Patents by Inventor Mirko Buechsenschuetz

Mirko Buechsenschuetz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
    Publication number: 20240012334
    Abstract: A projection exposure apparatus comprises an optical element. The optical element comprises a main body and an actuator for deforming an optically effective surface formed on the main body. The actuator is in a recess in the rear side of the main body.
    Type: Application
    Filed: June 22, 2023
    Publication date: January 11, 2024
    Inventors: Markus Raab, Andreas Raba, Mirko Buechsenschuetz, Matthias Manger