Abstract: A testing apparatus is to test a solar cell. A movable stage has a holding surface on which the solar cell is held. A pump light irradiating unit emits pump light LP1 in a direction toward the holding surface. Four reference sample parts are provided on a part of the holding surface. The reference sample parts each radiate a terahertz wave in response to irradiation with the pump light from the pump light irradiating unit. A terahertz wave detecting unit detects the terahertz wave radiated from each reference sample part. A stage driving mechanism is a displacement mechanism that displaces an optical path of the pump light relative to the holding surface by moving the movable stage.

Abstract: A drawing apparatus which performs a drawing process on a substrate includes a holding plate having a holding surface configured to be opposed a back surface of the substrate, a vacuum suction port formed in the holding surface and configured to attract the substrate to the holding surface by vacuum suction, and a plurality of Bernoulli suction ports formed in the holding surface and configured to attract the substrate to the holding surface by Bernoulli suction. The holding surface includes a circular region disposed concentrically with the center of the holding surface, and an annular region disposed concentrically with the circular region. At least one of the Bernoulli suction ports is disposed in the circular region, and at least one of the Bernoulli suction ports is disposed in the annular region.

Abstract: A drawing apparatus which performs a drawing process on a substrate includes a holding plate having a holding surface configured to be opposed a back surface of the substrate, a vacuum suction port formed in the holding surface and configured to attract the substrate to the holding surface by vacuum suction, and a plurality of Bernoulli suction ports formed in the holding surface and configured to attract the substrate to the holding surface by Bernoulli suction. The holding surface includes a circular region disposed concentrically with the center of the holding surface, and an annular region disposed concentrically with the circular region. At least one of the Bernoulli suction ports is disposed in the circular region, and at least one of the Bernoulli suction ports is disposed in the annular region.