Patents by Inventor Mitchell Lindsay

Mitchell Lindsay has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Rectangular cuboid, non-polarizing beam splitter that avoids interference fringes from surface reflections
    Patent number: 12656621
    Abstract: A non-polarizing beam splitter can be a rectangular cuboid. A diagonal surface in the beam splitter extends from a corner between the first surface and the second surface at a 45° angle to a point on the third surface or the fourth surface. A beam of light is split into a transmitted beam and a reflected beam using the non-polarizing beam splitter.
    Type: Grant
    Filed: September 25, 2023
    Date of Patent: June 16, 2026
    Assignee: KLA Corporation
    Inventors: Haifeng Huang, Mitchell Lindsay, Eric Vella, Thomas Redding
  • Correcting aberration and apodization of an optical system using correction plates
    Patent number: 12092814
    Abstract: An optical system with aberration correction is disclosed. The optical system may include an illumination source. The optical system may include a detector. The optical system may include one or more collection optics configured to image a sample onto the detector based on illumination from the illumination source. The optical system may include two or more aberration correction plates located in one or more pupil planes of the one or more collection optics. The two or more aberration correction plates may provide at least partial correction of two or more linearly-independent aberration terms. Any particular one of the two or more aberration correction plates may have a spatially-varying thickness profile providing a selected amount of correction for a single particular aberration term of the two or more linearly-independent aberration terms.
    Type: Grant
    Filed: January 12, 2022
    Date of Patent: September 17, 2024
    Assignee: KLA Corporation
    Inventors: Haifeng Huang, Rui-Fang Shi, Joseph Walsh, Mitchell Lindsay, Eric Vella
  • RECTANGULAR CUBOID, NON-POLARIZING BEAM SPLITTER THAT AVOIDS INTERFERENCE FRINGES FROM SURFACE REFLECTIONS
    Publication number: 20240280828
    Abstract: A non-polarizing beam splitter can be a rectangular cuboid. A diagonal surface in the beam splitter extends from a corner between the first surface and the second surface at a 45° angle to a point on the third surface or the fourth surface. A beam of light is split into a transmitted beam and a reflected beam using the non-polarizing beam splitter.
    Type: Application
    Filed: September 25, 2023
    Publication date: August 22, 2024
    Inventors: Haifeng Huang, Mitchell Lindsay, Eric Vella, Thomas Redding
  • CORRECTING ABERRATION AND APODIZATION OF AN OPTICAL SYSTEM USING CORRECTION PLATES
    Publication number: 20220244530
    Abstract: An optical system with aberration correction is disclosed. The optical system may include an illumination source. The optical system may include a detector. The optical system may include one or more collection optics configured to image a sample onto the detector based on illumination from the illumination source. The optical system may include two or more aberration correction plates located in one or more pupil planes of the one or more collection optics. The two or more aberration correction plates may provide at least partial correction of two or more linearly-independent aberration terms. Any particular one of the two or more aberration correction plates may have a spatially-varying thickness profile providing a selected amount of correction for a single particular aberration term of the two or more linearly-independent aberration terms.
    Type: Application
    Filed: January 12, 2022
    Publication date: August 4, 2022
    Inventors: Haifeng Huang, Rui-Fang Shi, Joseph Walsh, Mitchell Lindsay, Eric Vella