Abstract: A vacuum processing apparatus includes a decompressable process container; a supply port configured to supply, to the process container, an ionic liquid that absorbs an oxidizing gas; and a discharge port configured to discharge the ionic liquid supplied to the process container. A recess is provided at a joint portion between members constituting the process container. The supply port is configured to supply the ionic liquid to the recess, and the discharge port is configured to discharge the ionic liquid supplied to the recess.

Abstract: An object of the invention is to provide an optical coupling apparatus in which light-transmitting resin is prevented from entering a hole of a substrate, and a method for manufacturing the same. In this construction, a cushioning pattern is formed around each of the holes on the surface of the substrate. During a primary molding operation, a protrusion of an upper mold is brought into press-contact with the cushioning pattern formed around the hole of the substrate, so that the hole is blocked up perfectly, thereby preventing the light-transmitting resin from entering the hole.

Abstract: A rotation detector has a rotation disc which is rotatably held on a rotation shaft, a plurality of teeth which are arranged on a surface of the rotation disc along an external periphery thereof, and at least one reflective photocoupler which is positioned slightly away from a surface of the rotation disc and opposed to the teeth. Light is emitted from the reflective photocoupler and impinges on the teeth of the rotation disc 1. The incident light is reflected by the teeth, and impinges on the reflective photocoupler. This rotation detector detects the rotation angle and rotation speed of the rotation disc, based on the receiver's optical outputs. Provision of a second reflective photocoupler enables the device to detect the direction of rotation.

Abstract: An object of the invention is to provide an optical coupling apparatus in which light-transmitting resin is prevented from entering a hole of a substrate, and a method for manufacturing the same. In this construction, a cushioning pattern is formed around each of the holes on the surface of the substrate. During a primary molding operation, a protrusion of an upper mold is brought into press-contact with the cushioning pattern formed around the hole of the substrate, so that the hole is blocked up perfectly, thereby preventing the light-transmitting resin from entering the hole.