Abstract: A wafer transfer system is operable with a front or side loading wafer carrier to move one or more wafers in a straight line from the carrier to a position in which the wafers are accessible for further processing by movement along the same straight line. The transfer system provides a wafer extractor which employs a plurality of paired fingers of a size and configuration to fit between the spaced, stacked wafers in the carrier. After insertion between the wafers, the fingers are movable by a small amount vertically to lift the wafers off the shoulders of the carrier. The fingers, now supporting the wafers, are movable generally horizontally along a straight line to remove the wafers from the carrier. The fingers are supported from a support structure in a manner which provides clearance for the wafers to pass through the support structure for further processing along the same straight line path.

Abstract: A wafer transfer system is operable with a front or side loading wafer carrier to move one or more horizontally oriented wafers out of the carrier and to rotate the wafers to a vertical orientation in which the wafers are accessible for further processing. The transfer system provides a wafer extractor which employs a plurality of paired fingers of a size and configuration to fit between the spaced, stacked wafers in the carrier for lifting the wafers off the shoulders of the carrier. The fingers are then movable generally horizontally to remove the wafers from the carrier into two angled combs having ledges for receiving wafers. The fingers and combs are rotated to a vertical orientation in which the wafers are supported along their edges by the combs. The fingers are shifted horizontally a small amount relative to the combs to disengage from the wafers, either by a translation following the rotation or by rotating the fingers and combs about different axes.

Abstract: A computer controlled transport system for carrying materials, such as semiconductors, to various work stations at spaced apart locations within a common facility. The system comprises a routing controller, a monorail track extending past the work stations and consisting of a plurality of modular track sections. The track sections are interconnected to one another by at least one routing module, such as a turntable, transfer station, etc., to establish plural paths along the track. Plural cars are provided for supporting the materials and carrying them along the track. The cars are battery powered. The system also includes plural control modules located adjacent the track at spaced locations. Each car is individually identifiable and includes control circuitry and communication circuitry. Each of the control modules also includes control circuitry and communication circuitry. The control modules are connected to the routing controller by a local area network.

Abstract: A robotic system including a manipulator arm for moving a device to a predetermined point within a working volume under control of microprocessor based control unit. The manipulator arm includes various sections and joints defining a base, a shoulder, an arm and a wrist. The wrist is jointed to pivot about a pitch axis and a roll axis. The manipulator is arranged to pivot the arm about the base axis and shoulder axis, which axes intersect at a common point. The arm includes a section which is extendable through the use of telescoping links. The wrist is mounted on the end of the telescoping links, with the pitch and roll axes intersecting at a second point. The second point lies along the extension axis of the arm links and is spaced from the shoulder-base axis intersection point. The links forming the telescoping section are arranged to move in unison with each other. A motor and associated harmonic drives are provided to effect the motion at the joints.

Abstract: In a robotic apparatus having a manipulator arm including plural motors to move the arm to predetermined spatial positions and a control system for the arm, a common bus and common memory connected to the bus. The control system comprises respective microprocessor based controllers for each of the joints, microprocessor based computation means for performing the mathematical computation to control the trajectories of the arm and common microprocessor based coordinating control system for coordinating the activities of the other modular microprocessor based control system. Accessing routine is associated with the bus for providing each of the microprocessor based control system with direct, exclusive access to the bus during respective time intervals. The common memory serves as a depository for messages to and from the microprocessor based control system to enable intercommunication between the microprocessor based control system accessing the bus.

Abstract: A dynamic vertical angle sensor operable on a vehicle that isolates the output device from the vehicle movement in that the rotor of the output data device is not directly coupled to the sensor mounting frame. The output rotor is driven by a low pass servo that is slaved to a level sensor, which in itself is driven by the same servo until it is nulled. The level sensor which may be a pendulum, is mounted free from the output device so as to rotate independently therefrom, thus allowing the error signal to be picked off of the pendulum mounting and applied to the low pass servo system. Because a low pass filter is in series with the servo drive, high frequency disturbances are greatly attenuated in the output device, to effectively provide a DC average angle signal that is required, for example, in a tank system, rather than instantaneous values.