Abstract: An imaging method comprises the steps of: putting an object in a detection region, and biasing a detector (1-8) relative to the object; moving an imaging system along a longitudinal Z axis, enabling a ray source (1-7) and the detector (1-8) to synchronously perform circular movement around the object, performing scanning and data collection, and supplementing the data; and reconstructing the collected data to obtain a complete object image. The imaging method combines detector biasing and spiral scanning, solves the problem that an image splicing method used in conventional CT imaging generates artifacts, reduces the usage area of the detector, and reduces system cost.

Abstract: A residual gas analyzer can be used as a deposition rate monitor. A deposition rate monitor is based on the detection of growth precursors and reaction byproducts of the thin film growth in deposition equipment such as chemical vapor deposition (CVD) systems. The growth precursors and byproducts are identified and quantified by using a residual gas analyzer (RGA). The ion current from gas species associated with the growth rate is then empirically correlated with the thickness of the film. The specific chemical species detected by the RGA is unique to the material that is deposited and to the technique in which the material is deposited.

Abstract: A residual gas analyzer can be used as a deposition rate monitor. A deposition rate monitor is based on the detection of growth precursors and reaction byproducts of the thin film growth in deposition equipment such as chemical vapor deposition (CVD) systems. The growth precursors and byproducts are identified and quantified by using a residual gas analyzer (RGA). The ion current from gas species associated with the growth rate is then empirically correlated with the thickness of the film. The specific chemical species detected by the RGA is unique to the material that is deposited and to the technique in which the material is deposited.