Patents by Inventor Misuzu Sagawa

Misuzu Sagawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11075500
    Abstract: An optical device includes a first substrate, having first and second surfaces, and a second substrate having a third surface. The first substrate includes: a laser unit, having an active layer and emitting light into the first substrate from the active layer; a reflecting mirror, having a plane obliquely intersecting an optical axis of light emitted from the laser unit, and being formed on the first surface so as to reflect the light toward the second surface; and a convex lens, being formed in a region on the second surface, the region including an optical axis of the light reflected by the reflecting mirror. The second substrate is provided with a grating coupler and an optical waveguide on the third surface, the optical waveguide having light incident on the grating coupler propagating therethrough.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: July 27, 2021
    Assignee: Lumentum Japan, Inc.
    Inventors: Hideo Arimoto, Koichiro Adachi, Misuzu Sagawa, Takanori Suzuki, Hiroyasu Sasaki
  • Patent number: 10662059
    Abstract: The invention is to reduce non-uniformity of a processing shape over a wide range of a single field-of-view. The invention is directed to a method of processing micro electro mechanical systems with a first step and a second step in a processing apparatus including an irradiation unit that irradiates a sample with a charged particle beam, a shape measuring unit that measures a shape of the sample, and a control unit. In the first step, the irradiation unit irradiates a plurality of single field-of-view points with the charged particle beam in a first region of the sample, the shape measuring unit measures the shape of a spot hole formed in the first region of the sample, and the control unit sets, based on measurement results of the shape of the spot hole, a scan condition of the charged particle beam or a forming mask of the charged particle beam at each of the single field-of-view points.
    Type: Grant
    Filed: June 22, 2018
    Date of Patent: May 26, 2020
    Assignee: HITACHI, LTD.
    Inventors: Keiji Watanabe, Hiroyasu Shichi, Misuzu Sagawa, Toshiyuki Mine, Daisuke Ryuzaki
  • Patent number: 10538429
    Abstract: In a calculator in a MEMS manufacturing system, a stage control unit inclines a stage based on a stage angle 1 setting a stage inclination angle and a stage angle 2 of the inclination angle different from the stage angle 1. A stage-angle calculation unit calculates the stage inclination angles from first and second images acquired by a SEM apparatus when the stage control unit sets the stage at the stage angles 1 and 2. A 3D-data creation unit creates three-dimensional device data from a third image that is a device image acquired when the stage is set at the stage angle 1 and a fourth image that is a device image acquired when the stage is set at the stage angle 2. When the three-dimensional device data is created, a correction value calculated from the stage angles 1 and 2 and the first and second images is used.
    Type: Grant
    Filed: July 9, 2018
    Date of Patent: January 21, 2020
    Assignee: Hitachi, Ltd.
    Inventors: Misuzu Sagawa, Atsushi Isobe
  • Patent number: 10410826
    Abstract: The invention is directed to a technique for reducing the time from the start of fabrication of a prototype structure to the completion of fabrication of a real structure. A device processing method includes steps of: fabricating a first structure using an ion beam under a first condition in a first region on a substrate; measuring a size of the first structure which is fabricated; comparing the measurement result with design data; determining a second condition from the comparison result; and fabricating a second structure using the ion beam under the second condition in a second region on the substrate.
    Type: Grant
    Filed: March 18, 2016
    Date of Patent: September 10, 2019
    Assignee: HITACHI, LTD.
    Inventors: Tetsufumi Kawamura, Misuzu Sagawa, Kazuki Watanabe, Keiji Watanabe, Shuntaro Machida, Nobuyuki Sugii, Daisuke Ryuzaki
  • Publication number: 20190084830
    Abstract: In a calculator in a MEMS manufacturing system, a stage control unit inclines a stage based on a stage angle 1 setting a stage inclination angle and a stage angle 2 of the inclination angle different from the stage angle 1. A stage-angle calculation unit calculates the stage inclination angles from first and second images acquired by a SEM apparatus when the stage control unit sets the stage at the stage angles 1 and 2. A 3D-data creation unit creates three-dimensional device data from a third image that is a device image acquired when the stage is set at the stage angle 1 and a fourth image that is a device image acquired when the stage is set at the stage angle 2. When the three-dimensional device data is created, a correction value calculated from the stage angles 1 and 2 and the first and second images is used.
