Abstract: A substrate processing apparatus includes a chamber, an upper showerhead, a lower showerhead, a liner, a substrate support ring, and a first driving unit. The chamber provides a processing space for a substrate, the upper showerhead is provided in an upper region of an interior of the chamber, and the lower showerhead is provided in a lower region of the interior of the chamber. The liner is provided in the interior of the chamber, and allows the substrate to be seated thereon. The substrate support ring allows the substrate to be seated thereon, and moves between the lower showerhead and the liner. The first driving unit raises, lowers, and rotates the lower showerhead, and tilts the lower showerhead with respect to the substrate.

Abstract: A substrate processing apparatus includes a chamber, an upper showerhead, a substrate supporter, a lower showerhead assembly, a driving unit, an elevation unit, and a tilting unit. The chamber provides a processing space for a substrate, and the upper showerhead is provided in an upper region of an interior of the chamber. The substrate supporter is provided in the interior of the chamber to support the substrate, and the lower showerhead assembly is provided in an interior of the substrate supporter to supply process gas to the substrate. The driving unit adjusts a gap between the substrate and the lower showerhead assembly, and tilts the lower showerhead assembly with respect to the substrate. The elevation unit adjusts a gap between the substrate and the upper showerhead. The tilting unit tilts the substrate with respect to the upper showerhead.

Abstract: A substrate processing apparatus includes a chamber, an upper showerhead, a substrate supporter, a lower showerhead assembly, first and second elevation units, and first and second tilting units. The chamber provides a processing space for a substrate, and the upper showerhead is provided in an upper region of an interior of the chamber. The substrate supporter is provided in the interior of the chamber to support the substrate, and the lower showerhead assembly is provided in an interior of the substrate supporter to supply process gas to the substrate. The first elevation unit adjusts a gap between the substrate and the lower showerhead assembly, and the first tilting unit tilts the lower showerhead assembly with respect to the substrate. The second elevation unit adjusts a gap between the substrate and the upper showerhead, and the second tilting unit tilts the substrate with respect to the upper showerhead.

Abstract: Provided are a content caching optimization system and method. The content caching optimization system in which content priority in an information-centric networking (ICN) environment is taken into consideration includes one or more producer terminals configured to generate and provide content, one or more user terminals configured to transmit content requests according to users and receive content according to the content requests, one or more mobilelmultiple access edge cotnputings (MECs) configured to predict the number of requests for each piece of content to be requested later on the basis of the content requests received from the user terminals, and a software-defined network (SDN) controller configured to calculate a content popularity using the number of requests for each piece of content predicted by the MECs and perform content caching optimization on the basis of the calculated content popularity and a preset content priority.

Abstract: Provided are a content caching optimization system and method. The content caching optimization system in which content priority in an information-centric networking (ICN) environment is taken into consideration includes one or more producer terminals configured to generate and provide content, one or more user terminals configured to transmit content requests according to users and receive content according to the content requests, one or more mobile/multiple access edge computings (MECs) configured to predict the number of requests for each piece of content to be requested later on the basis of the content requests received from the user terminals, and a software-defined network (SDN) controller configured to calculate a content popularity using the number of requests for each piece of content predicted by the MECs and perform content caching optimization on the basis of the calculated content popularity and a preset content priority.

Abstract: The present disclosure relates to a showerhead assembly and a substrate processing apparatus, and more particularly to a showerhead assembly and a substrate processing apparatus including a ceramic heater that heats a substrate and by which hole processing is freely performed in a relatively high temperature process.

Abstract: The present disclosure relates to a showerhead assembly and a substrate processing apparatus, and more particularly to a showerhead assembly and a substrate processing apparatus including a ceramic heater that heats a substrate and by which hole processing is freely performed in a relatively high temperature process.

Abstract: Provided is a method of data caching in delay tolerant network based on information centric network and a recording medium and a device for performing the same. The data caching method includes: the step of checking a remaining buffer amount and a buffer usage amount of node, the step of caching data in the node which is received from another node according to a data caching policy, in case remaining buffer amount of the node is greater than a preset remaining buffer amount threshold, the step of deleting data cached in the node from the node according to a data deletion policy, in case the buffer usage amount of the node is less than a preset buffer usage amount threshold, and the step of setting an initial Time-to-Live (TTL) value of the data received from another node or updating a TTL of the data cached in the node using information of the data received from another node or information of the node.

Abstract: Provided is a method of data caching in delay tolerant network based on information centric network and a recording medium and a device for performing the same. The data caching method includes: the step of checking a remaining buffer amount and a buffer usage amount of node, the step of caching data in the node which is received from another node according to a data caching policy, in case remaining buffer amount of the node is greater than a preset remaining buffer amount threshold, the step of deleting data cached in the node from the node according to a data deletion policy, in case the buffer usage amount of the node is less than a preset buffer usage amount threshold, and the step of setting an initial Time-to-Live (TTL) value of the data received from another node or updating a TTL of the data cached in the node using information of the data received from another node or information of the node.

Abstract: Provided is an opportunistic forwarding method and apparatus for a content-based information centric network in a delay tolerant network environment. The opportunistic forwarding method for a content-based information centric network in a delay tolerant network environment having a processor and a memory includes when a first node contacts a second node, updating a first delivery predictability and a second delivery predictability of the first node based on contact record information between the first node and the second node and data that the second node has, updating a first message of the first node by comparing the first message including first interest information and first data that the first node has with a second message including second interest information and second data that the second node has, and delivering the first message of the first node to the second node based on the first and second delivery predictabilities of the first node.

Abstract: Provided is an opportunistic forwarding method and apparatus for a content-based information centric network in a delay tolerant network environment. The opportunistic forwarding method for a content-based information centric network in a delay tolerant network environment having a processor and a memory includes when a first node contacts a second node, updating a first delivery predictability and a second delivery predictability of the first node based on contact record information between the first node and the second node and data that the second node has, updating a first message of the first node by comparing the first message including first interest information and first data that the first node has with a second message including second interest information and second data that the second node has, and delivering the first message of the first node to the second node based on the first and second delivery predictabilities of the first node.

Abstract: Provided is an opportunistic forwarding method and apparatus for a content-based information centric network in a delay tolerant network environment. The opportunistic forwarding method for a content-based information centric network in a delay tolerant network environment having a processor and a memory includes when a first node contacts a second node, updating a first delivery predictability and a second delivery predictability of the first node based on contact record information between the first node and the second node and data that the second node has, updating a first message of the first node by comparing the first message including first interest information and first data that the first node has with a second message including second interest information and second data that the second node has, and delivering the first message of the first node to the second node based on the first and second delivery predictabilities of the first node.

Abstract: Provided is an opportunistic forwarding method and apparatus for a content-based information centric network in a delay tolerant network environment. The opportunistic forwarding method for a content-based information centric network in a delay tolerant network environment having a processor and a memory includes when a first node contacts a second node, updating a first delivery predictability and a second delivery predictability of the first node based on contact record information between the first node and the second node and data that the second node has, updating a first message of the first node by comparing the first message including first interest information and first data that the first node has with a second message including second interest information and second data that the second node has, and delivering the first message of the first node to the second node based on the first and second delivery predictabilities of the first node.