Patents by Inventor Misaki HANAOKA

Misaki HANAOKA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR SENSOR AND METHOD FOR MANUFACTURING SAME
    Publication number: 20240145324
    Abstract: Plural hollow structure bodies (3) are formed in a semiconductor substrate (1) in an array manner. The Plural hollow structure bodies (3) have a detection part (4) as a hollow structure and a getter part (5) as a hollow structure different from the detection part (4). A support body (6) demarcates the plural hollow structure bodies (3). The detection part (4) has a detection device (14) inside. The getter part (5) has a getter (16) inside. The detection part (4) and the getter part (5) are spatially joined together by a tunnel portion (7) formed in the support body (6).
    Type: Application
    Filed: March 1, 2022
    Publication date: May 2, 2024
    Applicant: Mitsubishi Electric Corporation
    Inventors: Misaki HANAOKA, Hisatoshi HATA