    Type: Application
    Filed: July 9, 2018
    Publication date: March 21, 2019
    Inventors: Misuzu SAGAWA, Atsushi ISOBE
  • Publication number: 20190062157
    Abstract: The invention is to reduce non-uniformity of a processing shape over a wide range of a single field-of-view. The invention is directed to a method of processing micro electro mechanical systems with a first step and a second step in a processing apparatus including an irradiation unit that irradiates a sample with a charged particle beam, a shape measuring unit that measures a shape of the sample, and a control unit. In the first step, the irradiation unit irradiates a plurality of single field-of-view points with the charged particle beam in a first region of the sample, the shape measuring unit measures the shape of a spot hole formed in the first region of the sample, and the control unit sets, based on measurement results of the shape of the spot hole, a scan condition of the charged particle beam or a forming mask of the charged particle beam at each of the single field-of-view points.
    Type: Application
    Filed: June 22, 2018
    Publication date: February 28, 2019
    Inventors: Keiji WATANABE, Hiroyasu SHICHI, Misuzu SAGAWA, Toshiyuki MINE, Daisuke RYUZAKI
  • Publication number: 20190036295
    Abstract: An optical device includes a first substrate, having first and second surfaces, and a second substrate having a third surface. The first substrate includes: a laser unit, having an active layer and emitting light into the first substrate from the active layer; a reflecting mirror, having a plane obliquely intersecting an optical axis of light emitted from the laser unit, and being formed on the first surface so as to reflect the light toward the second surface; and a convex lens, being formed in a region on the second surface, the region including an optical axis of the light reflected by the reflecting mirror. The second substrate is provided with a grating coupler and an optical waveguide on the third surface, the optical waveguide having light incident on the grating coupler propagating therethrough.
    Type: Application
    Filed: September 28, 2018
    Publication date: January 31, 2019
    Inventors: Hideo ARIMOTO, Koichiro ADACHI, Misuzu SAGAWA, Takanori SUZUKI, Hiroyasu SASAKI
  • Publication number: 20190013179
    Abstract: The invention is directed to a technique for reducing the time from the start of fabrication of a prototype structure to the completion of fabrication of a real structure. A device processing method includes steps of: fabricating a first structure using an ion beam under a first condition in a first region on a substrate; measuring a size of the first structure which is fabricated; comparing the measurement result with design data; determining a second condition from the comparison result; and fabricating a second structure using the ion beam under the second condition in a second region on the substrate.
    Type: Application
    Filed: March 18, 2016
    Publication date: January 10, 2019
    Applicant: HITACHI, LTD.
    Inventors: Tetsufumi KAWAMURA, Misuzu SAGAWA, Kazuki WATANABE, Keiji WATANABE, Shuntaro MACHIDA, Nobuyuki SUGII, Daisuke RYUZAKI
  • Patent number: 10002801
    Abstract: The device manufacturing method includes a length measuring step (S5) of, on the basis of an observation target image of an SEM image taken from a direction having a predetermined angle from a direction perpendicular to a plane of a substrate, measuring the thickness of a target object, or the depth of etching, formed on the substrate. In addition, in the length measuring step, an etching angle made by a cross section of the etching and the direction perpendicular to the plane of the substrate is calculated from processing data of the target object, and the thickness of the target object or the depth of the etching is measured on the basis of the calculated etching angle.
    Type: Grant
    Filed: May 17, 2017
    Date of Patent: June 19, 2018
    Assignee: HITACHI, LTD.
    Inventors: Misuzu Sagawa, Tetsufumi Kawamura
  • Publication number: 20180005906
    Abstract: The device manufacturing method includes a length measuring step (S5) of, on the basis of an observation target image of an SEM image taken from a direction having a predetermined angle from a direction perpendicular to a plane of a substrate, measuring the thickness of a target object, or the depth of etching, formed on the substrate. In addition, in the length measuring step, an etching angle made by a cross section of the etching and the direction perpendicular to the plane of the substrate is calculated from processing data of the target object, and the thickness of the target object or the depth of the etching is measured on the basis of the calculated etching angle.
    Type: Application
    Filed: May 17, 2017
    Publication date: January 4, 2018
    Inventors: Misuzu SAGAWA, Tetsufumi KAWAMURA
  • Publication number: 20160111852
    Abstract: An optical device includes a first substrate, having first and second surfaces, and a second substrate having a third surface. The first substrate includes: a laser unit, having an active layer and emitting light into the first substrate from the active layer; a reflecting mirror, having a plane obliquely intersecting an optical axis of light emitted from the laser unit, and being formed on the first surface so as to reflect the light toward the second surface; and a convex lens, being formed in a region on the second surface, the region including an optical axis of the light reflected by the reflecting mirror. The second substrate is provided with a grating coupler and an optical waveguide on the third surface, the optical waveguide having light incident on the grating coupler propagating therethrough.
