Abstract: Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies connecting a connection bridge so as to support the driving masses; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.

Abstract: An inertial sensor includes a plate-like substrate layer, a mass body, a support frame, a limit stop extending in the central direction of the mass body from the support frame, and a detection unit detecting the displacement of the displacement part. The inertial sensor adopts the limit stop limiting the downward displacement of the mass body to prevent the support portion of the mass body from being damaged.

Abstract: An angular rate sensor having two generally planar proof masses disposed along a drive axis in the plane of the masses, a sense axis perpendicular to the drive axis, and an input axis perpendicular to the plane of the masses. The masses are suspended from a pair of driving frames, which are mounted and constrained for anti-phase linear movement along the drive axis in drive-mode. Detectors responsive to the anti-phase movement of the masses in directions parallel to the sense axis in response to Coriolis forces produced by rotation of the masses about the input axis for monitoring rate of rotation about the input axis.

Abstract: An angular rate sensor having two generally planar proof masses, a sense axis in the plane of the masses, and an input axis perpendicular to the sense axis. The masses are suspended from a driving frame, which is mounted for torsional movement about the input axis in drive-mode. And the masses are constrained for anti-phase movement along the sense axis in sense-mode in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the anti-phase movement of the masses along the sense axis for monitoring rate of rotation.

Abstract: An angular rate sensor having two generally planar proof masses disposed along a drive axis in the plane of the masses, a sense axis perpendicular to the drive axis, and an input axis perpendicular to the plane of the masses. The masses are suspended from a pair of driving frames, which are mounted and constrained for anti-phase linear movement along the drive axis in drive-mode. Detectors responsive to the anti-phase movement of the masses in directions parallel to the sense axis in response to Coriolis forces produced by rotation of the masses about the input axis for monitoring rate of rotation about the input axis.

Abstract: An angular rate sensor having two generally planar proof masses, a sense axis in the plane of the masses, and an input axis perpendicular to the sense axis. The masses are suspended from a driving frame, which is mounted for torsional movement about the input axis in drive-mode. And the masses are constrained for anti-phase movement along the sense axis in sense-mode in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the anti-phase movement of the masses along the sense axis for monitoring rate of rotation.

Abstract: An angular rate sensor having two generally planar proof masses, a drive axis in the plane of the masses, and an input axis perpendicular to the drive axis. The masses are suspended from a sensing frame and constrained for anti-phase movement along the drive axis in drive-mode. The sensing frame is mounted for torsional movement in sense-mode about the input axis in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the torsional movement of the sensing frame and the masses about the input axis for monitoring rate of rotation.

Abstract: Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies supporting the driving masses so as to freely move in a state in which the driving masses float; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.

Abstract: Angular rate sensor for detecting rotation about first, second and third mutually perpendicular input axes having a plurality of generally planar proof masses coupled together for linear drive-mode oscillation along multi-directional drive axes in a plane formed by the first and second input axes. The masses are mounted on a generally planar sense frame for linear movements relative to the sense frame in drive-mode and for rotation together with the sense frame in sense modes. The sense frame is mounted for rotation with the masses in sense modes about the first, second, and third input axes independent of each other, in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively. And capacitance sensors responsive to the rotational movements of the masses and the sense frame in sense modes are employed for monitoring rate of rotation.

Abstract: Disclosed herein is an inertial sensor. There is provided an inertial sensor 100, including: a plate-like substrate layer 110, a mass body 130, a post 140, a support part 150 extending in the central direction of the mass body 130 from the post 140, and a detection unit 170 detecting the displacement of the displacement part 113. The inertial sensor adopts the support part 150 limiting the downward displacement of the mass body 130 to prevent the support portion of the mass body 130 from being damaged.

Abstract: Angular rate sensor for detecting rotation about first, second and third mutually perpendicular input axes having a plurality of generally planar proof masses coupled together for linear drive-mode oscillation along multi-directional drive axes in a plane formed by the first and second input axes. The masses are mounted on a generally planar sense frame for linear movements relative to the sense frame in drive-mode and for rotation together with the sense frame in sense modes. The sense frame is mounted for rotation with the masses in sense modes about the first, second, and third input axes independent of each other, in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively. And capacitance sensors responsive to the rotational movements of the masses and the sense frame in sense modes are employed for monitoring rate of rotation.

