Abstract: A charged particle beam instrument is offered which can easily perform an in situ observation in a gaseous atmosphere. The charged particle beam instrument (100) is used to perform an observation of a specimen (S) placed in a gaseous atmosphere and has a specimen chamber (2), a gas supply portion (6) for supplying a gas into the specimen chamber (2), a venting portion (7) for venting the specimen chamber (2), a gaseous environment adjuster (4), and a gas controller (812) for controlling the gaseous environment adjuster (4). This adjuster (4) has a gas inflow rate adjusting valve (40) for adjusting the flow rate of the gas supplied into the specimen chamber (2) and a first vacuum gauge (CG1) for measuring the pressure of the gas supplied into the specimen chamber (2).

Abstract: A charged particle beam instrument is offered which can easily perform an in situ observation in a gaseous atmosphere. The charged particle beam instrument (100) is used to perform an observation of a specimen (S) placed in a gaseous atmosphere and has a specimen chamber (2), a gas supply portion (6) for supplying a gas into the specimen chamber (2), a venting portion (7) for venting the specimen chamber (2), a gaseous environment adjuster (4), and a gas controller (812) for controlling the gaseous environment adjuster (4). This adjuster (4) has a gas inflow rate adjusting valve (40) for adjusting the flow rate of the gas supplied into the specimen chamber (2) and a first vacuum gauge (CG1) for measuring the pressure of the gas supplied into the specimen chamber (2).

Abstract: An electron microscope which permits an operator to perform astigmatic correction and beam alignment. A field of view capable of clearly displaying astigmatism or beam misalignment in terms of a Ronchigram is placed on the optical axis. Then, the operator selects a Ronchigram display mode. A first or second TV camera such as a CCD camera is selected and placed on the optical axis while maintaining the electron optics in the STEM imaging mode. Under this condition, a Ronchigram signal is obtained from the TV camera and supplied to a computer via a TV power supply and an interface. As a result, a Ronchigram of appropriate size and brightness is displayed in an image display region on a display device. The operator corrects astigmatism or adjusts the alignment while observing the Ronchigram.

Abstract: An electron microscope which permits an operator to perform astigmatic correction and beam alignment. A field of view capable of clearly displaying astigmatism or beam misalignment in terms of a Ronchigram is placed on the optical axis. Then, the operator selects a Ronchigram display mode. A first or second TV camera such as a CCD camera is selected and placed on the optical axis while maintaining the electron optics in the STEM imaging mode. Under this condition, a Ronchigram signal is obtained from the TV camera and supplied to a computer via a TV power supply and an interface. As a result, a Ronchigram of appropriate size and brightness is displayed in an image display region on a display device. The operator corrects astigmatism or adjusts the alignment while observing the Ronchigram.