    Type: Application
    Filed: December 16, 2015
    Publication date: April 21, 2016
    Inventors: Hideo ARIMOTO, Koichiro ADACHI, Misuzu SAGAWA, Takanori SUZUKI, Hiroyasu SASAKI
  • Patent number: 9244231
    Abstract: An optical device includes a first substrate, having first and second surfaces, and a second substrate having a third surface. The first substrate includes: a laser unit, having an active layer and emitting light into the first substrate from the active layer; a reflecting mirror, having a plane obliquely intersecting an optical axis of light emitted from the laser unit, and being formed on the first surface so as to reflect the light toward the second surface; and a convex lens, being formed in a region on the second surface, the region including an optical axis of the light reflected by the reflecting mirror. The second substrate is provided with a grating coupler and an optical waveguide on the third surface, the optical waveguide having light incident on the grating coupler propagating therethrough.
    Type: Grant
    Filed: November 27, 2013
    Date of Patent: January 26, 2016
    Assignee: OCLARO JAPAN, INC.
    Inventors: Hideo Arimoto, Koichiro Adachi, Misuzu Sagawa, Takanori Suzuki, Hiroyasu Sasaki
  • Patent number: 9052449
    Abstract: The light emitting device includes an active layer formed on a semiconductor substrate for emitting light, a semiconductor layer of a first conductivity type electrically connected to one end of the active layer, a semiconductor layer of a second conductivity type electrically connected to the other end of the active layer, first and second electrodes, a feedback mechanism for laser oscillation, and a waveguide for guiding the light emitted from the active layer, in which the active layer is made of a semiconductor having an affinity with a silicon CMOS process, and the semiconductor layer of the first conductivity type and the semiconductor layer of the second conductivity type, and the waveguide are each made of silicon as a part of the semiconductor substrate.
    Type: Grant
    Filed: November 24, 2013
    Date of Patent: June 9, 2015
    Assignee: Hitachi, Ltd.
    Inventors: Misuzu Sagawa, Katsuya Oda, Kazuki Tani
  • Publication number: 20140241734
    Abstract: The light emitting device includes an active layer formed on a semiconductor substrate for emitting light, a semiconductor layer of a first conductivity type electrically connected to one end of the active layer, a semiconductor layer of a second conductivity type electrically connected to the other end of the active layer, first and second electrodes, a feedback mechanism for laser oscillation, and a waveguide for guiding the light emitted from the active layer, in which the active layer is made of a semiconductor having an affinity with a silicon CMOS process, and the semiconductor layer of the first conductivity type and the semiconductor layer of the second conductivity type, and the waveguide are each made of silicon as a part of the semiconductor substrate.
    Type: Application
    Filed: November 24, 2013
    Publication date: August 28, 2014
    Applicant: Hitachi, Ltd.
    Inventors: Misuzu Sagawa, Katsuya Oda, Kazuki Tani
  • Publication number: 20140153605
    Abstract: An optical device includes a first substrate, having first and second surfaces, and a second substrate having a third surface. The first substrate includes: a laser unit, having an active layer and emitting light into the first substrate from the active layer; a reflecting mirror, having a plane obliquely intersecting an optical axis of light emitted from the laser unit, and being formed on the first surface so as to reflect the light toward the second surface; and a convex lens, being formed in a region on the second surface, the region including an optical axis of the light reflected by the reflecting mirror. The second substrate is provided with a grating coupler and an optical waveguide on the third surface, the optical waveguide having light incident on the grating coupler propagating therethrough.
    Type: Application
    Filed: November 27, 2013
    Publication date: June 5, 2014
    Applicant: Oclaro Japan, Inc.
    Inventors: Hideo ARIMOTO, Koichiro ADACHI, Misuzu SAGAWA, Takanori SUZUKI, Hiroyasu SASAKI
  • Patent number: 8036533
    Abstract: An optical element mounting substrate where a plurality of light emitting elements have been mounted on the same plane, a lens array for collimating a plurality of light emitted from the plurality of light emitting elements, and a wavelength multiplexing/demultiplexing device are prepared. The wavelength multiplexing/demultiplexing device has typically mounted both a wavelength selecting filter and a mirror on front and rear planes of a transparent substrate. These three components are mounted within a package at a desirable angle position. Optical axes of respective wavelengths of the wavelength multiplexing/demultiplexing device are determined based upon a thickness and an angle of the light emitting element mounting substrate, and are arrayed on a straight line of a horizontal plane. As a consequence, if the respective light emitting elements are arranged on the optical axes which are exclusively determined by a design work, then optical multiplexing/demultiplexing operations can be carried out.
