Abstract: A substrate storage apparatus includes a stage on which a cassette that has a lid detachably mounted to an opening is disposed, a lid attaching/detaching plate that performs attaching/detaching of the lid to/from the opening of the cassette disposed on the stage, and is provided to be movable between a mounting position in contact with the lid disposed at a position of the opening and a retracted position not in contact with the lid disposed at the position of the opening, a lid holding sensor that detects whether the lid is being held by the lid attaching/detaching plate, and a controller that determines presence/absence of abnormality related to attachment/detachment of the lid based on a detection result of the lid holding sensor.

Abstract: A filtering device includes a filter tank, a first drum filter both ends of which are supported, and a cantilever second drum filter. A first end portion of the first drum filter is supported on a first sidewall of the filter tank. A second end portion of the first drum filter is supported on a second sidewall. An end portion of the second drum filter on the supported side is supported on the first sidewall. Between an end portion of the second drum filter on the non-supported side and the second sidewall, a communicating part is formed. A first jetting section jets a fluid against an outer circumferential surface of the first drum filter. A second jetting section is arranged in the vicinity of the second drum filter and jets the fluid against the second drum filter.

Abstract: A controller is configured to control a liquid supply to change a landing position of a liquid on a surface of a substrate continuously by discharging the liquid toward the surface of the substrate from a first liquid discharge nozzle while moving the first liquid discharge nozzle. The controller is also configured to derive discharge position deviation information of the liquid supply by comparing first temperature information based on a spot temperature measured by a temperature measurement device when the first liquid discharge nozzle is moved along a first nozzle path and second temperature information based on the spot temperature measured by the temperature measurement device when the first liquid discharge nozzle is moved along a second nozzle path which is different from the first nozzle path.

Abstract: A filtering device includes a filter tank, a first drum filter both ends of which are supported, and a cantilever second drum filter. A first end portion of the first drum filter is supported on a first sidewall of the filter tank. A second end portion of the first drum filter is supported on a second sidewall. An end portion of the second drum filter on the supported side is supported on the first sidewall. Between an end portion of the second drum filter on the non-supported side and the second sidewall, a communicating part is formed. A first jetting section jets a fluid against an outer circumferential surface of the first drum filter. A second jetting section is arranged in the vicinity of the second drum filter and jets the fluid against the second drum filter.

Abstract: A substrate processing apparatus according to the present disclosure includes a holding unit, a nozzle, a driving unit, and a controller. The holding unit holds a substrate. The nozzle supplies a processing liquid to the substrate held on the holding unit. The driving unit moves the nozzle. The controller controls the driving unit, so as to move the nozzle while supplying the processing liquid to the substrate from the nozzle. Further, the controller controls the driving unit based on recipe information including step information including positions of first and second points above the substrate, total time for moving the nozzle between the first and second points, and a moving speed of the nozzle, so as to cause reciprocation of the nozzle.

Abstract: A substrate storage apparatus includes a stage on which a cassette that has a lid detachably mounted to an opening is disposed, a lid attaching/detaching plate that performs attaching/detaching of the lid to/from the opening of the cassette disposed on the stage, and is provided to be movable between a mounting position in contact with the lid disposed at a position of the opening and a retracted position not in contact with the lid disposed at the position of the opening, a lid holding sensor that detects whether the lid is being held by the lid attaching/detaching plate, and a controller that determines presence/absence of abnormality related to attachment/detachment of the lid based on a detection result of the lid holding sensor.

Abstract: A filtration device has a primary conveyer tank which is equipped with a first conveyer, a primary drum filter which rotates inside the primary conveyer tank, a secondary conveyer tank which is equipped with a second conveyer and a secondary drum filter which rotates inside the secondary conveyer tank. Liquid in the primary conveyer tank passes through a first opening to flow into the secondary conveyer tank. Clean liquid flowing into a first clean tank is supplied to a low-pressure-side supply system by a first pump. Super-clean liquid having been filtered by the secondary drum filter passes through a second opening to flow into a second clean tank, and then is supplied to a high-pressure-side supply system by a second pump.