Abstract: Micromachined gyroscope having a pair of masses disposed generally in a plane and driven for out-of-plane torsional oscillation about a pair of drive axes in the plane for sensing rotation about an input axis perpendicular to the drive axes. The masses are mounted for in-plane torsional movement about sense axes perpendicular to the drive axes and the input axis in response to Coriolis forces produced by rotation of the masses about the input axis. A link connects the two masses together for movement of equal amplitude and opposite phase both about the drive axes and about the sense axes. The masses are connected to transducers having input electrodes constrained for linear in-plane movement relative to stationary electrodes, with that torsional movement of the masses about the sense axes producing changes in capacitance between the input electrodes and the stationary electrodes.

Abstract: Micromachined accelerometer having one or more proof masses (16, 36, 37, 71, 72) mounted on one or more decoupling frames (17, 38, 39) or on a shuttle (73) such that the proof mass(es) can move along a first (y) axis in response to acceleration along the first axis while being constrained against movement along a second (x) axis and for torsional movement about a third (z) axis perpendicular to the first and second axes in response to acceleration along the second axis. Electrodes (26, 53, 54, 78, 79) that move with the proof mass(es) are interleaved with stationary electrodes (27, 56, 57, 81, 82) to form capacitors (A-D) that change in capacitance both in response to movement of the proof mass(es) along the first axis and in response to torsional movement of the proof mass(es) about the third axis, and circuitry (31-34) connected to the electrodes for providing output signals corresponding to acceleration along the first and second axes.

Abstract: Rate sensor having a plurality of generally planar masses, a drive axis in the planes of the masses, an input axis perpendicular to the drive axis, and sense axes perpendicular to the drive axis and the input axis. The masses are driven to oscillate about drive axes and are mounted for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the messes about the input axis, with sensors responsive to the torsional movement about the sense axis for monitoring rate of rotation.

Abstract: Rate sensor having a plurality of generally planar masses, a drive axis in the plane of each of the masses, an input axis perpendicular to the drive axes, and sense axes perpendicular to the drive axes and the input axis. The masses are driven to oscillate about the drive axes and are mounted for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the torsional movement about the sense axis for monitoring rate of rotation.

Abstract: Rate sensor having a plurality of generally planar masses, a drive axis in the planes of the masses, an input axis perpendicular to the drive axis, and sense axes perpendicular to the drive axis and the input axis. The masses are driven to oscillate about the drive axes and are mounted for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the torsional movement about the sense axis for monitoring rate of rotation.

Abstract: Rate sensor comprising a plurality of generally planar masses, a drive axis in the plane of each of the masses, means for driving the masses to oscillate about the drive axes, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, and means responsive to the torsional movement about the sense axis for monitoring rate of rotation about the input axis.

Abstract: Rate sensor having a plurality of generally planar masses, means for driving the masses to oscillate about a drive axis in the planes of the masses, an input axis perpendicular to the drive axis, sense axes perpendicular to the drive axis and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, and means responsive to the torsional movement about the sense axis for monitoring rate of rotation about the input axis.

Abstract: Rate sensor comprising two generally planar proof masses, means for driving the masses to oscillate in phase opposition about parallel drive axes in the planes of the masses, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, means constraining the two masses for anti-phase movement about both the drive axes and the sense axes, sensing frames coupled to the masses for movement in response to the torsional movement of the masses about the sense axes, and means responsive to movement of the sensing frames for monitoring rate of rotation about the input axis.

Abstract: An apparatus to measure micro-forces includes a cantilever palette with a set of cantilever array blocks. Each cantilever array block includes a set of cantilevers, with each cantilever including a set of cantilever fingers surrounded by a frame with frame fingers. The cantilever fingers and the frame fingers form a diffraction grating. Each cantilever array block is configured to be responsive to a predetermined micro-force, such that cantilevers of the cantilever array block deflect in the presence of the predetermined micro-force, which causes the diffraction grating to diffract light and thereby provide a visual indication of the presence of the predetermined micro-force.