    Type: Grant
    Filed: October 20, 2008
    Date of Patent: October 11, 2011
    Assignee: Hitachi, Ltd.
    Inventors: Kazuhiko Hosomi, Misuzu Sagawa, Toshiki Sugawara, Masahiro Aoki
  • Publication number: 20100178053
    Abstract: In an optical communications system in which an OLT transceiver and a plurality of ONU transceivers are connected to each other via an optical fiber and a TDMA system in which a signal from each of the ONU transceivers is issued at a timing assigned by the OLT transceiver is used, each of the ONU transceivers includes a light source which has modulation function of a Fabry-Perot laser that oscillates multi-mode lights of different wavelengths, the OLT transceiver includes a single-longitudinal-mode light source which has modulation function of a DFB laser that oscillates a single-longitudinal-mode light, and the light source which has modulation function included in each of the ONU transceivers and the single-longitudinal-mode light source which has modulation function included in the OLT transceiver are optically connected to each other via an optical fiber.
    Type: Application
    Filed: January 13, 2010
    Publication date: July 15, 2010
    Applicant: HITACHI, LTD.
    Inventors: Misuzu SAGAWA, Toshiki SUGAWARA
  • Publication number: 20090103923
    Abstract: An optical element mounting substrate where a plurality of light emitting elements have been mounted on the same plane, a lens array for collimating a plurality of light emitted from the plurality of light emitting elements, and a wavelength multiplexing/demultiplexing device are prepared. The wavelength multiplexing/demultiplexing device has typically mounted both a wavelength selecting filter and a mirror on front and rear planes of a transparent substrate. These three components are mounted within a package at a desirable angle position. Optical axes of respective wavelengths of the wavelength multiplexing/demultiplexing device are determined based upon a thickness and an angle of the light emitting element mounting substrate, and are arrayed on a straight line of a horizontal plane. As a consequence, if the respective light emitting elements are arranged on the optical axes which are exclusively determined by a design work, then optical multiplexing/demultiplexing operations can be carried out.
    Type: Application
    Filed: October 20, 2008
    Publication date: April 23, 2009
    Inventors: Kazuhiko HOSOMI, Misuzu Sagawa, Toshiki Sugawara, Masahiro Aoki
  • Publication number: 20090097847
    Abstract: An optical module comprising: a submount provided on a CAN stem; light-emitting device and a light-receiving device; a CAN cap or package; and an optical multiplexer/demultiplexer having a wavelength selective filter on a substrate that has transmissivity to passing light and a mirror, where an extending direction of the optical multiplexer/demultiplexer is fixed in the CAN cap or the package being tilted by an angle ? (??2N?, N=0, 1, 2, . . . ) in a two-dimensional cross section with respect to one surface of an optical device mounting board, outgoing light from the light-emitting device passes through the wavelength selective filter and the substrate and enters an optical fiber outside the cap, and outgoing light from the optical fiber enters the optical multiplexer/demultiplexer and is reflected by the wavelength selective filter and further reflected by the mirror, and then exits the optical multiplexer/demultiplexer to enter the light-receiving device.
    Type: Application
    Filed: October 10, 2008
    Publication date: April 16, 2009
    Inventors: Kazuhiko HOSOMI, Misuzu SAGAWA, Toshiki SUGAWARA, Masahiro AOKI
  • Publication number: 20030179803
    Abstract: A vertical cavity surface emitting laser, useful as a light source in a semiconductor laser module, comprising an InP substrate having an active layer that emits light and a resonator structure having mirrors located above and below the active layer to obtain a laser beam from the light and emit the laser beam substantially perpendicular to the substrate, where at least one of the mirrors is made of AlGaAs/AlGaSb superlattices having an average composition of Al(x)Ga(1-x)AsSb and AlGaAs/AlGaSb superlattices having an average composition of Al(y)Ga(1-y)AsSb (0≦x<y≦1).
    Type: Application
    Filed: January 24, 2003
    Publication date: September 25, 2003
    Applicant: Hitachi, Ltd.
    Inventor: Misuzu Sagawa