Abstract: A method of plasma treatment of an internal and/or external surface of a hollow electrically non-conductive body. The internal surface of the body and/or its external surface acts a layer of electrical plasma of a surface dielectric barrier discharge generated in a volume of gas by alternating or pulse voltage with an amplitude higher than 100 V from a pair of liquid electrodes formed by an internal electrically conductive liquid situated inside the body and by an external electrically conductive liquid situated outside the body. The electrical plasma is generated above the surface of the electrically conductive liquid, where in the volume of the gas forms a layer of electrical plasma forming a ring copying the shape of the surface of the body wherein the electrical resistance between the liquid electrodes is greater than 10 k?. The invention also is a device for carrying out the aforementioned method.

Abstract: A method for reducing or removing organic and/or inorganic contamination from a vacuum system of imaging and analytical devices, wherein at least a portion of the area of the inner surface of the vacuum space of the vacuum system is provided with a photocatalytic layer, at least a portion of this photocatalytic layer being cooled to a temperature in the range of 0 K to 280 K, whereby the photocatalytic layer is afterwards at least partially irradiated by electromagnetic radiation, which activates a photocatalytic reaction of the photocatalytic layer with the adsorbed gases of the atmosphere of the inner vacuum space of the vacuum system, where this reaction decomposes the contaminants, reducing their concentration and/or the concentration of water in the inner vacuum space of the vacuum system.

Abstract: A method of plasma treatment of an internal and/or external surface of a hollow electrically non-conductive body. The internal surface of the body and/or its external surface acts a layer of electrical plasma of a surface dielectric barrier discharge generated in a volume of gas by alternating or pulse voltage with an amplitude higher than 100 V from a pair of liquid electrodes formed by an internal electrically conductive liquid situated inside the body and by an external electrically conductive liquid situated outside the body. The electrical plasma is generated above the surface of the electrically conductive liquid, where in the volume of the gas forms a layer of electrical plasma forming a ring copying the shape of the surface of the body wherein the electrical resistance between the liquid electrodes is greater than 10 k?. The invention also is a device for carrying out the aforementioned method.

Abstract: A method for the treatment of inner surfaces of vacuum components and the device for carrying it out which enables the reduction of undesirable organic and inorganic contamination of vacuum systems not only in those that are being produced, but also enables the reduction of contamination in systems that are already in use, such as SEM, TEM, SEM-FIB, XPS, MALDI, SIMS and other analytical and inspection techniques. The proposed method for contaminant treatment derives benefit from a photocatalytic process, which is actually a chemical decomposition of contaminants using a photocatalytic material and electromagnetic radiation, the photocatalytic material being cooled simultaneously to a low temperature. The photocatalytic material is applied to the walls of the vacuum system or vacuum units, which are included in the system, in the form of a layer.

Abstract: The present invention relates to an apparatus for treatment of the surface of metals and metalloids, metal oxides and metalloid oxides, and metal nitrides and metalloid nitrides using the action of electric plasma. The invention disclosed herein includes at least one electrode system (1) consisting of electrode systems (2) and (3) situated inside of a dielectric body (4). The electrode systems (2) and (3), above which diffuse plasma is generated preferably at atmospheric pressure, are situated on the same side of the treated surface (5) and are energised by alternating or pulsed electrical voltage applied between them. The invention further relates to a method for treatment of the surface of metals and metalloids, metal oxides and metalloid oxides, and metal nitrides and metalloid nitrides using the action of electric plasma, consisting in treating such surfaces with diffuse plasma generated using the apparatus according to the invention, preferably at atmospheric pressure.

Abstract: The present invention relates to a device for cleaning, etching, activation and subsequent treatments of glass surfaces, glass surfaces coated with metal oxides or with organic material layers, SiO2-layer coated materials, and SiO2-layer coated materials with an organic material surface coating by effects of an electrical plasma layer. The invention disclosed herein includes at least one electrode system (1) consisting of at least two electrodes (2) and (3) situated inside of a dielectric body (4). An electrical plasma layer is generated preferably at atmospheric gas pressure, and preferably above the electrodes (2) and (3) situated on the same side of the treated glass, metal oxide coated glass, other SiO2-coated materials and SiO2-coated materials with a layer of organic material (5) and which are energized by an alternating or pulsed electrical voltage applied between them.

Abstract: A method and apparatus perform surface treatment of fibers of woven and non-woven textile materials to be affected by electrical plasma generated by electrical discharges from two electrically conductive electrodes situated inside a dielectric body. A voltage of a frequency from 50 Hz to 1 MHz and magnitude from 100 V to 100 kV is applied between the electrodes of the electrode system which is situated in a gas at a pressure from 1 kPa to 1,000 kPa. The electrical plasma is generated on a portion of the dielectric body surface without contacting the electrically conductive electrodes. The apparatus treats textile materials using electrically conductive electrodes situated inside of the dielectric body and are situated on the same side of the textile material affected by the plasma. The electrically conductive electrodes are parallel with the portion of the surface of the dielectric body on which the electrical plasma is generated.