Abstract: An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.

Abstract: An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.

Abstract: Provided is a member for semiconductor manufacturing device which hardly causes component contamination and is capable of sufficiently reducing generation of particles in a semiconductor manufacturing device. A spray coating is formed by spraying a ceramic onto a mounting member of a transfer arm, and laser beam is irradiated to the spray coating to remelt and resolidify the ceramic composition for modification to thereby form a high-strength ceramic layer made from a ceramic recrystallized material and having a net-like crack, whereby particles dropped out from the mounting member due to external factors in a semiconductor manufacturing device are reduced to an extent not affecting a semiconductor manufacturing process.

Abstract: Forming a densified layer in a spray coating which forms a densified layer providing a sufficient effect while preventing generation of excessively large cracks and does not cause the increase of costs; also provided in a spray coating covering member. When a high-energy beam for remelting and resolidifying a coating composition of a surface layer of an Al2O3 spray coating is scanned over a surface of the Al2O3 spray coating, it is constituted with a precedent laser beam precedently scanned in a scanning direction and a follow-up laser beam subserviently scanned on the same trajectory as that of the precedent laser beam, and the precedent laser beam is irradiated on to the surface of the Al2O3 spray coating while scanning, and the follow-up laser beam is superimposedly irradiated to an irradiation region scanned with the precedent laser beam while scanning to thereby densify the surface layer of the irradiation region.

Abstract: A crane device is installed in a freight car with a roof and comprises a revolvable frame suspended by the roof so as to be revolvable about a vertical axis, a derrick boom assembly having a telescopically extendable boom and luffably supported by the revolvable frame, a winch mounted on the revolvable frame and operating to lower and raise a cargo hook via a length of wire rope, a control system using motive power to operate the crane device, and a safety system having a tactile sensor on the front end of the boom and operating to stop movements of the boom when the sensor contacts an object such as a part of a freight car or a piece of cargo. The winch is provided with a safety device for preventing excessive unwinding of the wire rope.