Abstract: A filtration device has a primary conveyer tank which is equipped with a first conveyer, a primary drum filter which rotates inside the primary conveyer tank, a secondary conveyer tank which is equipped with a second conveyer and a secondary drum filter which rotates inside the secondary conveyer tank. Liquid in the primary conveyer tank passes through a first opening to flow into the secondary conveyer tank. Clean liquid flowing into a first clean tank is supplied to a low-pressure-side supply system by a first pump. Super-clean liquid having been filtered by the secondary drum filter passes through a second opening to flow into a second clean tank, and then is supplied to a high-pressure-side supply system by a second pump.

Abstract: A substrate processing apparatus according to the present disclosure includes a holding unit, a nozzle, a driving unit, and a controller. The holding unit holds a substrate. The nozzle supplies a processing liquid to the substrate held on the holding unit. The driving unit moves the nozzle. The controller controls the driving unit, so as to move the nozzle while supplying the processing liquid to the substrate from the nozzle. Further, the controller controls the driving unit based on recipe information including step information including positions of first and second points above the substrate, total time for moving the nozzle between the first and second points, and a moving speed of the nozzle, so as to cause reciprocation of the nozzle.

Abstract: A drive shaft with direct-mounted sprockets is arranged in a chain drive unit. The drive shaft includes a shaft body, a pair of metal plate sprockets, and first padding portions and second padding portions formed of weld beads. The first padding portions are formed such that their positions are changed to alternate with each other in a circumferential direction of the shaft body. The second padding portions are formed such that their positions are changed to alternate with each other in the circumferential direction of the shaft body. A torque input to the shaft body is transmitted to the metal plate sprockets via the padding portions.

Abstract: A paint booth is provided with a booth body and a purifier. The purifier is provided with a water tank, water rope formation mechanism, sludge removal mechanism, exhaust mechanism, barrier member, inclined plate, and windshield plate. Water falling from nozzles of a water case forms water ropes. The inclined plate has a water receiving surface sloping forwardly down from the barrier member toward a water surface of the water tank. A lower end of the windshield plate is in contact with water in the water tank. An airflow reversal section is formed between a lower end of the inclined plate and the water surface. Air directed downward from an airflow inlet is turned upward at the airflow reversal section and directed to an exhaust chamber through air circulation sections.

Abstract: A paint booth is provided with a booth body and a purifier. The purifier is provided with a water tank, water rope formation mechanism, sludge removal mechanism, exhaust mechanism, barrier member, inclined plate, and windshield plate. Water falling from nozzles of a water case forms water ropes. The inclined plate has a water receiving surface sloping forwardly down from the barrier member toward a water surface of the water tank. A lower end of the windshield plate is in contact with water in the water tank. An airflow reversal section is formed between a lower end of the inclined plate and the water surface. Air directed downward from an airflow inlet is turned upward at the airflow reversal section and directed to an exhaust chamber through air circulation sections.

Abstract: A paint booth is provided with a purifier. The purifier includes a water tank, pump, water cord formation mechanism, sludge removal mechanism, exhaust mechanism, and barrier member. The water cord formation mechanism includes a water case located in an upper part of a spray chamber. A large number of nozzles are formed in a bottom wall of the water case. Each nozzle includes a tubular portion, the inside diameter of which is reduced downward from an inlet, and a circular outlet. Water falling in straight lines from the outlet forms a large number of parallel water cords. Paint mist is collected as air containing the paint mist contacts the water cords. An exhaust chamber is formed on the back side of the barrier member.

Abstract: A paint booth is provided with a purifier. The purifier includes a water tank, pump, water cord formation mechanism, sludge removal mechanism, exhaust mechanism, and barrier member. The water cord formation mechanism includes a water case located in an upper part of a spray chamber. A large number of nozzles are formed in a bottom wall of the water case. Each nozzle includes a tubular portion, the inside diameter of which is reduced downward from an inlet, and a circular outlet. Water falling in straight lines from the outlet forms a large number of parallel water cords. Paint mist is collected as air containing the paint mist contacts the water cords. An exhaust chamber is formed on the back side of the barrier member.

