Patents by Inventor Mitchell W. McFeron

Mitchell W. McFeron has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluid delivery system and method
    Patent number: 10495259
    Abstract: A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.
    Type: Grant
    Filed: June 27, 2017
    Date of Patent: December 3, 2019
    Assignee: ENTEGRIS, INC.
    Inventors: Glenn M. Tom, Donald D. Ware, Richard D. Chism, Jordan Hodges, Mitchell W. McFeron
  • Ultra-high purity storage and dispensing of liquid reagents
    Patent number: 10358263
    Abstract: A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels.
    Type: Grant
    Filed: August 7, 2013
    Date of Patent: July 23, 2019
    Assignee: Entegris, Inc.
    Inventors: Donn K. Naito, Andy Krell, Mitchell W. McFeron, Steven Jackson, Joel Robison
  • Fluid delivery system and method
    Patent number: 9695985
    Abstract: A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.
    Type: Grant
    Filed: February 22, 2013
    Date of Patent: July 4, 2017
    Assignee: Entegris, Inc.
    Inventors: Jordan Hodges, Richard D. Chism, Mitchell W. McFeron, Donald D. Ware, Glenn M. Tom
  • ULTRA-HIGH PURITY STORAGE AND DISPENSING OF LIQUID REAGENTS
    Publication number: 20150210430
    Abstract: A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels.
    Type: Application
    Filed: August 7, 2013
    Publication date: July 30, 2015
    Applicant: ENTEGRIS, INC.
    Inventors: Donn K. Naito, Andy Krell, Mitchell W. McFeron, Steven Jackson, Joel Robison
  • FLUID DELIVERY SYSTEM AND METHOD
    Publication number: 20150013834
    Abstract: A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.
    Type: Application
    Filed: February 22, 2013
    Publication date: January 15, 2015
    Inventors: Jordan Hodges, Richard D. Chism, Mitchell W. McFeron, Donald D. Ware, Glenn M. Tom