Abstract: A transistor (10) is formed with a low resistance trench structure that is utilized for a gate (17) of the transistor. The low resistance trench structure facilitates forming a shallow source region (49) that reduces the gate-to-source capacitance.

Abstract: An integrated circuit (100) includes high performance complementary bipolar NPN and PNP vertical transistors (10, 20). The NPN transistor is formed on a semiconductor substrate whose surface (24) is doped to form a PNP base region (28, 70). A film (32, 34, 30) is formed on the surface with an opening (42) over an edge of the base region. A first conductive spacer (48) is formed along a first sidewall (78) of the opening to define a PNP emitter region (67) within the base region. A second conductive spacer (47) is formed along a second sidewall (76) of the opening to define a PNP collector region (66).

Abstract: A transistor (10) is formed with a low resistance trench structure that is utilized for a gate (17) of the transistor. The low resistance trench structure facilitates forming a shallow source region (49) that reduces the gate-to-source capacitance.

Abstract: An integrated circuit (100) includes high performance complementary bipolar NPN and PNP vertical transistors (10, 20). The NPN transistor is formed on a semiconductor substrate whose surface (24) is doped to form a PNP base region (28, 70). A film (32, 34, 30) is formed on the surface with an opening (42) over an edge of the base region. A first conductive spacer (48) is formed along a first sidewall (78) of the opening to define a PNP emitter region (67) within the base region. A second conductive spacer (47) is formed along a second sidewall (76) of the opening to define a PNP collector region (66).

Abstract: A masking material (14) is formed on a foundation layer (12) and a substrate (10). A mask (16) is disposed onto the masking material (14) where a trench (26) is desired to be formed. An etch step removes all of the masking material (14) except at regions where the mask (16) was formed leaving a protruding portion (18) with an opening (20) on either side. An epi layer (24), is grown on the foundation layer (12) adjacent to the protruding portion (18) in the opening (20). A wet oxide etch process is used to remove the protruding portion (18) leaving a trench (26) formed in the epi layer (24). To complete the process, a silicon wet etch process is used to round off the corners at an edge (28) of the trench (26).

Abstract: A transistor (10) is formed with a low resistance trench structure that is utilized for a gate (17) of the transistor. The low resistance trench structure facilitates forming a shallow source region (49) that reduces the gate-to-source capacitance.

Abstract: A semiconductor component (100) includes a semiconductor substrate (16) that is formed with trench (27). A semiconductor layer (20) is formed in the trench for coupling a control signal (VB) through a sidewall (25) of the trench to route a current (Ic) through a bottom surface (23) of the trench.

Abstract: A method of forming a semiconductor device (1000) includes the step of exposing a first region (140) of a semiconductor substrate (101) with a photomask (180). A material is implanted into the first region to form a compound that masks the first region of the semiconductor substrate to form an electrode (155) of the semiconductor device.

Abstract: A semiconductor component (100) includes a semiconductor substrate (16) that is formed with trench(27). A semiconductor layer (20) is formed in the trench for coupling a control signal (VB) through a sidewall (25) of the trench to route a current (Ic) through a bottom surface (23) of the trench.

Abstract: A semiconductor device (20) has a substrate (61) having a first surface (42) with a <110> crystal orientation and formed with a trench (50). A conduction path (72) is formed along a first surface (51) of the trench to provide a channel current (ID) in response to a control signal (VGATE).