Patents by Inventor Mistuo Sato

Mistuo Sato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of patterning thin film
    Patent number: 4592801
    Abstract: A method of patterning a thin film by dry etching is disclosed in which, in order for a thin alumina film to have a predetermined pattern, the thin alumina film is selectively removed by carrying out the ion beam etching which uses a carbon fluoride gas, while using a photoresist film as a mask.
    Type: Grant
    Filed: August 9, 1984
    Date of Patent: June 3, 1986
    Assignee: Computer Basic Technology Research Association
    Inventors: Shinichi Hara, Shinji Narishige, Tsuneo Yoshinari, Mistuo Sato, Katsuya Mitsuoka, Makoto Morijiri, Masanobu Hanazono, Tetsuo Kobayashi