Abstract: In a method for generating a textured surface of a semiconductor layer, a surface of the semiconductor layer is etched anisotropically with a first alkaline etching solution to generate a surface of the semiconductor layer including pyramid-shape textures. Subsequently, the surface including the pyramid-shaped textures is etched anisotropically with a second alkaline etching solution, which differs from the first alkaline etching solution, to cause material removal of the pyramid-shaped textures, thereby reducing a height difference between peaks and neighboring valleys of the pyramid-shaped textures. A method for manufacturing a tandem solar cell further includes generating a first solar cell structure of the tandem solar cell including the textured surface, and generating a second solar cell structure of the tandem solar cell on the side of the first solar cell structure on which the textured surface is arranged.

Abstract: A method and a wet bench for processing a plurality of solar cell substrates are described. Each solar cell substrate includes a silicon wafer. The method includes steps of removing at least a partial area of a near-surface layer of the silicon wafer by an etching process by treating the surface of the solar cell substrate with an etching liquid, and producing a silicon oxide thin film at least on a partial surface of the solar cell substrate by treating the partial surface with an oxidising liquid. The solar cell substrates are subjected to process steps (i) and (ii) sequentially, one after the other within a single processing apparatus. The wet bench usable for etching liquid baths as well as oxidation liquid baths in which the solar cell substrates may be superficially oxidised, for example in an ozone-containing solution.

Abstract: The present invention is directed to a process for manufacturing a starting material for a silicon solar cell having passivated contacts, a system for carrying out the process, and an intermediate product resulting from the process.