Abstract: A filtration device is provided with a filter tank, filter media unit, and magnet. The filter media unit includes a filter media accommodation case and a large number of magnetic granular filter media. The magnet is movable between first and second positions. In the first position, a magnetic field is applied to the magnetic granular filter media, so that the magnetic granular filter media magnetically attract one another. In the second position, magnetic attraction between the magnetic granular filter media is canceled. The filter media accommodation case includes a nonmagnetic mesh member of a nonmagnetic material and magnetism intensification plate of a magnetic material. When the magnet is in the first position, the magnetic granular filter media and nonmagnetic mesh member are located between the magnetism intensification plate and the magnet.

Abstract: A magnet drum mechanism of a magnet separator includes a cylindrical drum, a magnet provided inside of the drum and forming a magnetic field region configured to adsorb magnetic particles in a circumferentially partial range of an outer peripheral surface of the drum, and a scraper provided in a nonmagnetic field region of the drum, the scraper being configured to guide the magnetic particles adsorbed onto the outer peripheral surface of the drum to an outside of the separator main body in the nonmagnetic field region. The scraper includes a front end portion which faces the outer peripheral surface of the drum in a contactless manner along an axial direction of the drum, and a small gap is formed between the front end portion and the outer peripheral surface of the drum.

Abstract: A filtration device is provided with a filter tank, filter medium unit, magnet, and submerged air discharging mechanism. The filter medium unit includes a large number of magnetic filter medium granules formed of metal balls. When the magnet is in a first position, the magnetic filter medium granules magnetically attract one another. When the magnet is moved to a second position, the magnetic filter medium granules are released from the mutual magnetic attraction. In cleaning the magnetic filter medium granules, a clean fluid located above the magnetic filter medium granules is poured between the magnetic filter medium granules. In cleaning the magnetic filter medium granules, the submerged air discharging mechanism ejects air into the clean fluid above the magnetic filter medium granules and toward the magnetic filter medium granules. Air bubbles are introduced into the clean fluid by the ejected air.

Abstract: A contaminated fluid recovery apparatus includes a dirty tank, a conveyor, and a drum-shaped filter unit. Inlet ports of the drum-shaped filter unit open along an axis of a magnet drum. The conveyor scrapes out an object for removal settled on a bottom portion of the dirty tank toward an exit section. The conveyor includes a lower portion which moves along the bottom portion and an upper portion which passes over the lower portion. The magnet drum is located horizontally between the lower portion and the upper portion of the conveyor so that its axis is perpendicular to a direction of travel of the conveyor. The magnet drum is driven by a chain of the conveyor.

Abstract: A contaminated fluid recovery apparatus includes a sludge removal mechanism having a dirty tank, a conveyor, and a magnetic drum which is arranged in the fluid circulating section. The contaminated fluid recovery apparatus is provided with an overflow tank. The overflow tank has a function to keep a fluid surface of the dirty tank in a position higher than the fluid circulating section and the magnetic drum. The magnetic drum is located horizontally between a lower portion and an upper portion of the conveyor. The conveyor scrapes out chips deposited on a bottom portion of the dirty tank toward an exit section. A scraping member, which is in contact with the magnetic drum, drops sludge attracted to the magnetic drum toward the lower portion of the conveyor.

Abstract: A magnet drum mechanism of a magnet separator includes a cylindrical drum, a magnet provided inside of the drum and forming a magnetic field region configured to adsorb magnetic particles in a circumferentially partial range of an outer peripheral surface of the drum, and a scraper provided in a nonmagnetic field region of the drum, the scraper being configured to guide the magnetic particles adsorbed onto the outer peripheral surface of the drum to an outside of the separator main body in the nonmagnetic field region. The scraper includes a front end portion which faces the outer peripheral surface of the drum in a contactless manner along an axial direction of the drum, and a small gap is formed between the front end portion and the outer peripheral surface of the drum.