Patents by Inventor Minuru Kawamura

Minuru Kawamura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same
    Patent number: 7301159
    Abstract: A focused ion beam apparatus having two pieces of probers brought into contact with two points of a surface of a sample, a voltage source for applying a constant voltage between the two points with which the probers are brought into contact, and an ammeter for measuring a current flowing between the two points, in which a conductive film is formed to narrow a gap thereof between the two points by operating a deflection electrode and a gas gun and the current flowing between the two points is monitored, and when the current becomes a predetermined value, a focused charged particle beam irradiated to the surface of the sample is made OFF by the blanking electrode.
    Type: Grant
    Filed: August 3, 2005
    Date of Patent: November 27, 2007
    Assignee: Riken & SII NanoTechnology Inc.
    Inventors: Toshiaki Fujii, Masao Abe, Kunji Shigeto, Minuru Kawamura, Alekber Yu Kasumov, Kazuhito Tsukagoshi, Yoshinobu Aoyagi
  • Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same
    Publication number: 20060038137
    Abstract: A focused ion beam apparatus having two pieces of probers brought into contact with two points of a surface of a sample, a voltage source for applying a constant voltage between the two points with which the probers are brought into contact, and an ammeter for measuring a current flowing between the two points, in which a conductive film is formed to narrow a gap thereof between the two points by operating a deflection electrode and a gas gun and the current flowing between the two points is monitored, and when the current becomes a predetermined value, a focused charged particle beam irradiated to the surface of the sample is made OFF by the blanking electrode.
    Type: Application
    Filed: August 3, 2005
    Publication date: February 23, 2006
    Inventors: Toshiaki Fujii, Masao Abe, Kunji Shigeto, Minuru Kawamura, Alekber Kasumov, Kazuhito Tsukagoshi, Yoshinobu Aoyagi