Patents by Inventor Mirko Tröller

Mirko Tröller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device, system and method for plasma-enhanced chemical vapor deposition
    Patent number: 12454756
    Abstract: A device for plasma-enhanced chemical vapor deposition includes a process chamber configured to receive at least one workpiece carrier. The device is configured to heat the process chamber with the aid of at least one workpiece carrier that can be received by the process chamber. A system and a method for plasma-enhanced chemical vapor deposition are also provided.
    Type: Grant
    Filed: September 14, 2021
    Date of Patent: October 28, 2025
    Assignee: centrotherm international AG
    Inventors: Jens-Uwe Fuchs, Mirko Tröller, Ralf Reize, Roland Leichtle
  • DEVICE, SYSTEM AND METHOD FOR PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION
    Publication number: 20230349046
    Abstract: A device for plasma-enhanced chemical vapor deposition includes a process chamber configured to receive at least one workpiece carrier. The device is configured to heat the process chamber with the aid of at least one workpiece carrier that can be received by the process chamber. A system and a method for plasma-enhanced chemical vapor deposition are also provided.
    Type: Application
    Filed: September 14, 2021
    Publication date: November 2, 2023
    Inventors: Jens-Uwe Fuchs, Mirko Tröller, Ralf Reize, Roland Leichtle
  • WORKPIECE HOLDER, SYSTEM, AND OPERATING METHOD FOR PECVD
    Publication number: 20230349044
    Abstract: A workpiece holder for a plasma-enhanced chemical vapor deposition system is configured to produce a plasma from a process gas surrounding the workpiece holder. The workpiece holder is also configured to heat the surroundings of the workpiece holder to a process temperature provided for the vapor deposition. A chemical vapor deposition system and an operating method for the system are also provided.
    Type: Application
    Filed: September 14, 2021
    Publication date: November 2, 2023
    Inventors: Jens-Uwe Fuchs, Mirko Tröller, Ralf Reize, Roland Leichtle