Patents by Inventor Minoru Yamasaka

Minoru Yamasaka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6881124
    Abstract: An L-shaped slide plate mounted with a workpiece holding device on a slide guide is firmly attached to an angle adjustment mechanism, and a reciprocating motion drive unit mounted with the angle adjustment mechanism on a slider table is firmly attached to a bridge so that an angle between a surface of a workpiece to be lapped and a surface of a lapping plate is kept substantially constant, and also the bridge is disposed so as to stride the lapping plate. Thereby, in a state of row bar in which a plurality of magnetic head sliders run in a line, an air bearing surface of magnetic head can be lapped with high accuracy with an element recession being decreased and an occurrence of a scratch being restrained.
    Type: Grant
    Filed: December 18, 2001
    Date of Patent: April 19, 2005
    Assignee: Hitachi Global Storage Technologies Japan, Ltd.
    Inventors: Toshio Takahashi, Hiromu Chiba, Takateru Seki, Hideaki Tanaka, Toshio Tamura, Minoru Yamasaka, Akio Takakura
  • Patent number: 6875326
    Abstract: A plasma processing device include a plasma generation unit for generating plasma by using a cathodic arc discharge, first and second magnetic field ducts arranged in a row for transporting the plasma with one end of the row being connected to the plasma generation unit and a processing chamber connected to the other end of the row unit and having a stage for holding a substrate to be processed. A shutter is provided for covering the plasma during a period of a predetermined time after start of arc discharge or during a period of predetermined time before end of arc discharge. The shutter is disposed between the first magnetic field duct and the substrate to be processed, and is movable. The shutter is capable of being supplied with a voltage, and is kept in a state so as to be electrically insulated from the processing chamber.
    Type: Grant
    Filed: December 16, 2002
    Date of Patent: April 5, 2005
    Assignees: Hitachi, Ltd., Nanofilm Technologies International PTE, Ltd.
    Inventors: Hiroshi Inaba, Shinji Sasaki, Shinya Hirano, Kenji Furusawa, Minoru Yamasaka, Atsushi Amatatsu, Shi Xu
  • Patent number: 6638403
    Abstract: In the plasma processing device which utilizes a low pressure arc discharge, a method for efficiently capturing and removing electrically charged particles and neutral particles having no charge which are at most 5 &mgr;m in particle diameter is demanded. The electrically charged particles can be captured efficiently by installing an electric field filter in a transportation course of plasma. The electric field filter has a cylindrical structure which is uneven in inner wall shape. A voltage in the range of 10 to 90 V is applied to the electric field filter. The neutral filters can be captured efficiently by installing a neutral filter having an opening sectional area which is at most 40% of a sectional area of the transportation course.
    Type: Grant
    Filed: August 23, 2000
    Date of Patent: October 28, 2003
    Assignees: Hitachi, Ltd., Nanofilm Technologies International PTE, Ltd.
    Inventors: Hiroshi Inaba, Shinji Sasaki, Shinya Hirano, Kenji Furusawa, Minoru Yamasaka, Atsushi Amatatsu, Shi Xu
  • Patent number: 6631547
    Abstract: To measure positions of a plurality of thin film magnetic head elements formed in a line on a bar, the quantity of positions of samples in the bar is estimated from the magnetic head elements the amount of deviation in position of the next element, and the distance between the elements are obtained, and the amount of deviation and distance are estimated by a primary approximate linear or several-order approximate curve. The estimated amount and the distance between the elements are moved simultaneously, and an image formed by a lens optical system is photo-converted to an image signal, and dimensions are computed. The conversion step is carried out immediately after movement of the next element and is continuously repeated, and the computing step is processed in parallel with the conversation step.
    Type: Grant
    Filed: February 8, 2001
    Date of Patent: October 14, 2003
    Assignee: Hitachi, Ltd.
    Inventors: Minoru Yoshida, Hideaki Sasazawa, Toshihiko Nakata, Minoru Yamasaka
  • Publication number: 20030094366
    Abstract: A plasma processing device include a plasma generation unit for generating plasma by using a cathodic arc discharge, first and second magnetic field ducts arranged in a row for transporting the plasma with one end of the row being connected to the plasma generation unit and a processing chamber connected to the other end of the row unit and having a stage for holding a substrate to be processed. A shutter is provided for covering the plasma during a period of a predetermined time after start of arc discharge or during a period of predetermined time before end of arc discharge. The shutter is disposed between the first magnetic field duct and the substrate to be processed, and is movable. The shutter is capable of being supplied with a voltage, and is kept in a state so as to be electrically insulated from the processing chamber.
    Type: Application
    Filed: December 16, 2002
    Publication date: May 22, 2003
    Inventors: Hiroshi Inaba, Shinji Sasaki, Shinya Hirano, Kenji Furusawa, Minoru Yamasaka, Atsushi Amatatsu, Shi Xu
  • Publication number: 20020126421
    Abstract: An L-shaped slide plate mounted with a workpiece holding device on a slide guide is firmly attached to an angle adjustment mechanism, and a reciprocating motion drive unit mounted with the angle adjustment mechanism on a slider table is firmly attached to a bridge so that an angle between a surface of a workpiece to be lapped and a surface of a lapping plate is kept substantially constant, and also the bridge is disposed so as to stride the lapping plate. Thereby, in a state of row bar in which a plurality of magnetic head sliders run in a line, an air bearing surface of magnetic head can be lapped with high accuracy with an element recession being decreased and an occurrence of a scratch being restrained.
    Type: Application
    Filed: December 18, 2001
    Publication date: September 12, 2002
    Applicant: Hitachi, Ltd.
    Inventors: Toshio Takahashi, Hiromu Chiba, Takateru Seki, Hideaki Tanaka, Toshio Tamura, Minoru Yamasaka, Akio Takakura
  • Publication number: 20020029459
    Abstract: There is provided a method for measuring positions of a plurality of thin film magnetic head elements formed in a line on a bar optically, efficiently, quickly and with high accuracy.
    Type: Application
    Filed: February 8, 2001
    Publication date: March 14, 2002
    Inventors: Minoru Yoshida, Hideaki Sasazawa, Toshihiko Nakata, Minoru Yamasaka