Abstract: A process gas supply unit without conventional pipes. The process gas supply unit may include the components of a mass flow controller, an input valve, an output valve, a purge valve, a vacuum valve, a check valve, a regulator, and a filter. Module blocks are attached to at least one of the components with bolts from a predetermined direction. The module blocks are mounted on base plates with bolts from the same predetermined direction, and the base plates are mounted on a mounting panel with bolts from the same predetermined direction.

Abstract: The present invention relates to a solenoid-operated valve for a thermally insulated piping having a thermally insulated outer periphery suitable for transporting low-temperature fluid, high-temperature fluid or the like and relates also to an attachment construction for the valve.Conventionally, with this type of solenoid-operated valve for a thermally insulated piping, since it is necessary to to increase a magnetic flux density of the solenoid coil by increasing the number of turns of the oil or the electric current to be applied thereto, there has been the problem of high production costs and running costs.In the case of the solenoid-operated valve for a thermally insulated piping according to the present invention, inside a heat-insulating layer (6) surrounding flow passages (7, 20, 21, 26, 33) in the form of a pipe, there is provided a fixed core (23) constituting a magnetic circuit between a solenoid coil (17) and a movable coil (18).