Patents by Inventor Mitch Mircea Tanase

Mitch Mircea Tanase has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical polishing composition
    Patent number: 5891205
    Abstract: A chemical mechanical polishing composition for polishing an oxide layer of a semiconductor device, the composition comprising an alkaline aqueous dispersion containing generally uniformly-shaped nanocrystalline particles of cerium oxide derived from a physical vapor synthesis process, generally uniformly-shaped particles of silicon dioxide, and wherein the cerium oxide particles are substantially the same or smaller in size and size distribution to the silicon dioxide particles. The ratio of the weight of the silicon dioxide in the composition to the weight of the cerium oxide in the composition is in the range from about 7.5:1 to about 1:1.
    Type: Grant
    Filed: August 14, 1997
    Date of Patent: April 6, 1999
    Assignee: EKC Technology, Inc.
    Inventors: S. Charles Picardi, Mitch Mircea Tanase