plurality of projections are formed on the outer wall surface of the inner flame cylinder to allow complete combustion of a fuel vapor.

Abstract: A wick temperature control unit is provided for controlling the temperature of a wick having the lower end portion dipped in a fuel tank for storing liquid fuel and the upper end portion inserted in a combustion chamber through a narrow path. The wick soaks up the liquid fuel by capillary action in the combustion chamber and evaporates the liquid fuel therein. The wick temperature control unit holds the temperature of the upper end portion of the wick in accordance with a given heating power state, thereby contributing to widen a heating power adjustment range.

Abstract: Disclosed are a catalyst carrier for purification of waste gas which comprises a carrier comprising a calcined clay material composed of 1 to 5% by weight of lithium oxide (Li.sub.2 O), not less than 20% by weight of aluminum oxide (Al.sub.2 O.sub.3) and not less than 60% by weight of silicon dioxide (SiO.sub.2), the total thereof being substantially 100; an aluminum oxide supported on the surface of the said clay material; and a platinum group element having further supported on said aluminum oxide; and a process for preparing the same.