Patents by Inventor Minoru Soraoka

Minoru Soraoka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Patent number: 6895685
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Grant
    Filed: October 21, 2003
    Date of Patent: May 24, 2005
    Assignee: Hitachi, Ltd.
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus
    Publication number: 20050051093
    Abstract: A vacuum processing apparatus includes a vacuum processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas. The vacuum processing chamber has an axisymmetric structure, including a double wall structure, and a gate valve for sealing an opening through which the object enters the processing chamber.
    Type: Application
    Filed: March 30, 2004
    Publication date: March 10, 2005
    Inventors: Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi
  • Vacuum processing apparatus
    Publication number: 20050051091
    Abstract: A vacuum processing apparatus comprising a transfer unit 112 disposed at a center thereof, plural processing chambers 103, 104, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas; and a mass flow controller unit 107 interposed between two processing chambers for supplying gas to the chambers.
    Type: Application
    Filed: September 8, 2003
    Publication date: March 10, 2005
    Inventors: Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi
  • Vacuum processing apparatus
    Publication number: 20050051092
    Abstract: A vacuum processing apparatus including a transfer chamber inside of which an object wafer to be processed is transferred, and two processing chambers disposed outside of the transfer chamber and attached to the transfer chamber in a detachable manner. The inside of each processing chamber is decompressed so as to process the wafer being placed therein using a plasma generated from a processing gas supplied thereto, and two supply units supply the processing gas to the two processing chambers, respectively. The two supply units are disposed vertically outside of the transfer chamber and between the two processing chambers.
    Type: Application
    Filed: March 30, 2004
    Publication date: March 10, 2005
    Inventors: Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara, Susumu Tauchi
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Publication number: 20040197169
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Application
    Filed: April 19, 2004
    Publication date: October 7, 2004
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Publication number: 20040118005
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Application
    Filed: October 21, 2003
    Publication date: June 24, 2004
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Patent number: 6752579
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Grant
    Filed: September 20, 2001
    Date of Patent: June 22, 2004
    Assignee: Hitachi, Ltd.
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Patent number: 6752580
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Grant
    Filed: September 20, 2001
    Date of Patent: June 22, 2004
    Assignee: Hitachi, Ltd.
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Patent number: 6705828
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Grant
    Filed: October 22, 2001
    Date of Patent: March 16, 2004
    Assignee: Hitachi, Ltd.
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Patent number: 6672819
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Grant
    Filed: November 3, 2000
    Date of Patent: January 6, 2004
    Assignee: Hitachi, Ltd.
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Patent number: 6526330
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Grant
    Filed: January 26, 2001
    Date of Patent: February 25, 2003
    Assignee: Hitachi, Ltd.
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Patent number: 6519504
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Grant
    Filed: January 19, 2000
    Date of Patent: February 11, 2003
    Assignee: Hitachi, Ltd.
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Patent number: 6430469
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Grant
    Filed: December 7, 2000
    Date of Patent: August 6, 2002
    Assignee: Hitachi, Ltd.
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Publication number: 20020099469
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Application
    Filed: March 1, 2002
    Publication date: July 25, 2002
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Publication number: 20020091465
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Application
    Filed: March 1, 2002
    Publication date: July 11, 2002
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Publication number: 20020082744
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Application
    Filed: March 1, 2002
    Publication date: June 27, 2002
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manafacturing line using the same
    Publication number: 20020068982
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Application
    Filed: September 20, 2001
    Publication date: June 6, 2002
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Publication number: 20020062166
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Application
    Filed: September 20, 2001
    Publication date: May 23, 2002
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Publication number: 20020062165
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Application
    Filed: September 20, 2001
    Publication date: May 23, 2002
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
  • Vacuum processing apparatus and semiconductor manufacturing line using the same
    Publication number: 20020061244
    Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
    Type: Application
    Filed: September 20, 2001
    Publication date: May 23, 2002
    Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki