Abstract: A vacuum pump has a working space, a bearing space, a dividing wall arranged between the working space and the bearing space and at least one rotor shaft which extends through the dividing wall and which forms a gap with the dividing wall and having a blocking device for blocking between the working space and the bearing space. The blocking device is formed by a Siegbahn pump stage which is configured for providing a pump action passing through the gap between the working space and the bearing space.

Abstract: A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.

Abstract: A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.

Abstract: A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.

Abstract: A vacuum pump has a working space, a bearing space, a dividing wall arranged between the working space and the bearing space and at least one rotor shaft which extends through the dividing wall and which forms a gap with the dividing wall and having a blocking device for blocking between the working space and the bearing space. The blocking device is formed by a Siegbahn pump stage which is configured for providing a pump action passing through the gap between the working space and the bearing space.

Abstract: A vacuum pump includes a rotor and a rotary bearing, which is to be supplied with an operating medium, for the rotatable support of the rotor, wherein the rotor has a conveying section, in particular a conical conveying section, for supplying the operating medium to the rotary agent. A conveying pump is provided for conveying the operating medium and/or an operating medium store is provided having an absorbent storage means for the operating medium. Further, at least one wick is provided which is in contact with the conveying section to transfer the operating medium provided from the conveying pump and/or from the absorbent storage means to the conveying section in a desired quantity.

Abstract: A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.

Abstract: A support device for rotatably supporting a rotor (1) and including a support rotor (2; 2?) connectable with the rotor (1); a support stator (3; 3?) and a connection element (5; 5?) displaceably supported in a housing portion (4a, 4b) of the support device and connected with the support stator (3; 3?), with the connection element (5; 5?) and the housing portion (4a, 4b) having each a flat surface (11; 10), and with the flat surfaces (11; 10) being located opposite each other and extending parallel to each other.