Patents by Inventor Mitchell Drew
Mitchell Drew has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11978649Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: GrantFiled: December 7, 2021Date of Patent: May 7, 2024Assignee: Brooks Automation US, LLCInventors: Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo Moura
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Publication number: 20220172972Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: ApplicationFiled: December 7, 2021Publication date: June 2, 2022Inventors: Robert T. CAVENEY, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo Moura
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Patent number: 11195738Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: GrantFiled: March 20, 2020Date of Patent: December 7, 2021Assignee: Brooks Automation, Inc.Inventors: Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo Moura
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Publication number: 20200321232Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: ApplicationFiled: March 20, 2020Publication date: October 8, 2020Inventors: Robert T. CAVENEY, Jayaraman KRISHNASAMY, Ulysses GILCHRIST, Mitchell DREW, Jairo MOURA
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Patent number: 10600665Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: GrantFiled: June 18, 2019Date of Patent: March 24, 2020Assignee: BROOKS AUTOMATION, INC.Inventors: Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo T. Moura
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Publication number: 20190304823Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: ApplicationFiled: June 18, 2019Publication date: October 3, 2019Inventors: Robert T. CAVENEY, Jayaraman KRISHNASAMY, Ulysses GILCHRIST, Mitchell DREW, Jairo T. MOURA
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Patent number: 10325795Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: GrantFiled: December 20, 2017Date of Patent: June 18, 2019Assignee: Brooks Automation, Inc.Inventors: Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo T. Moura
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Publication number: 20180138066Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: ApplicationFiled: December 20, 2017Publication date: May 17, 2018Inventors: Robert T. CAVENEY, Jayaraman KRISHNASAMY, Ulysses GILCHRIST, Mitchell DREW, Jairo T. MOURA
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Patent number: 9852935Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: GrantFiled: January 5, 2016Date of Patent: December 26, 2017Assignee: Brooks Automation, Inc.Inventors: Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo T. Moura
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Patent number: 9230841Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: GrantFiled: December 22, 2014Date of Patent: January 5, 2016Assignee: Brooks Automation, Inc.Inventors: Ulysses Gilchrist, Robert T. Caveney, Jayaraman Krishnasamy, Mitchell Drew, Jairo T. Moura
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Patent number: 9117859Abstract: A substrate processing apparatus including a chamber capable of holding an isolated atmosphere and having a front and rear disposed along a longitudinal axis and a transport apparatus located in the chamber, and having twin scara arms and a drive section with a coaxial drive shaft assembly, each shaft of which being operably connected to at least one rotatable link of both scara arms to move the twin scara arms, wherein movement of one of the twin scara arms mirrors movement of another of the twin scara arms across the longitudinal axis.Type: GrantFiled: August 31, 2007Date of Patent: August 25, 2015Assignee: Brooks Automation, Inc.Inventors: Alexander G. Krupyshev, Mitchell Drew
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Publication number: 20150110584Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: ApplicationFiled: December 22, 2014Publication date: April 23, 2015Inventors: Ulysses Gilchrist, Robert T. Caveney, Jayaraman Krishnasamy, Mitchell Drew, Jairo T. Moura
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Patent number: 8918203Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: GrantFiled: March 12, 2012Date of Patent: December 23, 2014Assignee: Brooks Automation, Inc.Inventors: Ulysses Gilchrist, Robert T. Caveney, Jayaraman Krishnasamy, Mitchell Drew, Jairo T. Moura
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Publication number: 20120232690Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: ApplicationFiled: March 12, 2012Publication date: September 13, 2012Applicant: Brooks Automation, Inc.Inventors: Ulysses Gilchrist, Robert T. Caveney, Jayaraman Krishnasamy, Mitchell Drew, Jairo T. Moura
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Publication number: 20100168679Abstract: Disclosed is an ultra-low dose injection delivery system. The system includes a pistol grip having front and rear handles, a barrel containing an injectable fluid, and a bottle mount integrated with the barrel for receiving and securing a bottle holder, the bottle mount including a conduit running from a spike tip that punctures a bung of the bottle into the barrel. The system further includes a needle coupling attached to the barrel adapted to receive and secure a needle and a plunger for assisting in drawing an injectable fluid from a bottle into the barrel and for forcing the injectable fluid out of the barrel. A ratcheting mechanism incrementally advances a selectable ultra-low dose of injectable fluid out of the barrel upon a full stroke of the pistol grip. A full stroke is defined as advancing the plunger forward by squeezing the front and rear handles together until the ratcheting mechanism stops the plunger from further advancing yet still allows the front and rear handles to be fully squeezed.Type: ApplicationFiled: December 29, 2009Publication date: July 1, 2010Inventors: Kimberly Quinn, Mitchell Drew Rivenbark, Williams O. Boone
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Publication number: 20080056856Abstract: A substrate processing apparatus including a chamber capable of holding an isolated atmosphere and having a front and rear disposed along a longitudinal axis and a transport apparatus located in the chamber, and having twin scara arms and a drive section with a coaxial drive shaft assembly, each shaft of which being operably connected to at least one rotatable link of both scara arms to move the twin scara arms, wherein movement of one of the twin scara arms mirrors movement of another of the twin scara arms across the longitudinal axis.Type: ApplicationFiled: August 31, 2007Publication date: March 6, 2008Applicant: Brooks Automation, Inc.Inventors: Alexander G. Krupyshev, Mitchell Drew
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Patent number: 6719517Abstract: A substrate processing apparatus comprising a frame, at least one processing module, and a substrate transport apparatus. The frame defines a first chamber with outer substrate transport openings for transporting substrates between the first chamber and an exterior of the frame. The processing module is connected to the exterior of the frame. The processing module communicates with the first chamber of the frame through at least one of the outer openings. The substrate transport apparatus is connected to the frame for transporting substrates between the first chamber and the processing module exterior to the frame. The frame has a second integral chamber formed therein. The second integral chamber communicates with the first chamber through an internal substrate transport opening of the frame. The second integral chamber of the frame has a selectable configuration from a number of predetermined configurations.Type: GrantFiled: December 4, 2001Date of Patent: April 13, 2004Assignee: Brooks AutomationInventors: David R. Beaulieu, Douglas R. Adams, Mitchell Drew, Peter Van Der Meulen
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Publication number: 20030103836Abstract: A substrate processing apparatus comprising a frame, at least one processing module, and a substrate transport apparatus. The frame defines a first chamber with outer substrate transport openings for transporting substrates between the first chamber and an exterior of the frame. The processing module is connected to the exterior of the frame. The processing module communicates with the first chamber of the frame through at least one of the outer openings. The substrate transport apparatus is connected to the frame for transporting substrates between the first chamber and the processing module exterior to the frame. The frame has a second integral chamber formed therein. The second integral chamber communicates with the first chamber through an internal substrate transport opening of the frame. The second integral chamber of the frame has a selectable configuration from a number of predetermined configurations.Type: ApplicationFiled: December 4, 2001Publication date: June 5, 2003Inventors: David R. Beaulieu, Douglas R. Adams, Mitchell Drew, Peter Van Der Meulen